An electron emission structure according to embodiments of the inventive concept includes a cathode electrode and electron emission yarns each having a yarn shape and disposed in the cathode electrode. Here, the cathode electrode includes a plurality of first conductive panels spaced apart from each other in a first direction and at least one second conductive panel that crosses the first conductive panels in the first direction. Also, each of the first conductive panels includes at least one groove at an upper portion thereof. The second conductive panel is inserted to the groove of each of the first conductive panels. Each of the electron emission yarns is disposed between the first conductive panels. Each of the electron emission yarns contacts the second conductive panel. Each of the electron emission yarns is mechanically fixed and vertically aligned as well as arranged regularly by the second conductive panel and one pair of adjacent first conductive panels of the first conductive panels.

An X-ray tube according to an embodiment of the inventive concept includes a cathode structure; an anode structure spaced vertically from the cathode structure, a gate electrode structure disposed between the cathode structure and the anode structure, an emitter array disposed between the cathode structure and the gate electrode structure, a tube sheath configured to connect the cathode structure and the anode structure, and a fixing unit connected with the gate electrode structure. The cathode structure includes a first rotation shaft and a cathode connected with the first rotation shaft as one body. The gate electrode structure includes a second rotation shaft and a gate electrode connected with the second rotation shaft through a bearing, and the second rotation shaft is connected with the first rotation shaft by a coupling unit. The gate electrode includes a gate electrode substrate and a protruding part that protrudes from the gate electrode substrate toward an emitter. The protruding part of the gate electrode includes a gate hole that vertically overlaps the emitter. The fixing unit includes a ferromagnetic structure attached to one surface of the gate electrode substrate and disposed on an outer portion of the substrate and a permanent magnet disposed adjacent to the ferromagnetic structure with the tube sheath therebetween.

A modular laser-produced plasma X-ray system includes a liquid metal flow system enclosed within a low-pressure chamber, the flow system including a liquid metal, wherein in at least one location on the liquid metal forms a metal target directly illuminated by laser pulses, a circulation pump within the liquid metal flow system for circulating the liquid metal, a laser pulse emitter configured to transmit laser pulses into the chamber via a laser window, focusing optics, located between the emitter and the metal target, the focusing optics directing the laser pulses to strike the metal target at a target location to form X-ray pulses, and an X-ray window positioned within the chamber to enable the X-ray pulses to exit the chamber.

Methods and systems for realizing a high radiance x-ray source based on a high density electron emitter array are presented herein. The high radiance x-ray source is suitable for high throughput x-ray metrology and inspection in a semiconductor fabrication environment. The high radiance X-ray source includes an array of electron emitters that generate a large electron current focused over a small anode area to generate high radiance X-ray illumination light. In some embodiments, electron current density across the surface of the electron emitter array is at least 0.01 Amperes/mm.sup.2, the electron current is focused onto an anode area with a dimension of maximum extent less than 100 micrometers, and the spacing between emitters is less than 5 micrometers. In another aspect, emitted electrons are accelerated from the array to the anode with a landing energy less than four times the energy of a desired X-ray emission line.

A CNT X-ray tube control system according to an embodiment of the present disclosure includes a CNT X-ray tube including an anode electrode, a gate electrode, and a cathode electrode, and configured to generate X-rays from electric field emission; a dummy load including an anode electrode, a gate electrode, and a cathode electrode, and configured not to generate X-rays, the dummy load being connected to the CNT X-ray tube in parallel; a high-voltage part configured to control a voltage applied to the CNT X-ray tube; and a controller configured to control the CNT X-ray tube, the dummy load, and the high-voltage part. Particularly, a portable X-ray generation apparatus reduced in size can be provided, the apparatus including the dummy load having the same structure as a CNT to minimize the voltage variation of the high-voltage part during the ON/OFF operation of the CNT.

Disclosed is a field emission-type tomosynthesis system including a vacuum body having a space therein; a plurality of sources provided inside the body, wherein each of the sources emits a plurality of electrons; and a plurality of anodes disposed inside the body to face the sources and responsible for emitting a plurality of X-rays, wherein each of the anodes faces a corresponding source among the sources, and the electrons collide with each of the anodes to generate X-rays, wherein the X-ray emission angle of each of the anodes is capable of being independently adjusted so as to focus the X-rays emitted toward an object located outside the body. With this configuration, a plurality of X-rays is focused on an object and is emitted to the object to obtain information, and the information is synthesized, thereby improving the reliability of information about the object.

A MBFEX tube (1) for an x-ray device comprises, in a vacuum tube (20), an anode (30) designed as a cooling finger and securely arranged in the vacuum tube, and a plurality of securely arranged cathodes (40, 41, 42), wherein the vacuum tube (20) comprises a plurality of cathode feed lines (50) and no more than two high-voltage bushings (51, 52), in a high-voltage bushing (52) a coolant pipe (31) is passed through by an internal coolant inner pipe (32), the coolant pipe (31) and the coolant inner pipe (32) are provided for cooling the anode (30) with a liquid coolant, the cathodes (40, 41, 42) are provided for field emission of electrons and are arranged on the anode (30) for generating x-ray sources (Q).

A portable x-ray imaging source (100) capable of motion-free x-ray tomosynthesis, wherein said source is suitable for dental and small body-part/small area imaging.

A method, in an embodiment, is for setting an X-ray intensity using a structured anode or a field emitter cathode or a finger-shaped cathode head. Other embodiments include an associated X-ray device, an associated single X-ray tube CT scanner, an associated dual X-ray tube CT scanner, and an associated computer program product.

A method for increasing the MeV hot electron yield and secondary radiation produced by short-pulse laser-target interactions with an appropriately high or low atomic number (Z) target. Secondary radiation, such as MeV x-rays, gamma-rays, protons, ions, neutrons, positrons and electromagnetic radiation in the microwave to sub-mm region, can be used, e.g., for the flash radiography of dense objects.