H01J35/12

X-ray tube with distributed filaments
11404235 · 2022-08-02 ·

An x-ray generating unit includes an x-ray tube that is substantially transparent to x-rays and that defines a vacuum therein. A cathode is disposed within the x-ray tube and defines a plurality of spaced apart cavities. An anode is spaced apart from the cathode and includes a material that emits x-rays when impacted by electrons. A plurality of filaments is each disposed in a different one of the cavities defined by the cathode and each is electrically coupled to the cathode. Each filament emits a focused electron beam directed to a different predetermined spot on the anode upon application of a predetermined voltage between the cathode and the anode, thereby causing the anode to generate x-rays.

Multi-pixel X-ray source with tungsten-diamond transmission target

A multi-pixel x-ray source is provided. The x-ray source includes a plurality of transmission target assemblies. The transmission target assembly includes a tungsten target and a diamond substrate. The substrate includes a first transmission surface and a second transmission surface opposite first transmission surface. The substrate further includes a first side surface and a second side surface disposed between the first and second transmission surfaces. The target covers the first transmission surface of the substrate. The transmission target assembly further includes a base. The base surrounds the first and second side surfaces of substrate, exposing a collimator surface of the second transmission surface and the target. The transmission target assembly is configured to transmit x-ray generated by the target through the target and the substrate.

Ceramic shielding apparatus
11289302 · 2022-03-29 ·

Disclosed is a ceramic shielding apparatus including at least one shield made of a ceramic material and provided inside or outside an X-ray tube to shield radiation; and supports configured to support the shield. According to such a configuration, disadvantages of conventional shielding materials such as lead can be addressed, so that a shield apparatus having excellent shielding properties while being harmless to the human body can be provided.

Ceramic shielding apparatus
11289302 · 2022-03-29 ·

Disclosed is a ceramic shielding apparatus including at least one shield made of a ceramic material and provided inside or outside an X-ray tube to shield radiation; and supports configured to support the shield. According to such a configuration, disadvantages of conventional shielding materials such as lead can be addressed, so that a shield apparatus having excellent shielding properties while being harmless to the human body can be provided.

Combined thermal and voltage transfer system for an x-ray source
11158480 · 2021-10-26 · ·

A thermal control and electrical connection means for an electronic radiation source that provides a cooling and electrical connection to an electronic radiation source in high-temperature environment is provided, including at least a means for physically dislocating a positive high-voltage generator from the anode/target of the x-ray source; a means for conveying coolant fluids to a target anode along a coaxially formed connector; and a means for removing heat from the target anode along a coaxially-formed connector. A method of removing thermal energy from the target of an electronic radiation source is also provided, including at least introducing coolant fluids onto the target; removing coolant fluids from the target; and relocating the coolant fluids to another part of the tool for disposal within the wellbore.

Nanoscale X-ray tomosynthesis for rapid analysis of integrated circuit (IC) dies

System and method for imaging an integrated circuit (IC). The imaging system comprises an x-ray source including a plurality of spatially and temporally addressable electron sources, an x-ray detector arranged such that incident x-rays are oriented normal to an incident surface of the x-ray detector and a three-axis stage arranged between the x-ray source and the x-ray detector, the three-axis stage configured to have mounted thereon an integrated circuit through which x-rays generated by the x-ray source pass during operation of the imaging system. The imaging system further comprises at least one controller configured to move the three-axis stage during operation of the imaging system and selectively activate a subset of the electron sources during movement of the three-axis stage to acquire a set of intensity data by the x-ray detector as the three-axis stage moves along a three-dimensional trajectory.

Nanoscale X-ray tomosynthesis for rapid analysis of integrated circuit (IC) dies

System and method for imaging an integrated circuit (IC). The imaging system comprises an x-ray source including a plurality of spatially and temporally addressable electron sources, an x-ray detector arranged such that incident x-rays are oriented normal to an incident surface of the x-ray detector and a three-axis stage arranged between the x-ray source and the x-ray detector, the three-axis stage configured to have mounted thereon an integrated circuit through which x-rays generated by the x-ray source pass during operation of the imaging system. The imaging system further comprises at least one controller configured to move the three-axis stage during operation of the imaging system and selectively activate a subset of the electron sources during movement of the three-axis stage to acquire a set of intensity data by the x-ray detector as the three-axis stage moves along a three-dimensional trajectory.

X-ray tube assembly

According to one embodiment, an X-ray tube assembly includes a cathode emitting electrons, an anode target generating X-rays when the electrodes emitted from the cathode collide with the anode target, an anode block, a coolant pipe, and a protective film. The anode block includes a tube portion, and a bottom portion closing one end side of the tube portion and joined to the anode target. The coolant pipe is located on an inner side of the tube portion, includes an outlet from which a coolant is discharged toward the bottom portion, and forms a flow passage of the coolant between the coolant pipe and the anode block. The protective film covers an inner surface of the bottom portion and is formed of hard gold containing nickel.

SYSTEM, METHOD, AND APPARATUS FOR X-RAY BACKSCATTER INSPECTION OF PARTS
20210310967 · 2021-10-07 ·

Disclosed herein is an x-ray backscatter apparatus for non-destructive inspection of a part. The apparatus comprises an emission shaping mechanism that is configured to receive an electron emission from a cathode and to adjust a shape of the electron emission from a circular cross-sectional shape into a first elliptical cross-sectional shape. The x-ray source further comprises an anode that is configured to convert the electron emission into an unfiltered x-ray emission having a second elliptical cross-sectional shape. The apparatus also comprises an x-ray filter that comprises an emission aperture having a cross-sectional area smaller than an area of the second elliptical cross-sectional shape of the unfiltered x-ray emission. The x-ray filter is located relative to the unfiltered x-ray emission to allow only a portion of the unfiltered x-ray emission to pass through the emission aperture and form a filtered x-ray emission.

SYSTEM FOR CONSTANT FLOW GENERATION OF X-RAY BEAMS

A system for generating X-ray beams from a liquid target includes a vacuum chamber, a diamond window assembly, an electron source, a target material flow system, and an X-ray detector/imager. An electron beam from the electron source travels through the diamond window assembly and into a dynamic target material of the flow system. Preferably, the dynamic target material is lead bismuth eutectic in a liquid state. Upon colliding with the dynamic target material, X-rays are generated. The generated X-rays exit through an X-ray exit window to be captured by the X-ray detector/imager. Since the dynamic target material is constantly in fluid motion within a pipeline of the flow system, the electron beam always has a new target area which is at a controlled operational temperature and thus, prevents overheating issues. By providing a small focus area for the electron beams, the overall imaging resolution of the X-rays is also improved.