H01J37/075

PARTICLE BEAM GUN CONTROL SYSTEMS AND METHODS
20200330798 · 2020-10-22 ·

Presented systems and methods facilitate efficient and effective monitoring of particle beams. In some embodiments, a radiation gun system comprises: a particle beam gun that generates a particle beam, and a gun control component that controls the gun particle beam generation characteristics, including particle beam fidelity characteristics. The particle beam characteristics can be compatible with FLASH radiation therapy. Resolution control of the particle beam generation can enable dose delivery at an intra-pulse level and micro-bunch level. The micro-bunch can include individual bunches per each 3 GHz RF cycle within the 5 to 15 sec pulse-width. The FLASH radiation therapy dose delivery can have a bunch level resolution of approximately 4.410{circumflex over ()}6cGy/bunch.

Optically addressed, thermionic electron beam device

An electron beam source is provided that includes a vessel forming a chamber, a cathode disposed within the chamber, the cathode comprising a low dimensional electrically conductive material having an anisotropic restricted thermal conductivity, an electrode disposed in the chamber, the electrode being connectable to a power source for applying a positive voltage to the electrode relative to the cathode for accelerating free electrons away from the cathode to form an electron beam when the cathode is illuminated by electromagnetic (EM) radiation such that the cathode thermionically emits free electrons, and an electron emission window in the chamber for passing a generated electron beam out of the chamber. An electron microscope that incorporates the electron beam source is also provided.

Optically addressed, thermionic electron beam device

An electron beam source is provided that includes a vessel forming a chamber, a cathode disposed within the chamber, the cathode comprising a low dimensional electrically conductive material having an anisotropic restricted thermal conductivity, an electrode disposed in the chamber, the electrode being connectable to a power source for applying a positive voltage to the electrode relative to the cathode for accelerating free electrons away from the cathode to form an electron beam when the cathode is illuminated by electromagnetic (EM) radiation such that the cathode thermionically emits free electrons, and an electron emission window in the chamber for passing a generated electron beam out of the chamber. An electron microscope that incorporates the electron beam source is also provided.

Gas injector for reaction regions
20200185198 · 2020-06-11 ·

The invention relates to a gas injector (10) for supplying gas or a gas mixture to a reaction region (16). The gas injector (10) contains a main part (12) with a gas channel (14). Furthermore, a gas feed (30) is provided for the gas channels (14). The gas or the gas mixture reaches the reaction region (16) from the gas channel (14) via a first opening (26) or a first group (54) of openings (26) in the main part. The main part (12) is equipped with a second opening (27) or a second group (56) of openings (27) via which the gas of the gas mixture likewise reaches the reaction region (16) from the gas channel (14). Each of the openings (26, 27) or the groups (54, 56) of openings (26, 27) is paired with a respective separate gas feed (30, 40) in the main part (12) on the gas channel (14).

Gas injector for reaction regions
20200185198 · 2020-06-11 ·

The invention relates to a gas injector (10) for supplying gas or a gas mixture to a reaction region (16). The gas injector (10) contains a main part (12) with a gas channel (14). Furthermore, a gas feed (30) is provided for the gas channels (14). The gas or the gas mixture reaches the reaction region (16) from the gas channel (14) via a first opening (26) or a first group (54) of openings (26) in the main part. The main part (12) is equipped with a second opening (27) or a second group (56) of openings (27) via which the gas of the gas mixture likewise reaches the reaction region (16) from the gas channel (14). Each of the openings (26, 27) or the groups (54, 56) of openings (26, 27) is paired with a respective separate gas feed (30, 40) in the main part (12) on the gas channel (14).

Axial electron gun

The invention relates to the field of fabrication of new materials and coatings and may be used in plants designed for electron-beam heating, melting and evaporating of materials in vacuum or reactive gas atmosphere. The disclosed axial electron gun that comprises, in particular, the primary and secondary cathodes and features the figure-shaped holder used for maintaining a stable position of the secondary cathode relative to the electron-beam axis of the axial gun and the pulsed voltage that is applied between the cathodes for electron bombardment of the secondary cathode. The invention ensures an improved stability of process parameters and operation of the electron gun.

UNIAXIAL COUNTER-PROPAGATING MONOLASER ATOM TRAP

A uniaxial counter-propagating monolaser atom trap cools and traps atoms with a single a laser beam and includes: an atom slower that slows atoms to form slowed atoms; an optical diffractor including: a first diffraction grating that receives primary light and produces first reflected light; a second diffraction grating that receives primary light and produces second reflected light; and a third diffraction grating that receives the primary light and produces third reflected light; and a trapping region that forms trap light from the reflected lights and receives slowed atoms to produce trapped atoms from the slowed atoms that interact with the trap light.

UNIAXIAL COUNTER-PROPAGATING MONOLASER ATOM TRAP

A uniaxial counter-propagating monolaser atom trap cools and traps atoms with a single a laser beam and includes: an atom slower that slows atoms to form slowed atoms; an optical diffractor including: a first diffraction grating that receives primary light and produces first reflected light; a second diffraction grating that receives primary light and produces second reflected light; and a third diffraction grating that receives the primary light and produces third reflected light; and a trapping region that forms trap light from the reflected lights and receives slowed atoms to produce trapped atoms from the slowed atoms that interact with the trap light.

Focusing electrode for cathode arrangement, electron gun, and lithography system comprising such electron gun

The invention relates to a cathode arrangement comprising: a thermionic cathode comprising an emission portion provided with an emission surface for emitting electrons, and a reservoir for holding a material, wherein the material, when heated, releases work function lowering particles that diffuse towards the emission portion and emanate at the emission surface at a first evaporation rate; a focusing electrode comprising a focusing surface for focusing the electrons emitted from the emission surface of the cathode; and an adjustable heat source configured for keeping the focusing surface at a temperature at which accumulation of work function lowering particles on the focusing surface is prevented.

Focusing electrode for cathode arrangement, electron gun, and lithography system comprising such electron gun

The invention relates to a cathode arrangement comprising: a thermionic cathode comprising an emission portion provided with an emission surface for emitting electrons, and a reservoir for holding a material, wherein the material, when heated, releases work function lowering particles that diffuse towards the emission portion and emanate at the emission surface at a first evaporation rate; a focusing electrode comprising a focusing surface for focusing the electrons emitted from the emission surface of the cathode; and an adjustable heat source configured for keeping the focusing surface at a temperature at which accumulation of work function lowering particles on the focusing surface is prevented.