Patent classifications
H
ELECTRICITY
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H01
ELECTRIC ELEMENTS
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H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
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37/00
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
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H01J37/22
Optical; , image processing; or photographic arrangements associated with the tube
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H01J37/226
Optical arrangements for illuminating the object; optical arrangements for collecting light from the object
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H01J37/228
whereby illumination or light collection take place in the same area of the discharge
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