Patent classifications
H
ELECTRICITY
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H01
ELECTRIC ELEMENTS
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H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
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37/00
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
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H01J37/30
Electron-beam or ion-beam tubes for localised treatment of objects
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H01J37/317
for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
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H01J37/3174
Particle-beam lithography, e.g. electron beam lithography
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H01J37/3175
Projection methods, i.e. transfer substantially complete pattern to substrate
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