An ion detection system is disclosed that comprises one or more first devices (11) configured to produce secondary electrons in response to incident ions. The one or more first devices (11) comprise a first ion collection region and a second ion collection region and are configured to produce first secondary electrons in response to one or more ions incident at the first ion collection region and to produce second secondary electrons in response to one or more ions incident at the second ion collection region. The ion detection system also comprises a first output device (14) configured to output a first signal in response to first secondary electrons produced by the one or more first devices (11) and a second output device (15) configured to output a second signal in response to second secondary electrons produced by the one or more first devices (11).

A probe assembly is disclosed comprising an inlet for receiving an eluent from a chromatography device; an outlet for delivering the eluent to an ion source of a mass spectrometer; and an attachment device for attaching the outlet to the mass spectrometer. The outlet comprises an electrically conductive capillary and an electrically conductive member surrounding at least part of the electrically conductive capillary. The electrically conductive member is arranged to receive a voltage upon connection of the attachment device to the mass spectrometer and the electrically conductive member is arranged to provide an electrical connection from the electrically conductive member to the electrically conductive capillary.

A probe assembly is disclosed comprising an inlet for receiving an eluent from a chromatography device; an outlet for delivering the eluent to an ion source of a mass spectrometer; and an attachment device for attaching the outlet to the mass spectrometer. The outlet comprises an electrically conductive capillary and an electrically conductive member surrounding at least part of the electrically conductive capillary. The electrically conductive member is arranged to receive a voltage upon connection of the attachment device to the mass spectrometer and the electrically conductive member is arranged to provide an electrical connection from the electrically conductive member to the electrically conductive capillary.

A microchannel plate is provided with a substrate including a front surface, a rear surface, and a side surface, a plurality of channels penetrating from the front surface to the rear surface of the substrate, a first film provided on at least an inner wall surface of the channel, a second film provided on the first film, and electrode layers provided on the front surface and the rear surface of the substrate. The first film is made of Al.sub.2O.sub.3. The second film is made of SiO.sub.2. The first film is thicker than the second film.

A microchannel plate is provided with a substrate including a front surface, a rear surface, and a side surface, a plurality of channels penetrating from the front surface to the rear surface of the substrate, a first film provided on at least an inner wall surface of the channel, a second film provided on the first film, and electrode layers provided on the front surface and the rear surface of the substrate. The first film is made of Al.sub.2O.sub.3. The second film is made of SiO.sub.2. The first film is thicker than the second film.

A charged particle detector according to the embodiment is provided with an MCP and a PD arranged with a focus electrode interposed therebetween in order to improve a response characteristic as compared to a conventional one in a configuration in which the MCP having a bias angle and the PD are combined. The MCP includes a plurality of through holes each inclined by a bias angle and the PD is eccentrically arranged such that a center of an electron incident surface deviates by a predetermined distance in a bias angle direction S3 with respect to a central axis AX1 of the MCP.

A charged particle detector according to the embodiment is provided with an MCP and a PD arranged with a focus electrode interposed therebetween in order to improve a response characteristic as compared to a conventional one in a configuration in which the MCP having a bias angle and the PD are combined. The MCP includes a plurality of through holes each inclined by a bias angle and the PD is eccentrically arranged such that a center of an electron incident surface deviates by a predetermined distance in a bias angle direction S3 with respect to a central axis AX1 of the MCP.

An electron multiplier production method including a main body portion, and a channel provided in the main body portion to open at one end surface and the other end surface of the main body portion and emits secondary electrons includes a first step of preparing a main body member including the one end surface and the other end surface, a communicating hole for the channel through which the one end surface and the other end surface communicate being provided in the main body member, a second step of forming the channel by forming a deposition layer including at least a resistive layer on an outer surface of the main body member and an inner surface of the communicating hole using an atomic layer deposition method, and a third step of forming the main body portion by removing the deposition layer formed on the outer surface of the main body member.

An electron multiplier production method including a main body portion, and a channel provided in the main body portion to open at one end surface and the other end surface of the main body portion and emits secondary electrons includes a first step of preparing a main body member including the one end surface and the other end surface, a communicating hole for the channel through which the one end surface and the other end surface communicate being provided in the main body member, a second step of forming the channel by forming a deposition layer including at least a resistive layer on an outer surface of the main body member and an inner surface of the communicating hole using an atomic layer deposition method, and a third step of forming the main body portion by removing the deposition layer formed on the outer surface of the main body member.

The present invention relates to the field of special glass materials and preparation, in particular to a glass composition resistant to ion bombardment, a cladding glass of microchannel plate, a microchannel plate and a preparing method thereof. The coordination between the components and the adjustment of the dosage, in particular, oxides with high bond energy containing scandium and/or strontium and/or zirconium and/or molybdenum, can be introduced into the glass material, so as to improve the surface binding energy (SBE), thereby improving the ion bombardment resistance of the glass material and significantly prolonging the working life of the microchannel plate during detecting high-energy ions directly, while meeting other necessary properties such as good anti-crystallization, good acid and alkali resistance, appropriate softening temperature, thermal expansion coefficient, and bulk resistance, etc.