According to one embodiment, a mass spectrometer includes a sample stage provided to hold a sample; an analysis unit disposed to face a sample placement surface of the sample table, and performing mass analysis; an ion beam source provided to irradiate an ion beam toward the sample placement surface; an assist energy source supplying assist energy to a target area between the sample placement surface and the analysis unit; and a laser light source irradiating the target area with laser light.

The disclosure features methods and systems that include directing an ion beam to a region of a sample to liberate charged particles from the region of the sample, where the directed ion beam is pulsed at a first repetition rate, deflecting a first subset of the liberated charged particles from a first path to a second path different from the first path in response to a gate signal synchronized with the repetition rate of the pulsed ion beam, and detecting the first subset of the liberated charged particles in a time-of-flight (TOF) mass spectrometer to determine information about the sample, where the gate signal sets a common reference time for the TOF mass spectrometer for the first subset of charged particles liberated by each pulse of the ion beam.

The invention generally relates to mass spectral analysis. In certain embodiments, methods of the invention involve analyzing a lipid containing sample using a mass spectrometry technique, in which the technique utilizes a liquid phase that does not destroy native tissue morphology during analysis. Due to the use of a liquid phase that does not destroy native tissue morphology during analysis, a subsequent staining technique can be performed on the tissue sample and an overlaid image can be produced of a mass spectral image and a staining image.

The present disclosure discloses a film layer analysis method for an electroluminescent device. The electroluminescent device includes an anode layer, an electroluminescent material layer, and a silver-bearing cathode layer that are sequentially laminated. The film layer analysis method includes stripping the silver-bearing cathode layer from the electroluminescent device by using a first ion sputtering source to obtain an analysis sample with the electroluminescent material layer exposed, and analyzing the exposed electroluminescent material layer by using a second ion sputtering source; wherein sputtering energy of the first ion sputtering source is greater than sputtering energy of the second ion sputtering source.

Methods and devices for mass spectrometry are described, specifically the use of nanoparticulate implantation as a matrix for secondary ion and more generally secondary particles. A photon beam source or a nanoparticulate beam source can be used a desorption source or a primary ion/primary particle source.

A metallic plate holder 3 is directly placed on a flat bottom plate 1a of a sample chamber. A linear guide 21 extending in x-direction is located below the bottom plate. Another linear guide 22 extending in y-direction is fixed to a movable part 21a of the linear guide 21. A magnet 23, fixed to a movable part 22a of the linear guide 22, magnetically attracts the plate holder across the bottom plate. When the magnet is two-dimensionally driven by the linear guides, the plate holder follows it and moves two-dimensionally. The flat bottom plate limits the z-position of the plate holder, thereby reducing the fluctuation in the level of the sample on a sample plate 2 due to the movement. Thus, the variation in the level at different positions on the sample plate is reduced, so that the number of times of a calibrant measurement can be decreased.

The invention generally relates to sample analysis systems and methods of use thereof. In certain aspects, the invention provides a system for analyzing a sample that includes an ion generator configured to generate ions from a sample. The system additionally includes an ion separator configured to separate at or above atmospheric pressure the ions received from the ion generator without use of laminar flowing gas, and a detector that receives and detects the separated ions.

The invention is directed to mass spectrometer comprising an extraction system for secondary ions. The system comprises: an inner spherical deflecting sector; an outer spherical deflecting sector; a deflecting gap formed between the sectors; a housing in which the sectors are arranged. The deflecting sectors are biased at retarding potentials in order to reduce the energy of the ion beam entering the deflecting gap. The system further comprises an exit disc electrode which is biased at the midvoltage of the average voltage of the sectors, and two side plates both facing the spherical sectors, the side plates being biased in order to create an electrostatic field perpendicular to the exit axis.

A method for providing in situ chemical transformation and ionization of a portion (e.g., inorganic oxidizer) of a sample via an analyte detection system is disclosed herein. The method includes introducing a gas into an ionization some of the analyte detection system via an inlet. The method further includes generating ions within the ionization source and directing the gas and generated ions through and out of the ionization source and to the sample. The sample is located proximal to the ionization source in an ambient environment. The ions chemically react with the sample and desorb and ionize an analytic from the sample, the analyte being generated from the inorganic oxidizer, the desorbed analyte having a lower melting point and/or better desorption kinetics than the inorganic oxidizer. The method further includes receiving the desorbed analyte via an analyzer of the analyte detection system.

Systems and approaches for semiconductor metrology and surface analysis using Secondary Ion Mass Spectrometry (SIMS) are disclosed. In an example, a secondary ion mass spectrometry (SIMS) system includes a sample stage. A primary ion beam is directed to the sample stage. An extraction lens is directed at the sample stage. The extraction lens is configured to provide a low extraction field for secondary ions emitted from a sample on the sample stage. A magnetic sector spectrograph is coupled to the extraction lens along an optical path of the SIMS system. The magnetic sector spectrograph includes an electrostatic analyzer (ESA) coupled to a magnetic sector analyzer (MSA).