The invention generally relates to sample analysis systems and methods of use thereof. In certain aspects, the invention provides a system for analyzing a sample that includes an ion generator configured to generate ions from a sample. The system additionally includes an ion separator configured to separate at or above atmospheric pressure the ions received from the ion generator without use of laminar flowing gas, and a detector that receives and detects the separated ions.

A metallic plate holder 3 is directly placed on a flat bottom plate 1a of a sample chamber. A linear guide 21 extending in x-direction is located below the bottom plate. Another linear guide 22 extending in y-direction is fixed to a movable part 21a of the linear guide 21. A magnet 23, fixed to a movable part 22a of the linear guide 22, magnetically attracts the plate holder across the bottom plate. When the magnet is two-dimensionally driven by the linear guides, the plate holder follows it and moves two-dimensionally. The flat bottom plate limits the z-position of the plate holder, thereby reducing the fluctuation in the level of the sample on a sample plate 2 due to the movement. Thus, the variation in the level at different positions on the sample plate is reduced, so that the number of times of a calibrant measurement can be decreased.

A primary ion source subassembly for use with a secondary ion mass spectrometer may include a unitary graphite ionizer tube and reservoir base. A primary ion source may include a capillary insert defining an ionizer aperture. An ionizer aperture may be centrally arranged in an outwardly protruding conical or frustoconical surface, and may be overlaid with a refractory metal coating or sheath. Parameters including ionizer surface shape, ionizer materials, ionizer temperature, and beam stop plate orifice geometry may be manipulated to eliminate ghost images. A graphite tube gasket with a dual tapered surface, or an externally threaded graphite tubular connecting body, may promote sealing of a source material cavity.

A method of analysing a sample is disclosed that comprises activating an electronic cigarette (e-cigarette) or other vaporising or atomising device such that the electronic cigarette or other device emits aerosol, smoke, vapour and/or droplets, mass analysing the aerosol, smoke, vapour and/or droplets, and characterising the aerosol, smoke, vapour and/or droplets based on the mass analysis.

An ambient ionisation source unit (10) is provided comprising: a housing (12) containing a first device (14) for generating analyte material from a surface of a sample to be analysed and a sampling inlet (16) for receiving analyte material liberated from the surface of the sample. The position(s) of the first device and/or sampling inlet is (are) fixed relative to the housing. Thus, the first device and the sampling inlet are integrated into a single unit that can be installed onto the front-end of an ion analysis instrument with minimal or reduced user interaction.

Systems and approaches for semiconductor metrology and surface analysis using Secondary Ion Mass Spectrometry (SIMS) are disclosed. In an example, a secondary ion mass spectrometry (SIMS) system includes a sample stage. A primary ion beam is directed to the sample stage. An extraction lens is directed at the sample stage. The extraction lens is configured to provide a low extraction field for secondary ions emitted from a sample on the sample stage. A magnetic sector spectrograph is coupled to the extraction lens along an optical path of the SIMS system. The magnetic sector spectrograph includes an electrostatic analyzer (ESA) coupled to a magnetic sector analyzer (MSA).

A low temperature plasma probe, a mass spectrometry system, and a method for using a low temperature plasma probe are described. In an embodiment, a low temperature plasma probe includes an intake capillary that provides an ion flow from a sample surface to a mass spectrometer; at least one low temperature plasma tube that provides low temperature plasma gas; at least one heated gas tube that provides heated gas to the sample surface, where the heated gas enhances desorption and ionization of a sample on the sample surface.

A method for providing in situ chemical transformation and ionization of a portion (e.g., inorganic oxidizer) of a sample via an analyte detection system is disclosed herein. The method includes introducing a gas into an ionization source of the analyte detection system via an inlet. The method further includes generating ions within the ionization source and directing the gas and generated ions through and out of the ionization source and to the sample. The sample is located proximal to the ionization source in an ambient environment. The ions chemically react with the sample and desorb and ionize an analyte from the sample, the analyte being generated from the inorganic oxidizer, the desorbed analyte having a lower melting point and/or better desorption kinetics than the inorganic oxidizer. The method further includes receiving the desorbed analyte via an analyzer of the analyte detection system.

The invention is directed to mass spectrometer comprising an extraction system for secondary ions. The system comprises: an inner spherical deflecting sector; an outer spherical deflecting sector; a deflecting gap formed between the sectors; a housing in which the sectors are arranged. The deflecting sectors (42; 44) are biased at retarding gap (46). The system further comprises an exit disc electrode with an exit through hole centered about the exit axis, the intermediate electrode being biased at an intermediate voltage between the voltage of the housing and the average voltage of the sectors. The trajectories of the secondary ions become more parallel to the exit axis and become closer to the axis.

The invention is directed to mass spectrometer comprising an extraction system for secondary ions. The system comprises: an inner spherical deflecting sector; an outer spherical deflecting sector; a deflecting gap formed between the sectors; a housing in which the sectors are arranged. The deflecting sectors are biased at retarding potentials in order to reduce the energy of the ion beam entering the deflecting gap. The system further comprises an exit disc electrode which is biased at the midvoltage of the average voltage of the sectors, and two side plates both facing the spherical sectors, the side plates being biased in order to create an electrostatic field perpendicular to the exit axis.