The present invention relates to a particle beam mass spectrometer and particle measurement method by means of same. More particularly, the present invention relates to a particle beam mass spectrometer including: a particle focusing unit focusing a particle beam induced by gas flow; an electron gun forming a charged particle beam by accelerating thermal electrons to ionize the particle beam focused by the particle focusing unit; a deflector deflecting the charged particle beam according to kinetic energy to charge ratio; and a sensing unit measuring a current induced by the deflected charged particle beam, wherein the deflector includes at least one particle beam separation electrode provided at each of opposite sides with respect to a progress axis of the charged particle beam before being deflected.

An example system includes an electron ionization ion source and a mass analyzer. The electron ion source is configured, during operation of the system, to create from sample molecules a beam of ions extending along an ion beam axis. The system also includes a collision cooling chamber comprising a gas manifold and an electric field generator. The cooling chamber defines an entrance aperture and an exit aperture on respective opposing ends of the cooling chamber, the entrance aperture of the cooling chamber being in axial alignment with the ion beam axis. The cooling chamber is configured, during operation of the system, to generate a radio frequency (RF) field within the cooling chamber using the electric field generator, and receive collision gas through the gas manifold to pressurize the cooling chamber.

A mass spectrometer system includes an ion source and a controller. The ion source includes a body having a length along a source axis from the first end to the second end; an electron source positioned at the first end and configured for accelerating an electron beam through the ionization chamber along the source axis. The controller is configured to operate the ion source in a high robustness mode by setting a second lens voltage and a filament voltage to minimize electron reflection back along the source axis towards the electron source; and operate the ion source in a high sensitivity mode by setting second lens voltage and a filament voltage to cause electron reflection back along the source axis towards the electron source.

A method of operating a mass spectrometer comprising: detecting a first ion species using a first gain setting of a detector or a first emission current for a first mass-to-charge range; detecting a second ion species using a second gain setting of the detector or a second emission current for a second mass-to-charge range; and using the detected first and second ion species to calibrate the mass range of a mass analyzer of the mass spectrometer, to tune the resolution of the mass analyzer, or to tune an ion optic of the mass spectrometer.

Mass spectrometry is performed utilizing an electron ionization (EI) source. The EI source ionizes a sample at different electron energies, including below and above 70 eV. The EI source may be utilized for soft ionization as well as hard ionization. The value of the electron energy may be selected so as to favor the formation of molecular ions or other ions of high analytical value. The ion source may be an axial ion source.

A wide-range ion source for a mass spectrometer comprises a first portion and a second portion that is positioned downstream of the first portion. The first portion includes an anode and a first filament that is positioned proximate the anode and secured in place relative to the anode. The first filament is exposed to a pressure of a process chamber. A first electron repeller has at least a partially circular shape. The second portion includes a tubular anode, a second filament surrounding the tubular anode, an extraction lens defining an opening and a focus lens to conduct ions into a volume.

Disclosed herein are specimen imaging systems, comprising: a sample stage in a vacuum environment, the sample stage configured to support a specimen; an electron beam generator configured to focus an electron beam on a first predetermined location on the specimen; a nanospray dispenser configured to dispense a nanospray onto a second predetermined location on the specimen; a mass spectrometer; and an extraction conduit configured to extract a plume of charged particles generated as a result of contact between the nanospray and the specimen and deliver the charged particles to the mass spectrometer. The system can create a topological and chemical map of the specimen by analyzing at least a portion of the specimen with a mass spectrometer to determine a chemical composition of the specimen at the second predetermined location and analyzing at least a portion of the specimen with the electron beam to determine a surface topology.

Provided herein is an ion source containing a plurality of components, at least one of which is partially coated with a layer of silicon. The ion source reduces reactivity between the sample and the carrier gas, reduces or eliminates tailing in ion chromatograms, and/or improves mass spectral fidelity. Also provided are methods of using the ion source in a mass spectrometer or gas chromatograph-mass spectrometer.

The present invention relates to an electron bean injection control of a mass spectrometer. A mass spectrometer of the present invention includes: a reference waveform generator configured to generate a reference waveform signal having one type of a square wave and a sine wave, a waveform generator configured to generate a sync signal synchronized with the reference waveform signal; an RF module configured to generate an RF voltage signal from the reference waveform signal and apply the RF voltage signal to an RF electrode in the ion trap, an electron beam generator configured to control an operation of an ultraviolet (UV) diode for generating an electron beam injected into the ion trap according to an input control signal, and a control circuit configured to generate the control signal by using the square wave signal.

An analyzer includes: an ionizer unit that ionizes molecules to be analyzed; a filter unit that selectively passes ions generated by the ionizer unit; and a detection unit that detects ions that have passed the filter unit. The detection unit includes a plurality of detection elements disposed in a matrix, and the analyzer further includes a first reconfiguration unit that switches between detection patterns including detection elements to be enabled for detection out of the plurality of detection elements. The ionizer unit includes a plurality of ion sources, and the analyzer further includes a driving control unit that switches the connections of the plurality of ion sources based on changes in characteristics of the ion sources.