A method of analyzing ions is disclosed comprising: (i) separating ions according to a physico-chemical property in a separator; (ii) transmitting ions which emerge from the separator through a transfer device with a first transit time t1, energizing a pusher electrode or orthogonal acceleration electrode and obtaining first data; (iii) transmitting ions which subsequently emerge from the separator through the transfer device with a second greater transit time t2, energizing the pusher electrode or orthogonal acceleration electrode and obtaining second data; and (iv) repeating steps (ii) and (iii) one or more times. The pusher electrode or orthogonal acceleration electrode is energized with a period t3, wherein t2-t1 is arranged to equal t3/2. The first and second data are combined to form a composite data set.

A method of targeted mass spectrometric analysis is provided for analyzing trace compounds at sub-ppb level compared to sample matrix. Sample is chromatographically separated at standard conditions to employ a map of target mass (M) versus retention time (RT). Small mass ions under M(RT) are rejected by RF field, and remaining ions are accumulated for pulsed injection into a multi-reflecting TOF MS, either directly from EI source, or from linear RF trap or via a heated RF only quadrupole with axial ion trapping. In combination with EI source the method provides sub femtogram sensitivity at matrices loads in microgram range.

An ion detector system for a mass spectrometer is disclosed comprising a first device arranged and adapted to receive ions and emit or output first electrons and a microwave cavity resonator arranged and adapted to deflect the first electrons onto a first detector.

This disclosure is directed to a residual gas analyser, in particularly, a residual gas analyser for analysing a residual gas in a microlithography projection exposure apparatus. The residual gas analyser includes a mass spectrometer and an admission device for admitting constituents of the residual gas from a vacuum environment into the mass spectrometer. The admission device includes a switchable ion source. The ion source in a first switching state allows ionized constituents of the residual gas to pass through. The ion source in a second switching state ionizes neutral constituents of the residual gas. The disclosed techniques also relate to a projection exposure apparatus including such a residual gas analyser and to a method of residual gas analysis.

In a mass spectrometer, a linear ion trap unit (2) has an ion-capturing space formed by rod electrodes (20) surrounding a central axis (C) and an auxiliary electrode (21) provided outside an ion-ejection end of the rod electrodes or protruding from the ion-ejection end. An extracting electrode (23) is located further outside the auxiliary electrode. An RF voltage generator (50) applies RF voltages to the rod electrodes and the auxiliary electrode to create an RF electric field within the ion-capturing space. An extracting voltage generator (52) applies a DC voltage to the extracting electrode so that a DC electric field for ion extraction reaches the ion-capturing space. A controller (4) controls the RF and extracting voltage generators to eject ions from the ion-capturing space along the central axis according to their m/z by changing the RF voltage or the DC voltage when the ions are confined within the ion-capturing space.

A method of mass spectrometry comprising: a) providing a mass spectrometer having a time of flight (TOP) mass analyser: b) performing a survey scan comprising separating a packet of precursor ion species and mass analysing ions so as to obtain first mass spectral data: c) determining a time window over which one of the precursor ion species. or fragment or product ions derived therefrom, were mass analysed: d) separating another packet of precursor ion species and mass analysing ions so as to obtain second mass spectral data. wherein the pusher of the TOP mass analyser is pulsed according to a plurality of consecutive pulse sequences during a plurality of respective pulse sequence time periods. wherein each pulse sequence consists of consecutive pushes that are arranged such that the duration between any pair of pushes in the pulse sequence is different to the duration between any other pair of pushes within the pulse sequence: f) selecting mass spectral data, from the second mass spectral data, that was obtained during a time period corresponding to said time window of the survey scan, so as to obtain selected data; g) repeating steps d) to f) at least one further time such that multiple sets of said selected data are obtained; combining said multiple sets of selected data and decoding the combined data to obtain mass spectral data representative of the mass to charge ratios of the ions detected by the TOP mass analyser.

Provided is a TOFMS having a measurement unit in which target ions are accelerated and sent into a flight space within which an electric field for causing ions to fly is created. A data-analysis processor (33) creates a spectrum based on data acquired by the measurement unit, where the spectrum shows a relationship between ion intensity and time-of-flight or m/z value. An index calculator (34) calculates, as an index concerning a peak in the spectrum, a time-of-flight or m/z-value difference between a midpoint of a first peak width at an intensity which equals the peak-top intensity multiplied by a first ratio and a midpoint of a second peak width at an intensity which equals the peak-top intensity multiplied by a second ratio smaller than the first ratio. An evaluation result storage section (35) evaluates the peak symmetry from the index and stores an evaluation result.

The signal processing device applies signal-processing to one or more analysis data that are obtained through an analysis apparatus to generate a spectrum. The signal processing device comprises a memory that stores the one or more analysis data and a processor that applies signal-processing to the one or more analysis data. Each analysis data includes a plurality of data points. For each data point, the signal processing device calculates a first moving average of a first number of data points, calculates a second moving average of a second number of data points, the second number being larger than the first number, calculates a difference between the second and first moving averages, and determines the data point to be a signal if the difference is larger than a threshold value. The signal processing device generates for each analysis data a first spectrum including the data point determined to be the signal.

An orthogonal acceleration time-of-flight mass spectrometer includes: a first vacuum chamber and a second vacuum chamber; an insulating spacer member; a former-stage-side ring electrode; subsequent-stage-side ring electrodes; a first fixation member including a first displacement member to displace a central axis of the former-stage-side ring electrode and the subsequent-stage-side ring electrodes in a predetermined direction orthogonal to the central axis by thermal expansion; and a second fixation member including a second displacement member to displace the central axis in the predetermined direction orthogonal to the central axis by thermal expansion, a difference between a thermal expansion amount of the first displacement member per unit temperature and a thermal expansion amount of the second displacement member per unit temperature being 30% or less of the thermal expansion amount of the first displacement member.

The invention relates to methods and devices for analysing sample material on a sample carrier, comprising an operating mode as follows: providing a time-of-flight mass analyser with an ion generating unit having a mount for the sample carrier, an ion receiver, a flight route between them determining the longest time-of-flight, an ion selector along the route, and a clock generator for repeatedly triggering an ion generating pulse at the sample carrier and a subsequent pulse for accelerating ion species onto the flight route; defining one or more ranges of mass-to-charge ratios (m/z), each with an upper limit corresponding to a time-of-flight shorter than the longest time-of-flight; selecting a cycling of ion generating pulses such that the duration between successive pulses is shorter than the longest time-of-flight but longer than the acceleration time; and analysing the sample material using the mass analyser, the selected pulse cycling, and the ion selector.