Provided is a mass spectrometry device capable of, when an abnormality in a voltage applied to an electrode is detected, easily isolating the location of the cause. This mass spectrometry device comprises a quadrupole electrode and a power supply circuit (200) for generating a radio frequency voltage to be applied to the quadrupole electrode, wherein the power supply circuit (200) is provided with an analog multiplier (205) and applies the radio frequency voltage generated by the power supply circuit to the quadrupole electrode in a state where the amplitude of an output signal from the analog multiplier (205) is controlled in an RF tuning mode so as to reach a target amplitude of the radio frequency voltage by feeding back the amplitude of the output signal from the analog multiplier (205).

Systems and methods are described for generating organic solvent scan solutions and calibration standards inline for semiconductor wafer analysis. A method embodiment includes, but is not limited to, drawing, via a pump system, a first organic solvent from a first organic chemical source; drawing, via the pump system, a second organic solvent from a second organic chemical source; mixing, inline, the first organic solvent and the second organic solvent to form an organic scan solution; and introducing the organic scan solution to a scan nozzle for introduction to one or more surfaces of a semiconducting wafer to remove one or more organic contaminants from the semiconducting wafer.

Systems and methods are described for collecting and combining multiple scan samples from a surface of a semiconducting wafer. A system embodiment includes, but is not limited to, a scan nozzle configured to introduce a first scan solution to a surface of a semiconducting wafer to remove impurities from the surface to provide a first scan sample and retrieve the first scan sample, the scan nozzle further configured to introduce a second scan solution to the surface of the semiconducting wafer to remove residual impurities from the surface to provide a second scan sample and retrieve the second scan sample; and a collection vessel in fluid communication with the scan nozzle, the collection vessel configured to receive each of the first scan sample and the second scan sample from the nozzle and to mix the first scan sample with the second scan sample to provide a combined scan sample.

Systems and methods are described for systems and methods for integrated decomposition and scanning of a semiconducting wafer for organic and inorganic impurities. In an aspect, a method includes, but is not limited to, positioning a nozzle above a surface of a semiconducting wafer, the semiconducting wafer supported adjacent to or within an interior of a chamber body; introducing a first scan fluid including one or more organic fluids to an inlet port of the nozzle; directing a portion of the first scan fluid onto the surface of the semiconducting wafer to permit interaction between the scan fluid and one or more organic contaminants present on the surface of the semiconducting wafer; and removing the first scan fluid containing at least a portion of the one or more organic contaminants from the surface of the semiconducting wafer via the nozzle.

Methods and apparatus for operating a mass spectrometer are described. In various aspects, ions of a mass range of interest may be mass-selectively ejected from an accumulation ion trap into a multi-ion trap structure. Each ion trap of the multi-ion trap structure may be configured to confine ions within a portion of the mass range of interest. The ions may be simultaneously scanned from the ion traps of the multi-ion trap structure for concurrent detection at a detector component.

The invention generally relates to methods and devices for synchronization of ion generation with cycling of a discontinuous atmospheric interface. In certain embodiments, the invention provides a system for analyzing a sample that includes a mass spectrometry probe that generates sample ions, a discontinuous atmospheric interface, and a mass analyzer, in which the system is configured such that ion formation is synchronized with cycling of the discontinuous atmospheric interface.

A molecular cryptographic sampling device is disclosed including at least one unique identifying indicia disposed on the molecular cryptographic sampling device, a substrate including at least one depression disposed in or protrusion disposed on a surface of the substrate, at least one polymeric sorbent coating disposed on the at least one depression or protrusion, and at least one molecular encrypted code disposed on the at least one polymeric sorbent coating. The at least one molecular encrypted code includes at least one molecular tag, wherein the at least one molecular encrypted code is uniquely associated with the at least one unique identifying indicia in a database or by a predetermined algorithm.

The present disclosure relates to a module of a trap for charged particles (e.g., ions), to manufacturing such module, to a trap including the module and a manufacturing of such modular trap. The module includes a monolithic body made of a non-conductive substrate and an electrode arranged on a portion of a surface of the monolithic body. A part of the monolithic body forms a spring element. An electrically conductive area is arranged on and covers a portion of a surface of the spring element and is conductively connected with the electrode. The spring element is adapted to compress upon pressure applied on the electrically conductive area.

In one aspect, a method of performing Fourier Transform (FT) mass spectrometry is disclosed, which comprises passing a plurality of ions through an FT mass analyzer comprising a plurality of rods arranged in a multipole configuration, where the plurality of rods include an input port for receiving ions and an output port through which ions can exit the mass analyzer. The method can further include applying at least one RF voltage to at least one of the rods so as to generate an RF field for radial confinement of the ions as they pass through the mass analyzer, and applying a resonant burst of an AC signal to at least one of said rods so as to remove ions having selected m/z ratios, e.g., m/z ratios within a desired range, from the ions introduced into the FT mass analyzer.

A vacuum system is described. The vacuum system includes a vacuum cell and an ion trap. The vacuum cell includes walls having an inner surface that form at least a portion of a vacuum chamber. At least a portion of the inner surface has a topography including structures therein. The structures include a getter material. The ion trap is within the vacuum chamber.