A starting aid for discharge lamp arc tubes is characterized by an arc tube having a tubular body wall that longitudinally extends between first and second ends and surrounding an internal arc cavity with first and second electrodes that have conductive feedthroughs to electrically connect to corresponding first and second external arctube leads; an antenna conductor extending longitudinally on an outside surface of the arc tube wall between first and second antenna ends that are located radially outward of corresponding first and second electrodes; and an antenna coupling member comprising a conductive coupling connector that is electrically connected to the first arctube lead, and extends to a coupling end located on the body wall near to the first antenna end and separated from it by a coupling gap of predetermined, non-zero gap dimension.

A starting aid for discharge lamp arc tubes is characterized by an arc tube having a tubular body wall that longitudinally extends between first and second ends and surrounding an internal arc cavity with first and second electrodes that have conductive feedthroughs to electrically connect to corresponding first and second external arctube leads; an antenna conductor extending longitudinally on an outside surface of the arc tube wall between first and second antenna ends that are located radially outward of corresponding first and second electrodes; and an antenna coupling member comprising a conductive coupling connector that is electrically connected to the first arctube lead, and extends to a coupling end located on the body wall near to the first antenna end and separated from it by a coupling gap of predetermined, non-zero gap dimension.

A starting aid for discharge lamp arc tubes is characterized by an arc tube having a tubular body wall that longitudinally extends between first and second ends and surrounding an internal arc cavity with first and second electrodes that have conductive feedthroughs to electrically connect to corresponding first and second external arctube leads; an antenna conductor extending longitudinally on an outside surface of the arc tube wall between first and second antenna ends that are located radially outward of corresponding first and second electrodes; and an antenna coupling member comprising a conductive coupling connector that is electrically connected to the first arctube lead, and extends to a coupling end located on the body wall near to the first antenna end and separated from it by a coupling gap of predetermined, non-zero gap dimension.

A sulfur plasma lamp has a lamp envelope of transparent or translucent glass or ceramic material. At least two silicon carbide electrodes are hermetically sealed with the lamp envelope and in contact with an interior of the lamp envelope. A quantity of sulfur within the interior of the lamp envelope is sufficient to create a sulfur plasma upon excitation. A buffer gas within the interior of the lamp envelope enables initial discharge and heating of the interior of the lamp envelope to excite the sulfur into a plasma state. More than two electrodes may be provided, and an electrical potential is created between different pairs of the electrodes at different times, thereby inducing stirring of the plasma upon excitation of the material into a plasma state.

A DC gas discharge lamp includes an anode and a cathode having a first cathode segment, which forms the surface of the cathode at least in a region of the cathode which faces the anode and has an arc attachment region, within which an arc burning between the cathode and the anode attaches during lamp operation as intended. The first cathode segment consists of tungsten with at least one emitter material for reducing the work function of electrons from the cathode. The cathode is embodied in a manner free of thorium. The at least one emitter material has a melting point of less than 3200 K. At least one part of the surface of the cathode outside the arc attachment region is formed by a diffusion barrier for the at least one emitter material.

Apparatus, systems, and methods for processing workpieces are provided. An arc lamp can include a tube. The arc lamp can include one or more inlets configured to receive water to be circulated through the arc lamp during operation as a water wall, the water wall configured to cool the arc lamp. The arc lamp can include a plurality of electrodes configured to generate a plasma in a forming gas introduced into the arc lamp via the one or more inlets. The forming gas can be or can include a mixture of a hydrogen gas and an inert gas, the hydrogen gas in the mixture having a concentration less than 4% by volume. The hydrogen gas can be introduced into the arc lamp prior to generating the plasma. The arc lamp may be used for processing workpieces.

Systems and methods for reducing contamination of one or more arc lamps are provided. One example implementation is directed to a millisecond anneal system. The millisecond anneal system includes a processing chamber for thermally treating a substrate using a millisecond anneal process. The system further includes one or more arc lamps. Each of the one or more arc lamps is coupled to a water loop for circulating water through the arc lamp during operation of the arc lamp. The system includes a reagent injection source configured to introduce a reagent, such as nitrogen gas, into water circulating through the arc lamp during operation of the arc lamp.

In a light source device, a control unit causes an energy density of a laser light in a lighting start region RS when a laser support light is maintained to be lower than an energy density of the laser light in the lighting start region RS when the laser support light is put on. For this reason, when the laser support light is maintained, a laser light L is radiated to the lighting start region RS at an energy density of a degree where sputtering does not occur. Therefore, in the light source device, because sputtering in a light emission sealing body can be suppressed, a sufficiently long life can be realized.

A sealed high intensity illumination device configured to receive a laser beam from a laser light source and method for making the same are disclosed. The device includes a sealed cylindrical chamber configured to contain an ionizable medium. The chamber has a cylindrical wall, with an ingress and an egress window disposed opposite the ingress window. A tube insert is disposed within the chamber formed of an insulating material. The insert is configured to receive the laser beam within the insert inner diameter.

A sealed high intensity illumination device configured to receive a laser beam from a laser light source and method for making the same are disclosed. The device includes a sealed cylindrical chamber configured to contain an ionizable medium. The chamber has a cylindrical wall, with an ingress and an egress window disposed opposite the ingress window. A tube insert is disposed within the chamber formed of an insulating material. The insert is configured to receive the laser beam within the insert inner diameter.