The present disclosure relates to photo-emitting plasma for gas activation in processing chambers, and related apparatus and methods. In one or more embodiments, a processing chamber applicable for semiconductor manufacturing includes one or more sidewalls, a window at least partially defining an internal volume, and a substrate support disposed in the internal volume. The processing chamber includes one or more heat sources operable to heat the internal volume, and a plate disposed in the internal volume and between the window and the substrate support. The plate at least partially separates the internal volume into a first volume between the plate and the substrate support, and a second volume between the plate and the window. The processing chamber includes an energy source operable to supply a plasma between the plate and the window.

A plasma lamp is provided that employs excitation transfer between two atomic or molecular species so as to preferentially produce light at a specific atomic or molecular emission wavelength. The lamp includes a lamp body. The lamp body includes a top portion, a middle portion having an internal hollow space filled with an energy-donor chemical gas and an energy-acceptor chemical element, and a bottom portion. The lamp body further includes an array of a plurality of cavities connected to the internal hollow space. The internal hollow space and the array of the plurality of cavities are spaced apart from outer surfaces of the lamp body. The plasma lamp is configured to excite the energy-donor chemical gas by an ignition of a low-temperature plasma within the internal hollow space and the array of the plurality of cavities to cause an excitation transfer from the excited energy-donor chemical gas to the energy-acceptor chemical element, thereby emitting radiation having a wavelength of about 194 nm when mercury (Hg) is the energy-acceptor chemical element and helium (He) serves as the donor. Other wavelengths in the ultraviolet (UV) and vacuum ultraviolet (VUV) spectral regions are generated when other donor and acceptor atoms or molecules are employed. These lamps are well-suited as optical drivers for atomic clocks (such as the 40.5 GHz Hg ion clock), photochemical processing of materials, disinfection of water, air, and surfaces, as well as other applications requiring UV or VUV light.

A plasma lamp is provided that employs excitation transfer between two atomic or molecular species so as to preferentially produce light at a specific atomic or molecular emission wavelength. The lamp includes a lamp body. The lamp body includes a top portion, a middle portion having an internal hollow space filled with an energy-donor chemical gas and an energy-acceptor chemical element, and a bottom portion. The lamp body further includes an array of a plurality of cavities connected to the internal hollow space. The internal hollow space and the array of the plurality of cavities are spaced apart from outer surfaces of the lamp body. The plasma lamp is configured to excite the energy-donor chemical gas by an ignition of a low-temperature plasma within the internal hollow space and the array of the plurality of cavities to cause an excitation transfer from the excited energy-donor chemical gas to the energy-acceptor chemical element, thereby emitting radiation having a wavelength of about 194 nm when mercury (Hg) is the energy-acceptor chemical element and helium (He) serves as the donor. Other wavelengths in the ultraviolet (UV) and vacuum ultraviolet (VUV) spectral regions are generated when other donor and acceptor atoms or molecules are employed. These lamps are well-suited as optical drivers for atomic clocks (such as the 40.5 GHz Hg ion clock), photochemical processing of materials, disinfection of water, air, and surfaces, as well as other applications requiring UV or VUV light.

A discharge lamp includes: a pair of electrodes disposed so as to face each other in a single axis direction; a bulb that includes an arc tube and two side tubes connected to both respective ends in the single axis direction of the arc tube, the arc tube having the pair of the electrodes inside; two lead rods supporting the pair of the electrodes respectively; a support member that has no conductivity and that is inside at least one of the two side tubes to support the corresponding lead rod; a conductive member being inside the side tube that has the support member inside, the conductive member being in contact with the corresponding lead rod; and a trigger member being outside the bulb and being disposed around an outer periphery of the conductive member.