H01J2237/2004

Depth reconstruction for 3D images of samples in a charged particle system

Methods and systems for generating high resolution reconstructions of 3D samples imaged using slice and view processes where the electron interaction depth of the imaging beam is greater than slice thicknesses. Data obtained via such slice and view processes is enhanced with a depth blur reducing algorithm, that is configured to reduce depth blur caused by portions of the first data and second data that are resultant from electron interactions outside the first layer and second layer, respectively, to create enhanced first data and second enhanced data. A high-resolution 3D reconstruction of the sample is then generated using the enhanced first data and the enhanced second data. In some embodiments, the depth blur reducing algorithm may be selected from a set of such algorithms that have been individually configured for certain microscope conditions, sample conditions, or a combination thereof.

Apparatus and method for nanoscale X-ray imaging

System and method for nanoscale X-ray imaging. The imaging system comprises an electron source configured to generate an electron beam along a first direction; an X-ray source comprising a thin film anode configured to receive the electron beam at an electron beam spot on the thin film anode, and to emit an X-ray beam substantially along the first direction from a portion of the thin film anode proximate the electron beam spot, such that the X-ray beam passes through the sample specimen. The imaging apparatus further comprises an X-ray detector configured to receive the X-ray beam that passes through the sample specimen. Some embodiments are directed to an electron source that is an electron column of a scanning electron microscope (SEM) and is configured to focus the electron beam at the electron beam spot.

DEPTH RECONSTRUCTION FOR 3D IMAGES OF SAMPLES IN A CHARGED PARTICLE SYSTEM

Methods and systems for generating high resolution reconstructions of 3D samples imaged using slice and view processes where the electron interaction depth of the imaging beam is greater than slice thicknesses. Data obtained via such slice and view processes is enhanced with a depth blur reducing algorithm, that is configured to reduce depth blur caused by portions of the first data and second data that are resultant from electron interactions outside the first layer and second layer, respectively, to create enhanced first data and second enhanced data. A high-resolution 3D reconstruction of the sample is then generated using the enhanced first data and the enhanced second data. In some embodiments, the depth blur reducing algorithm may be selected from a set of such algorithms that have been individually configured for certain microscope conditions, sample conditions, or a combination thereof.

AUTONOMOUS MICROFLUIDIC DEVICE FOR SAMPLE PREPARATION

The microfluidic device has a first reservoir that preferably includes a first liquid. The first liquid is being held by a capillary stop valve in the first reservoir. A second reservoir is in fluid communication with the first reservoir. The second reservoir has a second liquid and a sample support disposed therein. The second reservoir has an inlet opening defined therein. A draining unit is adjacent to the second reservoir. The draining unit is in fluid communication with the second reservoir. The draining unit has a first absorption member disposed therein.

Charged Particle Beam System
20210313142 · 2021-10-07 ·

There is provided a charged particle beam system capable of determining the type of each cartridge precisely. An electron microscope that embodies the charged particle beam system includes a discriminator for determining the type of each cartridge based on the range or distance measured by a laser range finder. Plural cartridges are received in a magazine. The laser range finder measures the range to a selected one of the plural cartridges which is placed in a measurement position. A first cartridge of a first type included in the plural cartridges has a first measurement surface at a first distance to the laser range finder when placed in the measurement position. A second cartridge of a second type has a second measurement surface at a second range to the laser range finder when placed in the measurement position.

ELECTROCHEMICAL MEASUREMENT OF ELECTRON BEAM-INDUCED PH CHANGE DURING LIQUID CELL ELECTRON MICROSCOPY
20210249219 · 2021-08-12 ·

A microfluidic cell system to measure proton concentration in a fluid sample. The microfluidic cell system includes: a first microchip and a second microchip dimensioned to permit electron beam scanning of a fluid sample; a first membrane attached to the first microchip; a second membrane attached to the second microchip, the first membrane and the second membrane being disposed adjacent to one another with a space for the fluid sample therebetween, and the first membrane and the second membrane including a region of the fluid sample in which an electron beam is scanned; a first electrode patterned onto the first membrane and positioned a first distance from the region; a second electrode patterned onto the first microchip and positioned a second distance from the region, the first distance being less than the second distance; and a potentiostat in communication with the first electrode and the second electrode.

APPARATUS AND METHOD FOR NANOSCALE X-RAY IMAGING

System and method for nanoscale X-ray imaging. The imaging system comprises an electron source configured to generate an electron beam along a first direction; an X-ray source comprising a thin film anode configured to receive the electron beam at an electron beam spot on the thin film anode, and to emit an X-ray beam substantially along the first direction from a portion of the thin film anode proximate the electron beam spot, such that the X-ray beam passes through the sample specimen. The imaging apparatus further comprises an X-ray detector configured to receive the X-ray beam that passes through the sample specimen. Some embodiments are directed to an electron source that is an electron column of a scanning electron microscope (SEM) and is configured to focus the electron beam at the electron beam spot.

METHOD FOR LARGE-AREA 3D ANALYSIS OF SAMPLES USING GLANCING INCIDENCE FIB MILLING

Methods and apparatuses disclosed herein for large-area 3D analysis of samples using glancing incidence FIB milling. An example method at least includes milling, with a focused ion beam, a sample at a shallow angle and at a plurality of rotational orientations to remove a layer of the sample and to expose a surface, and after milling, imaging, with a charged particle beam, the exposed surface of the sample.

VACUUM TRANSFER ASSEMBLY
20210055534 · 2021-02-25 ·

The present invention is in the field of a vacuum transfer assembly, such as for cryotransfer, and specifically a TEM vacuum transfer assembly, which can be used in microscopy, a sample holder, a vacuum housing, a sample holder stage and a sample holder coupling unit for use in the assembly, and a microscope comprising said assembly as well as a method of vacuum transfer into a microscope.

METHODS AND DEVICES FOR PREPARING SAMPLE FOR CRYOGENIC ELECTRON MICROSCOPY

Various methods and devices are provided for searching the optimum sample condition of a sample for cryogenic electron microscopy. Multiple samples with different sample conditions may be screened using a sample inspection device. The sample inspection device includes at least a chamber formed between a top electron transparent layer and a bottom electron transparent layer for holding the sample. Multiple pillars are arranged within the chamber. The sample inspection device includes a window covering at least one of the multiple pillars.