To analyze an element to be evaluated with high sensitivity and high accuracy in a short period of time, in an electron beam analyzer including a wavelength dispersive X-ray analyzer in an electron microscope. The electron beam analyzer has one diffraction grating in which a plurality of patterns having maximum X-ray reflectance with respect to the respective X-rays are formed. It simultaneously detects an X-ray as an energy reference and an X-ray spectrum to be evaluated. The positional displacement of X-ray energy due to the installation/replacement of the diffraction grating is corrected using the X-ray spectrum as the energy reference, thereby enabling to perform an analysis with high sensitivity and high accuracy in a short period of time.

In energy dispersive X-ray (EDX) analysis, an increase in the area of a detector causes a decrease in the peak/background ratio of a detected signal. In order to solve this problem, a sample holder has a main body part for holding a sample, and a sample retaining part detachably provided to the main body part; the sample retaining part being mounted on the main body part to secure the sample held by the main body part, and the sample retaining part having: a first hole for allowing a charged particle beam to pass therethrough; and a second hole for introducing, from among signals generated by the sample, only a specific signal into a detector. The sample holder is applicable to a charged particle beam device, for example.

A semiconductor radiation detector comprises a detector chip having a front side and a back side, and a support plate on the back side of the detector chip, having electric connections with said detector chip. A base plate has a thermoelectric cooler attached to it and contact pins protruding from the base plate towards said detector chip. A bonding plate is on an opposite side of said thermoelectric cooler than said base plate, and first wire bonded connections go between said contact pins and said bonding plate. A joint plate is between said bonding plate and said support plate, and electric connections between said support plate and said bonding plate go through said joint plate.

A multi-mode low-voltage electron microscope operative in the accelerating voltage range of 3-50 kV is provided that include in the following order based on the direction of a primary electron beam (12): an electron beam source (1) to generate the primary electron beam (12), a first magnetostatic condenser lens means (3), a second magnetostatic condenser lens means (4), a condenser aperture (5), a sample holder (6), a magnetostatic objective lens means (7), an objective aperture (8), a first electrostatic projective lens means (9), and an end detection system (18) comprising a detection screen (11) and at least one detector.

Disclosed herein are systems for classifying microscopic components of physical samples, as well as related methods, computing devices, and computer-readable media. For example, in some embodiments, a method for classifying microscopic components of a physical sample may include: generating a set of regions-of-interest (ROIs) in an image representative of the physical sample, wherein the image is generated by a microscopy system using a first analysis mode; generating an initial classification for an ROI by applying a trained machine-learning model to at least the portion of the image associated with the ROI; generating a confidence score associated with the initial classification; and when the confidence score for an initial classification of an ROI does not satisfy a set of confidence criteria, causing the microscopy system to re-analyze at least the portion of the sample associated with the ROI using a second analysis mode different than the first analysis mode.

Disclosed herein is a sample characterization system including a characterization tool configured to generate an electron beam directed toward a tested sample; an X-ray photon energy dispersive detector (EDX) configured to collect X-ray photons emitted from the tested sample; and a filter assembly positioned in the characterization tool between the tested sample and the EDX, the filter assembly including a band-stop filter configured to allow transmission therethrough of information-carrying X-ray photons having a predetermined energy range and preventing irrelevant photons having an energy range different from the predetermined energy range from reaching the EDX, whereby a ratio between a count of information-carrying X-ray photons reaching the EDX and an overall photon count reaching the EDX is increased as compared to a sample characterization system without the filter assembly.