H01L21/041

Sulfur doping method for graphene

The invention provides a sulfur doping method for graphene, which comprises the steps of: 1) providing graphene and placing the grapheme in a chemical vapor deposition reaction chamber; 2) employing an inert gas to perform ventilation and exhaust treatment in the reaction chamber; 3) introducing a sulfur source gas to perform sulfur doping on the graphene at 500-1050 C.; and 4) cooling the reaction chamber in a hydrogen and inert gas atmosphere. The present invention can perform sulfur doping on the graphene simply and efficiently, the economic cost is low, and large-scale production can be realized. Large area sulfur doping on graphene can be realized, and doping of graphene on an insulating substrate or metal substrate can be carried out directly.

METHOD FOR MANUFACTURING TRANSISTOR ACCORDING TO SELECTIVE PRINTING OF DOPANT

The present invention relates to a method for manufacturing a transistor according selective printing of a dopant. For the manufacture of a transistor, a semiconductor layer is formed on a substrate, and a dopant layer is formed on the semiconductor layer. In the formation of the dopant layer, an inkjet printing is used to selectively print an n type dopant or a p type dopant.

Silicon carbide semiconductor device and method for manufacturing same

A silicon carbide semiconductor device includes: a vertical MOSFET having: a semiconductor substrate including a high-concentration impurity layer and a drift layer; a base region; a source region; a trench gate structure; a source electrode; and a drain electrode. The base region has a high-concentration base region and a low-concentration base region having a second conductivity type with an impurity concentration lower than the high-concentration base region, which are stacked each other. Each of the high-concentration base region and the low-concentration base region contacts a side surface of the trench.

Thermal diffusion doping of diamond

Boron-doped diamond and methods for making it are provided. The doped diamond is made using an ultra-thin film of heavily boron-doped silicon as a dopant carrying material in a low temperature thermal diffusion doping process.

Chemical sensors based on plasmon resonance in graphene

Techniques for forming nanoribbon or bulk graphene-based SPR sensors are provided. In one aspect, a method of forming a graphene-based SPR sensor is provided which includes the steps of: depositing graphene onto a substrate, wherein the substrate comprises a dielectric layer on a conductive layer, and wherein the graphene is deposited onto the dielectric layer; and patterning the graphene into multiple, evenly spaced graphene strips, wherein each of the graphene strips has a width of from about 50 nanometers to about 5 micrometers, and ranges therebetween, and wherein the graphene strips are separated from one another by a distance of from about 5 nanometers to about 50 micrometers, and ranges therebetween. Alternatively, bulk graphene may be employed and the dielectric layer is used to form periodic regions of differing permittivity. A testing apparatus and method of analyzing a sample using the present SPR sensors are also provided.

Sulfur Doping Method for Graphene

The invention provides a sulfur doping method for graphene, which comprises the steps of: 1) providing graphene and placing the grapheme in a chemical vapor deposition reaction chamber; 2) employing an inert gas to perform ventilation and exhaust treatment in the reaction chamber; 3) introducing a sulfur source gas to perform sulfur doping on the graphene at 500-1050 C.; and 4) cooling the reaction chamber in a hydrogen and inert gas atmosphere. The present invention can perform sulfur doping on the graphene simply and efficiently, the economic cost is low, and large-scale production can be realized. Large area sulfur doping on graphene can be realized, and doping of graphene on an insulating substrate or metal substrate can be carried out directly.

ELECTRONIC DEVICE AND METHOD OF MANUFACTURING THEREOF
20170062627 · 2017-03-02 · ·

An electronic device, includes: a graphene nanoribbon having a first graphene and a second graphene; a first electrode coupled to the first graphene; and a second electrode coupled to the second graphene, wherein the first graphene is terminated on an edge by a first terminal group and has a first polarity and the second graphene is terminated on an edge by a second terminal group different to the first terminal group and has a second polarity different from the first polarity.

ULTRANANOCRYSTALLINE DIAMOND CONTACTS FOR ELECTRONIC DEVICES

A method of forming electrical contacts on a diamond substrate comprises producing a plasma ball using a microwave plasma source in the presence of a mixture of gases. The mixture of gases include a source of a p-type or an n-type dopant. The plasma ball is disposed at a first distance from the diamond substrate. The diamond substrate is maintained at a first temperature. The plasma ball is maintained at the first distance from the diamond substrate for a first time, and a UNCD film, which is doped with at least one of a p-type dopant and an n-type dopant, is disposed on the diamond substrate. The doped UNCD film is patterned to define UNCD electrical contacts on the diamond substrate.

TRANSISTOR AND METHOD FOR MANUFACTURING SAME

A transistor that may include a substrate, a drain layer formed within the substrate at a first side of the substrate. A first well implant having a first implant depth, a second well implant having a second implant depth and a third well implant having a third implant depth. The first well implant, the second well implant and the third well implant formed within the substrate at the second side of the substrate. The second implant depth is greater than the first implant depth and the third implant depth is greater than the second implant depth. A gate formed at the second side of the substrate. The gate overlaps the first well implant by a first distance, the gate overlaps the second well implant by a second distance and the gate overlaps the third well implant by a third distance.

ATOMIC SCALE FABRICATION OF DIAMOND QUANTUM COMPUTERS

This disclosure relates to a method for manufacturing multiple optically addressable qubits in diamond. The method comprises providing a diamond substrate with a passivated surface; removing passivation atoms from the passivated surface to create multiple de-passivated sites where the passivation atoms have been removed; exposing the multiple de-passivated sites to a nitrogen-containing compound to adsorb nitrogen at the multiple de-passivated sites of the diamond substrate; overgrowing the multiple de-passivated sites with diamond by chemical vapour deposition (CVD) at a diamond growth rate related to a temperature and a pressure, wherein diffusion or desorption of the nitrogen at the multiple de-passivated sites is avoided to incorporate the nitrogen into the diamond; converting the incorporated nitrogen into multiple nitrogen vacancies; and charging the multiple nitrogen vacancies with a negative charge.