H01L21/28

SEMICONDUCTOR DEVICES AND DATA STORAGE SYSTEMS INCLUDING THE SAME

A semiconductor device includes a substrate having a first region and a second region, a first stack structure in the first region, a first channel structure penetrating through the first stack structure and in contact with the substrate, and a second stack structure on the first stack structure and the first channel structure. The device includes a second channel structure penetrating through the second stack structure and connected to the first channel structure, a first molding structure in the second region, a first alignment structure penetrating through the first molding structure and in contact with the substrate, and a second molding structure on the first molding structure and the first alignment structure. The device includes a second alignment structure penetrating through the second molding structure and connected to the first alignment structure, and a protective layer between the first molding structure and the second molding structure.

FILM FORMING METHOD AND FILM FORMING SYSTEM
20230028816 · 2023-01-26 ·

A film forming method includes: preparing a substrate that includes a base substrate and a first conductive film that is formed on the base substrate; forming, on the first conductive film, a composite layer that includes layers of graphene and includes, as dopant atoms, a transition metal from 4th period to 6th period in a periodic table, excluding lanthanoids, between the layers of graphene; and forming, on the composite layer, a second conductive film which is electrically connected to the first conductive film via the composite layer.

INTEGRATED CIRCUIT WITH NANOSHEET TRANSISTORS WITH METAL GATE PASSIVATION

A method for processing an integrated circuit includes forming N-type and P-type gate all around transistors and core gate all around transistors. The method deposits a metal gate layer for the P-type transistors. The method forms a passivation layer in-situ with the metal gate layer of the P-type transistor.

FIELD EFFECT TRANSISTORS COMPRISING A MATRIX OF GATE-ALL-AROUND CHANNELS
20230027293 · 2023-01-26 ·

Provided is a semiconductor structure with shared gated devices. The semiconductor structure comprises a substrate and a bottom dielectric isolation (BDI) layer on top of the substrate. The structure further comprises a pFET region that includes a p-doped Source-Drain epitaxy material and a first nanowire matrix above the BDI layer. The structure further comprises an nFET region that includes a n-doped Source-Drain epitaxy material and a second nanowire matrix above the BDI layer. The structure further comprises a conductive gate material on top of a portion of the first nanowire matrix and the second nanowire matrix. The structure further comprises a vertical dielectric pillar separating the pFET region and the nFET region. The vertical dielectric pillar extends downward through the BDI layer into the substrate. The vertical dielectric pillar further extends upward through the conductive gate material to a dielectric located above the gate region.

Semiconductor device with programmable unit and method for fabricating the same

The present application discloses a semiconductor device with a programmable unit and a method for fabricating the semiconductor device. The semiconductor device including a substrate, a bottom conductive layer positioned in the substrate, a first gate structure including a first gate dielectric layer positioned on the bottom conductive layer, a first work function layer positioned on the first gate dielectric layer, and a first filler layer positioned on the first work function layer, a second gate structure including a second gate dielectric layer positioned on the bottom conductive layer and spaced apart from the first gate dielectric layer, a second work function layer positioned on the second gate dielectric layer, and a second filler layer positioned on the second work function layer, a conductive plug electrically coupled to the bottom conductive layer, and a top conductive layer electrically coupled to the first gate structure and the second gate structure.

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME

A semiconductor device includes a transistor. The transistor includes a gate electrode, a channel layer, a gate dielectric layer, a first source/drain region and a second source/drain region and a dielectric pattern. The channel layer is disposed on the gate electrode. The gate dielectric layer is located between the channel layer and the gate electrode. The first source/drain region and the second source/drain region are disposed on the channel layer at opposite sides of the gate electrode. The dielectric pattern is disposed on the channel layer. The first source/drain region covers a first sidewall and a first surface of the dielectric pattern, and a second sidewall opposite to the first sidewall of the dielectric pattern is protruded from a sidewall of the first source/drain region.

SEMICONDUCTOR DIES INCLUDING LOW AND HIGH WORKFUNCTION SEMICONDUCTOR DEVICES

A semiconductor die comprises a first set of semiconductor devices disposed at a first location of the semiconductor die and a second set of semiconductor devices disposed at a second location of the semiconductor die different from the first location. Each of the first set of semiconductor devices have a first workfunction to cause each of the first set of semiconductor devices to store memory for a first time period. Moreover, each of the second set of semiconductor devices have a second workfunction that is higher greater than the first workfunction to cause each of the second set of semiconductor devices to store memory for a second time period greater than the first time period.

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
20230025977 · 2023-01-26 · ·

A semiconductor device includes a semiconductor layer including a first main surface, a first region of a first conduction type that is formed at a surface layer portion of the first main surface, a second region of a first conduction type that is formed at the surface layer portion of the first main surface and is separated from the first region in a first direction, a channel region of a second conduction type that is formed between the first region and the second region in the surface layer portion of the first main surface, a first gate electrode that is formed in a vicinity of the first region in the first main surface, faces the channel region, and includes a first side portion and a second side portion on an opposite side of the first side portion in the first direction.

MEMORY CIRCUIT, SYSTEM AND METHOD FOR RAPID RETRIEVAL OF DATA SETS
20230027037 · 2023-01-26 ·

A 3-dimensional array of NOR memory strings being organized by planes of NOR memory strings, in which (i) the storage transistors in the NOR memory strings situated in a first group of planes are configured to be programmed, erased, program-inhibited or read in parallel, and (ii) the storage transistors in NOR memory strings situated within a second group of planes are configured for storing resource management data relating to data stored in the storage transistors of the NOR memory strings situated within the first group of planes, wherein the storage transistors in NOR memory strings in the second group of planes are configured into sets.

INTEGRATED CIRCUIT WITH CONDUCTIVE VIA FORMATION ON SELF-ALIGNED GATE METAL CUT

An integrated circuit includes a first nanostructure transistor having a first gate electrode and a second nanostructure transistor having a second gate electrode. A dielectric isolation structure is between the first and second gate electrodes. A gate connection metal is on a portion of the top surface of the first gate electrode and on a portion of a top surface of the second gate electrode. The gate connection metal is patterned to expose other portions of the top surfaces of the first and second gate electrodes adjacent to the dielectric isolation structure. A conductive via contacts the exposed portion of the top surface of the second gate electrode.