Patent classifications
H01L21/44
Circuit board and display device
The present disclosure provides a circuit board, including a substrate on which a first conductive layer and an electronic device are disposed, wherein the first conductive layer is disposed on a first surface of the substrate, and wherein a bottom end of the electronic device is disposed on the first conductive layer through the substrate. The present disclosure provides a display device.
Substrate processing apparatus and substrate processing method
According to one embodiment, a substrate processing apparatus includes a table configured to place a substrate thereon and to connect the substrate to a positive electrode, an counter electrode located opposite to the table, having a plurality of holes, and connected to a negative electrode, and a holding unit located opposite to the table across the counter electrode and configured to supply a chemical liquid to the counter electrode while holding the counter electrode.
Ge-containing Co-film forming material, Ge-containing Co film and film forming method thereof
To provide a film forming material and a film forming process for forming, at a lower temperature, a Ge-containing Co film including a desired amount of Ge. A film forming material for forming a Ge-containing Co film according to the invention is represented by either formula (1) or formula (2) below R.sup.1R.sup.2R.sup.3Ge—Co(CO).sub.4 (1) (where R.sup.1, R.sup.2 and R.sup.3 are each independently hydrogen, a nonaromatic hydrocarbon group, a halogeno group or a halogenated nonaromatic hydrocarbon group; however, the nonaromatic hydrocarbon group excludes a crosslinked nonaromatic hydrocarbon group, and the halogenated nonaromatic hydrocarbon group excludes a crosslinked halogenated nonaromatic hydrocarbon group) Co(CO).sub.4R.sup.4R.sup.5Ge—Co(CO).sub.4 (2) (where R.sup.4 and R.sup.5 are each independently hydrogen, a nonaromatic hydrocarbon group, a halogeno group or a halogenated nonaromatic hydrocarbon group; however, the nonaromatic hydrocarbon group excludes a crosslinked nonaromatic hydrocarbon group, and the halogenated nonaromatic hydrocarbon group excludes a crosslinked halogenated nonaromatic hydrocarbon group).
Array substrate and flexible display panel
The present disclosure provides an array substrate and a flexible display panel. The array substrate includes a non-bending area, a bending area connecting the non-bending areas, a subpixel, a plurality of first spacers disposed on the bending area, and a plurality of second spacers disposed on the non-bending area. The subpixels distributed in arrays are distributed on the non-bending area and the bending area. The plurality of first spacers are correspondingly distributed on both sides of each of the subpixels. The present disclosure solves the subpixel failure caused by uneven distribution of subpixel stress in the related art.
Semiconductor device and manufacturing method
To provide a semiconductor device that has barrier metal and has a small variation in a threshold voltage. A semiconductor device is provided, including a semiconductor substrate, an interlayer dielectric film arranged on an upper surface of the semiconductor substrate, a titanium layer provided on the interlayer dielectric film, and a titanium nitride layer provided on the titanium layer, where the interlayer dielectric film is provided with an opening that exposes a part of the upper surface of the semiconductor substrate, the titanium layer and the titanium nitride layer are also provided within the opening, and the titanium layer arranged in contact with the semiconductor substrate and on a bottom portion of the opening is entirely titanium-silicided.
Method of fabricating a semiconductor device having reduced contact resistance
Implementations of the present disclosure generally relate to methods for forming a transistor. More specifically, implementations described herein generally relate to methods for forming a source/drain contact. In one implementation, the method includes forming a trench in a dielectric material to expose a source/drain region of a transistor, performing a pre-clean process on the exposed source/drain region, forming a doped semiconductor layer on the source/drain region by an epitaxial deposition process, and fill the trench with a conductor. The doped semiconductor layer has a lower electrical resistance than the source/drain region due to a higher dopant concentration in the doped semiconductor layer. As a result, the contact resistance of the source/drain contact is reduced.
Interposer with through electrode having a wiring protection layer
An interposer includes a base layer having a first surface and a second surface, a redistribution structure on the first surface, an interposer protection layer on the second surface, a pad wiring layer on the interposer protection layer, an interposer through electrode passing through the base layer and the interposer protection layer and electrically connecting the redistribution structure to the pad wiring layer, an interposer connection terminal attached to the pad wiring layer, and a wiring protection layer including a first portion covering a portion of the interposer protection layer adjacent to the pad wiring layer, a second portion covering a portion of a top surface of the pad wiring layer, and a third portion covering a side surface of the pad wiring layer. The third portion is disposed between the first portion and the second portion. The first to third portions have thicknesses different from each other.
Method for manufacturing semiconductor device including a semiconductor chip and lead frame
A method for manufacturing a semiconductor device includes: fixing a semiconductor chip to a first part of a leadframe; bonding one connector member to a first terminal of the semiconductor chip, a second terminal of the semiconductor chip, a second part of the leadframe, and a third part of the leadframe; forming a sealing member; and separating a first conductive part of the connector member and a second conductive part of the connector member by removing at least a section of the portion of the connector member exposed outside the sealing member, the first conductive part being bonded to the first terminal and the second part, the second conductive part being bonded to the second terminal and the third part.
Electrical contact structure and methods for forming the same
An electrical contact structure and a method for forming the electrical contact structure are provided. The method includes forming a thin film material layer on a substrate, forming a first barrier layer on the thin film material layer and forming a metal layer on the first barrier layer. The method further includes patterning the metal layer to form a metal pattern, forming a spacer on a sidewall of the metal pattern and covering a portion of the first barrier layer. The method further includes etching the first barrier layer, wherein the portion of the first barrier layer located under the spacer is not completely etched. The method further includes removing the spacer and exposing the sidewall of the metal pattern to form an electrical contact structure on the thin film material layer, wherein the first barrier layer has a protrusion part exceeding the sidewall of the metal pattern.
THIN FILM TRANSISTOR, METHOD OF MANUFACTURING THE SAME AND DISPLAY DEVICE
Embodiments of the present disclosure provide a thin film transistor, a method of manufacturing the same, and a display device. The thin film transistor includes a metal conductive pattern layer, an interlayer insulating layer, and a metal oxide layer; and the metal conductive pattern layer includes: a light shielding pattern, a source signal line, and/or a drain signal line; the metal oxide layer includes: a source electrode, a drain electrode, and an active layer. An orthographic projection of the active layer on the base substrate has an overlapping region with that of the light shielding pattern; the source electrode extends through the interlayer insulating layer to connect to the source signal line, and/or the drain electrode extends through the interlayer insulating layer to connect to the drain signal line.