Patent classifications
H
ELECTRICITY
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H01
ELECTRIC ELEMENTS
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H01L
SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/67
Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; ; Apparatus not specifically provided for elsewhere
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H01L21/673
using specially adapted carriers; or holders; Fixing the workpieces on such carriers or holders
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H01L21/67369
characterised by shock absorbing elements, e.g. retainers or cushions
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