A conveying device for conveying at least one wafer includes at least one transport body that is designed at least for supporting or holding a wafer. The conveying device is designed to move the at least one transport body at least two-dimensionally on a conveying surface.

Disclosed is a substrate conveyance device, comprising: a carrying platform, configured to support a substrate; a conveying mechanism, disposed below the carrying platform and configured to convey the carrying platform; and oppositely disposed guiding mechanisms, disposed on both sides of the carrying platform in a conveying direction, respectively. First magnetic field generators are disposed on both sides of the carrying platform in the conveying direction, and the guiding mechanism includes second magnetic field generators adjacent to the first magnetic field generators and disposed oppositely to the first magnetic field generators, respectively, such that the first magnetic field generator and the second magnetic field generator which are adjacent to each other have the same polarity. The substrate conveyance device is suitable for conveying various display substrates, especially the substrate having a large size.

A transport system includes: a mover that is movable in a transport direction; a stator that has a plurality of coils arranged in the transport direction and applies force to the mover by using the plurality of coils to which current is applied; an acquisition unit that acquires a position and an attitude of the mover moving in the transport direction; and a control unit that determines a current value applied to the plurality of coils and controls the force based on the position and the attitude of the mover.

A transport system includes: a stator having coils each including a winding and a core; and a mover having magnets to move in the transport direction by electromagnetic force generated between the plurality of coils and the magnet, the stator and the mover have one and the other of first and second transport members, respectively, that guide the moving mover in the transport direction, the first transport member includes upper-side and lower-side transport members, a transport position of the mover is adjusted so that an upper face of at least one magnet is located below or above an equilibrium position where magnetic attractive force generated between the core and the magnet and gravity on the mover are balanced with each other, and the mover is transported in a state where the second transport member is in contact with the lower-side or upper-side transport member in accordance with the transport position.

A tower lift includes a rail module extending in a vertical direction, a plurality of carriage modules that are movable along the rail module, each carriage module having a carriage that carries an object, and an interference avoidance module that avoids travel interference between the carriage modules that move along the rail module.

Disclosed herein are systems and methods relating to a transfer chamber for an electronic device processing system. The transfer chamber can include a first magnetic levitation track having a face-up orientation and a second magnetic levitation track spaced from the first magnetic levitation track and having a face-down orientation. The system can include substrate carriers that move along the first and second magnetic levitation tracks where each substrate carrier includes a magnet on a bottom portion to interact with a first magnetic field and a second magnet on a top portion to interact with a second magnetic field. The system also can include at least one lift pin assembly to move the substrate carriers in a vertical direction between the first and second magnetic levitation tracks.

A transport system, including: a sensor, a controller and a power panel. The sensor determines a zone and sends a quantity information in response to a quantity of vehicles in the zone. The controller is arranged to send an output signal in accordance with the quantity information. The power panel is arranged to output a current in accordance with the output signal for driving vehicles in the zone, wherein the current is outputted to a cable extending through the zone.

A device for collecting and transferring light emitting elements of microscale size includes a non-magnetic plate, a plurality of magnetic probes, and a magnetic plate. The non-magnetic plate defines through holes. Each of the probes is fixed in one through holes. The magnetic plate is on a surface of the non-magnetic plate and closes one opening of each of the through holes. The magnetic plate generates a magnetic field, so that each of the probes magnetically attracts one light emitting element. A method for making the transfer device and a method for transferring light emitting elements using the transfer device are also disclosed.

A method for transferring a large number of light emitting elements in a single operation during display panel manufacture includes providing a receiving substrate with light emitting elements; orienting the light emitting elements on a first platform by a first electromagnetic plate; transferring the light emitting elements on the first platform to a second platform by a second electromagnetic plate; and transferring the light emitting elements on the second platform to the receiving substrate by a third electromagnetic plate. Each light emitting element undergoes a coarse positioning and finer positionings during the transfer process, so an accuracy of the light emitting elements is high.

A linear electrical machine comprising a frame with a level reference plane and an array of electromagnets, connected to the frame to form a drive plane at a predetermined height relative to the reference plane. The array of electromagnets being arranged so that a series of electromagnets of the array of electromagnets define at least one drive line within the drive plane, and each of the electromagnets being coupled to an alternating current power source energizing each electromagnet. At least one reaction platen of paramagnetic, diamagnetic, or non-magnetic conductive material disposed to cooperate with the electromagnets of the array of electromagnets so that excitation of the electromagnets with alternating current generates levitation and propulsion forces against the reaction platen that controllably levitate and propel the reaction platen along at least one drive line, in a controlled attitude relative to the drive plane.