A dynamic routing method and apparatus for an Overhead Hoist Transport (OHT) system are disclosed. The present disclosure in some embodiments provides a dynamic routing method for an OHT system, including generating a Q table of records of at least one Q value which is a time for a vehicle to move through an edge between two adjacent nodes to a node other than the two adjacent nodes, measuring a transit time of the vehicle when assigned a destination node and passing a transit edge between a current node and next node, extracting target edges to be updated according to the transit time from a plurality of edges, and differentially updating Q values for the target edges according to distances to the transit edge partially based on the transit time, the Q values for the target edges being time values for the vehicle to move through the target edges to the destination node.

A system to effectuate improved transfer of semiconductor die. A first frame secures a first substrate having the semiconductor die. A second frame secures a second substrate adjacent the first substrate. A needle is disposed adjacent to the first frame. The needle includes: a longitudinal surface extending in a direction toward the second frame, and a base end having a cross-sectional dimension being based, at least in part, on a cross-sectional dimension of the semiconductor die. A needle actuator is operably connected to the needle and is configured to actuate the needle such that, during the transfer operation, when the first substrate is secured in the first frame and the second substrate is secured in the second frame, the needle presses the semiconductor die into contact with the second substrate so as to transfer the semiconductor die onto the second substrate.

Overhead transport vehicles with a hoist travel on a traveling rail for the overhead transport vehicles including a straight segment and a curved segment. A traveling rail for a local vehicle is provided below the traveling rail for the overhead transport vehicles, allows articles passing upward and downward over the traveling rail, has one end below the straight segment, extends from the one end parallelly to an extended line of the straight segment to a transfer position at the ground side, and has the other end outside an area under the straight segment. A buffer for the articles is provided below the straight segment and also below the traveling rail for the local vehicle. The local vehicle with a hoist traveling on the traveling rail for the local vehicle transfers the articles between the transfer position at the ground side and the buffer.

A vehicle includes one or more travel portions each configured to travel along a rail track, a travel controller configured to perform an image recognition to determine a shape of a portion of the rail track based on an image captured by an imaging device supported by the vehicle and to control the one or more travel portions based on a result of the image recognition, an information obtaining portion configured to obtain position information of each of a plurality of locations that the vehicle travels past as a result of traveling along the rail track, and to obtain the order in which the vehicle travels past such plurality of locations, and memory configured to store information obtained by the information obtaining portion.

An apparatus for contactless transportation of a device in a vacuum processing system is described. The apparatus includes: a magnetic transportation arrangement for providing a magnetic levitation force (F.sub.L) for levitating the device, the magnetic transportation arrangement comprising one or more active magnetic units; a sensor for monitoring a motion of the device, and a controller configured for controlling the one or more active magnetic units based on a signal provided by the sensor.

A method of operating a transport system includes detecting an anomalous condition of a wafer transfer vehicle; sending the wafer transfer vehicle along a rail to a diagnosis station adjacent to the rail; and inspecting properties of the wafer transfer vehicle, such as a speed, a weight, an audio frequency, a noise level, a temperature, and an image of the wafer transfer vehicle, by using the diagnosis station.

An apparatus and an operating method for automated wafer carrier handling are provided. The apparatus includes a base frame and an engaging mechanism disposed on the base frame. The engaging mechanism includes a controller and an active expansion component moveably coupled to the base frame and controlled by the controller to perform a reciprocating movement relative to the base frame. The active expansion component is driven by the controller to pass through the base frame to be engaged with a top flange mounted on the wafer carrier.

A storage shelf includes second shelf modules each including a second shelf board, a supply nozzle, an MFC configured to adjust a flow rate of the fluid supplied from the supply nozzle, and a third pipe connecting between the MFC and a main pipe connected to a supply source of the fluid, and suspension frames each including additional shelf supporting portions supporting the second shelf modules from below and a pair of suspending portions and a pair of additional suspending portions suspending and supporting the additional shelf supporting portions. The suspension frames are disposed at regular intervals along one direction. Each second shelf module is laid over between additional shelf supporting portions of suspension frames adjacent to each other in the one direction, and a pipe connector being connectable to the main pipe is provided with an end of the third pipe.

A linear electrical machine comprising a frame with a level reference plane and an array of electromagnets, connected to the frame to form a drive plane at a predetermined height relative to the reference plane. The array of electromagnets being arranged so that a series of electromagnets of the array of electromagnets define at least one drive line within the drive plane, and each of the electromagnets being coupled to an alternating current power source energizing each electromagnet. At least one reaction platen of paramagnetic, diamagnetic, or non-magnetic conductive material disposed to cooperate with the electromagnets of the array of electromagnets so that excitation of the electromagnets with alternating current generates levitation and propulsion forces against the reaction platen that controllably levitate and propel the reaction platen along at least one drive line, in a controlled attitude relative to the drive plane.

The present disclosure relates to a substrate transfer apparatus. The substrate transfer apparatus includes a first transfer apparatus, a second transfer apparatus, a substrate carrier driver, a sensor, a swing apparatus, and a controller. The first transfer apparatus is configured to transfer a substrate in a first direction. The second transfer apparatus is configured to receive the substrate from the first transfer apparatus and transfer the substrate and comprising a substrate carrier on which the substrate transferred from the first transfer apparatus is seated. The substrate carrier driver is configured to move the substrate carrier. The sensor is configured to detect an abnormal transfer of the substrate from the first transfer apparatus to the second transfer apparatus and generate a detection signal corresponding to the abnormal transfer of the substrate. The swing apparatus is configured to swing the substrate carrier. The controller is connected to the sensor and the swing apparatus and configured to control the swing apparatus based on the detection signal of the sensor.