An apparatus for contactless transportation of a device in a vacuum processing system is described. The apparatus includes: a magnetic transportation arrangement for providing a magnetic levitation force (F.sub.L) for levitating the device, the magnetic transportation arrangement comprising one or more active magnetic units; a sensor for monitoring a motion of the device, and a controller configured for controlling the one or more active magnetic units based on a signal provided by the sensor.

A conveyor system includes a first conveyor line to convey an article in a first direction, a second conveyor line parallel or substantially parallel with the first conveyor line to convey the article in a second direction that is a direction opposite to the first direction, a backup line parallel or substantially parallel with the first conveyor line and the second conveyor line and able to change states between a state of conveying the article in the first direction and a state of conveying the article in the second direction, first connecting lines to convey the article between the first conveyor line and the backup line, and second connecting lines to convey the article between the second conveyor line and the backup line.

A method for transferring a plurality of die operatively associated with a transfer apparatus to a glass substrate to form a circuit component. The transfer occurs by positioning the glass substrate to face a first surface of a die carrier carrying multiple die. A reciprocating transfer member thrusts against a second surface of the die carrier to actuate the transfer member thereby causing a localized deflection of the die carrier in a direction of the surface of the glass substrate to position an initial die proximate to the glass substrate. The initial die transfers directly to a circuit trace on the glass substrate. At least one of the die carrier or the transfer member is then shifted such that the transfer member aligns with a subsequent die on the first surface of the die carrier. The acts of actuating, transferring, and shifting are repeated to effectuate a transfer of the multiple die onto the glass substrate.

A system and method for rail management of an overhead transport (“OHT”) system of an associated automated material handing system (“AMHS”) that includes a controller in communication with the OHT system, including vehicles traveling on rails of the OHT. The rail management system also includes a turntable located on a portion of the OHT and equipped with a set of fixed rails. Upon receipt of a request to rotate the turntable from a first run-through direction to a second run-through direction, the controller engages at least one stopper sensor located near the turntable. The controller then directs the turntable to rotate from the first run-through direction to the second run-through direction. After completion, the controller disengages the at least one stopper to enable vehicles to travel directly in the second run-through direction.

A reference cost and a variable cost are included in a link cost for setting a set route for causing a setting vehicle to travel to a destination on a travelable route. A controller obtains an adjusted variable cost by adjusting a variable cost using a priority adjustment value set higher as a priority for arriving more quickly at a destination decreases, determines a link cost for each link in a candidate route, which is a candidate for a set route for a setting vehicle, based on the adjusted variable cost and the reference cost, obtains a route cost for each candidate route based on the link costs, and sets the set route based on the route costs of the candidate routes.

Article transport vehicles have, as operation states, a first state of traveling toward a transport destination that is a destination set for receiving an article or delivering an article, and a second state in which a transport destination has not been set. A controller divides the entirety of a travelable route into a plurality of set areas and executes imbalance reduction control to arrange standby transport vehicles such that imbalance of the densities of standby transport vehicles present in the areas is within a predetermined range, the standby transport vehicles being article transport vehicles in the second state.

Embodiments herein generally relate to inspection systems for substrates or wafers for solar cell applications. The inspection system is configured to analyze substrates or wafers for chips, cracks, and other defects. The system includes conveyor apparatuses, and the conveyor apparatuses include one or more conveyor elements. The conveyor elements are configured to transport rectangular wafers having a width between about 175 mm to about 250 mm. The conveyor elements include a first conveyor belt and second conveyor belt to transport the substrates. The spacing of the belts reduces vibrations of the substrate edge.

A linear electrical machine comprising a frame with a level reference plane and an array of electromagnets, connected to the frame to form a drive plane at a predetermined height relative to the reference plane. The array of electromagnets being arranged so that a series of electromagnets of the array of electromagnets define at least one drive line within the drive plane, and each of the electromagnets being coupled to an alternating current power source energizing each electromagnet. At least one reaction platen of paramagnetic, diamagnetic, or non-magnetic conductive material disposed to cooperate with the electromagnets of the array of electromagnets so that excitation of the electromagnets with alternating current generates levitation and propulsion forces against the reaction platen that controllably levitate and propel the reaction platen along at least one drive line, in a controlled attitude relative to the drive plane.

A controller determines, when a traveling vehicle to proceed in a first direction from a predetermined cell toward a destination is present, whether or not to grant the traveling vehicle occupation permission for a cell adjacent to the predetermined cell in the first direction. The traveling vehicle proceeds in the first direction if occupation permission for the adjacent cell has been granted from the controller, whereas the traveling vehicle stops at the predetermined cell if occupation permission has not been granted. The controller assigns to the traveling vehicle a traveling instruction in which a cell situated at a plurality of cells ahead of the predetermined cell in the second direction is designated as a waypoint to the destination if the traveling vehicle has not obtained occupation permission for the adjacent cell and has continuously been in a stop state at the predetermined cell for a predetermined period of time.

A substrate processing apparatus configured to process a substrate includes a substrate receptacle placing unit configured to place thereon a substrate receptacle accommodating therein the substrate to be processed; and a storage zone provided adjacent to the substrate receptacle placing unit to store therein the substrate receptacle. The storage zone includes multiple storages which are vertically arranged in multiple levels and configured to place and store thereon the multiple substrate receptacles horizontally. The substrate receptacle is transferred between a first storage of the multiple storages at an uppermost position and a ceiling travelling vehicle configured to be moved above the substrate processing apparatus. A second storage of the multiple storages under the first storage is configured to place and store the substrate receptacle thereon such that a direction of the substrate receptacle on the second storage is different from a direction of the substrate receptacle on the first storage.