A transport vehicle system includes a transport vehicle having a first travel unit configured to travel on a track and a transfer unit configured to move in a horizontal direction with respect to the first travel unit to transfer an article and a buffer vehicle having a second travel unit configure to travel on the track on which the transport vehicle travels and an article placement unit provided to be movable integrally with the second travel unit and to be able to deliver the article with the transfer unit of the transport vehicle.

An overhead transport system includes an overhead transport vehicle including a conveyor and a body, and a controller. The conveyor includes wheels to travel on rails including straight rails and intersection rails alternately arranged with a gap in each of a first direction and a second direction perpendicular to the first direction. The controller is configured or programmed to execute steering control to steer the wheels in a state in which each of the wheels is positioned on one of the intersection rails different from one another. A steering center of the wheel under the steering control is on the intersection rail and inward of the body from a ground contact point of the wheel on the intersection rail.

A substrate rotator configured to rotate one or more substrates includes a body, a body actuator coupled to the body and configured to rotate the body, and a first and second gripper coupled to the body. A substrate edge metrology system that measures side chips or other defects on all sides of the substrate is also described. The metrology system includes two metrology stations and the substrate rotator. Methods for measuring side chips or other defects on a substrate are also provided. The method includes performing metrology on a first set of sides of the first substrate, rotating the first substrate by a first angle, and performing metrology on the second set of sides of the first substrate.

A conveyance system includes a conveyance chamber including a second side wall opposite to a first side wall in a depth direction of the conveyance chamber. A robot is disposed in the conveyance chamber. The robot includes a body, a first arm, a second aim, and a hand. The body is disposed between the second side wall and a reference position in the depth direction. A second leading end of the second arm is positioned between a restricted position and the reference position in the depth direction when a first inter-axis direction and a second inter-axis direction are substantially perpendicular to the first side wall. A controller is connected to the robot to control the robot to limit entrance into an area between the first side wall and the restricted position in the depth direction.

A conveyance control device executes: a control step of detecting entering to a merging point adjacent area set on adjacent to each merging point on the conveyance route; a detection step of detecting whether there is an obstacle around the carrying cart; a communication step of performing, when the entering to each merging point adjacent area is detected, local wireless communications with another carrying cart by using a common frequency band and a common identification code set to values different among merging points; and a merging point passing control step of starting the communication step when the other carrying cart is detected in the merging point adjacent area in the detection step, and causing passing of a merging point in accordance with a priority set to each entering passage to the merging point, after a handshake with the other carrying cart is successfully performed in the communication step,

A traveling vehicle system includes a track and a ceiling traveling vehicle. The track includes a first track, a second track, and a connection track. The ceiling traveling vehicle includes a direction changer that turns a coupler, which couples a traveling wheel and a main body to each other and passes through a gap D-between the first track or the second track and the connection track. A guider is provided in the coupler, moves along a first guide surface in a first state in which the traveling wheel rolls on the first track, and moves along a second guide surface in a second state in which the traveling wheel rolls on the second track.

A controller performs a stop control if a first detector detects that an article transport vehicle traveling in a first path entered a managed area, and a second detector or a third detector detects that another article transport vehicle exists in a selected path. And the controller performs a travel control if the first detector detects that an article transport vehicle traveling in a first path entered the managed area, and presence of another article transport vehicle is not detected in the selected path by the second detector or the third detector.

A manufacturing line for a semiconductor device according to the invention is a manufacturing line for manufacturing a semiconductor device by circulating a workpiece along a conveyance route on which a plurality of treatment devices are arranged. The conveyance route includes a first route on which the treatment devices with a large number of times of treatment are arranged, and a second route on which the treatment devices with a small number of times of treatment are arranged. Besides, the conveyance route makes a changeover between the conveyance of the workpiece that has moved along the first route to the first route in a continuous manner, and the conveyance of the workpiece that has moved along the first route to the second route.

The article transport vehicles are equipped with wireless tags that transmit tag information, and an article transport facility includes: a transport control apparatus that controls the entrance of the vehicles into the control area such that the number of vehicles that are present in one control area is no greater than a control number; a plurality of access points; and a position detection apparatus that detects the respective positions of the vehicles with an accuracy with which a plurality of positions in the control area are distinguishable, based on the same tag information that has been received by the access points. The transport control apparatus permits a number of vehicles, the number being greater than the control number, to enter the control area if a predetermined permission condition is satisfied, based on the positional information that indicates the position of each vehicle.

A traveling vehicle system includes a track including a first gap, a partial track, and a second gap, a traveling vehicle including a drive wheel and first and second auxiliary wheels, a first auxiliary track on a near side of the first gap in a traveling direction and in contact with a lower end of the first auxiliary wheel while a lower end of the drive wheel passes through the first gap when the drive wheel enters the partial track, and a second auxiliary track on a far side of the second gap in the traveling direction and in contact with a lower end of the second auxiliary wheel while the lower end of the drive wheel passes through the second gap when the drive wheel leaves the partial track.