A transport system, including: a sensor, a controller and a power panel. The sensor determines a zone and sends a quantity information in response to a quantity of vehicles in the zone. The controller is arranged to send an output signal in accordance with the quantity information. The power panel is arranged to output a current in accordance with the output signal for driving vehicles in the zone, wherein the current is outputted to a cable extending through the zone.

A substrate magazine system for loading or unloading devices on production lines has at least one substrate magazine that has two side walls arranged at a distance from, and oriented in parallel to, each other, between which is a plurality of compartments one above the other. The compartments can store one or more flat substrates. Each compartment is formed by two guide rails arranged at a distance from and opposite each other at the side walls. At least one of the side walls is displaceably mounted for changing the clear width between the side walls, and has at least one substrate handling device in, at, or on which the at least one substrate magazine can be arranged. The substrate handling device has a first actuator which can be connected to the displaceably mounted side wall by an actuatable coupling and is designed to displace the displaceable side wall in the connected state.

Provided is an assembling apparatus for a semiconductor manufacturing apparatus. The assembling apparatus includes: a body; lift attached to the body and configured to move a reaction tube having an opening at a lower end portion thereof vertically, thereby allowing a gas supply pipe to be installed inside the reaction tube through the opening while the reaction tube is held by the lift; gas supply source configured to supply a gas into the reaction tube through the gas supply pipe while the reaction tube is held by the lift; and an exhaust mechanism including a pump configured to exhaust an inside of the reaction tube through the opening, thereby performing a leakage test of the reaction tube while the reaction tube is held by the lift.

A transport system includes transport vehicles, and a controller to control traveling of the transport vehicles. The track includes a first main track, junction points on the first main track and spaced apart from each other, and branch tracks each connected to the first main track via the junction points different from one another. The junction points are spaced apart from each other on the first main track. On each of the branch tracks, a stop position corresponding to a delivery port for each transport vehicle to deliver and receive a load is provided. The controller controls the respective transport vehicles stopping at the stop positions of the branch tracks to control a transport vehicle on a downstream branch track to start simultaneously with or before a transport vehicle on an upstream branch track.

A transport vehicle system includes transport vehicles to travel on a track, and a controller to perform an assignment process such where, upon receiving a plurality of pickup requests, a transport vehicle expected to arrive sooner at a pickup point is selected from the transport vehicles in a descending order of priorities of the pickup requests, and a pickup instruction which instructs to travel to the pickup point along the track and pick up an article at the pickup point is assigned to each one of the transport vehicles. The controller cancels the pickup instruction previously assigned to each of the transport vehicles and assigns a pickup instruction thereto again by the assignment process, when a change in an expected arrival order of the transport vehicles traveling toward the pickup points in accordance with the pickup instructions is recognized.

Embodiments of the present disclosure describe a chemical replacement system and a method to automatically replace PR bottles. The chemical replacement system includes a computer system and a transfer module. The computer system can receive a request signal to replace one or more chemical containers and transmit a command to the transfer module. The transfer module, being controlled by the computer system, can include a holder configured to hold the one or more chemical containers (e.g., PR bottles); a door unit configured to open in response to the command; and a transfer unit configured to eject the holder in response to the command for replacement. The chemical replacement system can further include an automated vehicle configured to replace the one or more chemical containers in the ejected holder.

A system for a semiconductor fabrication facility (FAB) includes an orientation tool and a transporting tool configured to transport at least one customized part. The orientation tool includes a port configured to receive the workpiece, a sensor configured to detect an orientation of the workpiece received in the port and a rotation mechanism configured to turn the workpiece received in the port.

A wafer inspection system is provided. The wafer inspection system comprises: a transfer region in which a transfer device is arranged; an inspection region in which test heads for inspecting a substrate are arranged; and a maintenance region in which the test heads are maintained. The inspection region is located between the transfer region and the maintenance region, a plurality of inspection rooms accommodating the test heads are adjacent to each other in the inspection region, and the test heads are configured to be unloaded from the inspection region to the maintenance region.

A system for a semiconductor fabrication facility includes a manufacturing tool including a load port, a maintenance crane, a rectangular zone overlapping with the load port of the manufacturing tool, a plurality of first sensors at corners of the rectangular zone, an OHT vehicle, a second sensor on the OHT vehicle, a third sensor on the load port, and a control unit. The first sensors are configured to detect a location of the maintenance crane and to generate a first location data. The second sensor is configured to generate a second location data. The control unit is configured to receive the first location data of the maintenance crane and the second location data of the OHT vehicle. The control unit further sends signals to the second sensor and the third sensor or to cut off the signal to the second sensor.

A stocker includes a transporter that travels through a traveling space SP within a stocker and transports an article, a pair of rails that flank the traveling space extend in parallel or substantially in parallel in a horizontal direction, platforms movable along the pair of rails, and a housing provided on a stocker outer side of a door that separates an inside and an outside of the stocker, and that houses the platforms. The pair of rails extend from the inside of the stocker to the housing through an opening directly under the door. At least one of the platforms includes a fence in an upright standing manner and an upper end of the fence is higher than an upper end of the opening. The platform that includes the fence extends across the inside of the stocker and the outside of the stocker via the opening while the fence is arranged on a stocker inner side.