A method of operating a transport system includes detecting an anomalous condition of a wafer transfer vehicle; sending the wafer transfer vehicle along a rail to a diagnosis station adjacent to the rail; and inspecting properties of the wafer transfer vehicle, such as a speed, a weight, an audio frequency, a noise level, a temperature, and an image of the wafer transfer vehicle, by using the diagnosis station.

A storage system includes an overhead stocker having a first overhead track, a rack including a plurality of storages arranged vertically, and a crane that travels along the first overhead track and delivers and receives an article to and from the storages; and an overhead transport vehicle system having a second overhead track provided below a lower end of the overhead stocker, and an overhead transport vehicle that travels along the second overhead track and delivers and receives an article to and from a predetermined transfer destination, wherein the first overhead track has an elevating track capable of supporting and lowering the crane that is stopped traveling at a portion deviated from the second overhead track in planar view.

Provided is a cooling sheet attachment apparatus to a focusing ring for a semiconductor manufacturing apparatus, including: a vacuum chamber equipped with a sheet support ring fixed to seat a cooling sheet in a chamber body with an adhesion surface exposed in an upward direction, a centering jig installed on an inner or outer circumferential surface of the sheet support ring liftably to be moved back in the upward direction by an elastic support, a cover for opening/closing installed above the chamber body and lifted by a lift unit, a press unit provided on the cover to press down the focusing ring, and a vacuum suction tube connected to the chamber body for vacuum suction; and a vacuum suction unit to create a vacuum in the vacuum chamber by the suction through the vacuum suction tube.

The present disclose relates to a substrate delivery method that uses a substrate delivery device including an elevating body for moving upward and downward a plurality of mounting parts, on which a transport container for a substrate is placed. The substrate delivery method of the present disclosure comprises loading and unloading the substrate in the transport container; temporarily suspending the loading and unloading for the transport container when the external transport mechanism tries to deliver a transport container to and from another mounting part; and positioning said other mounting part at the delivery height position and delivering the transport container to and from the external transport mechanism.

In an embodiment, a system includes: a warehousing apparatus configured to interface with a semiconductor die processing tool configured to process a semiconductor die singulated from a wafer, wherein the semiconductor die processing tool comprise an in-port and an out-port, wherein the warehousing apparatus is configured to: move a first die vessel that contains the semiconductor die to the in-port from a first die vessel container, wherein the first die vessel container is configured to house the first die vessel; move the first die vessel from the in-port to a buffer region; and move a second die vessel from the buffer region to the out-port.

Provided is a transport vehicle system SYS1 in which: an overhead transport vehicle includes a main body, a holder, a lift driver, and a lateral extender; a port pitch P is less than the overall length VL of the overhead transport vehicle in an extending direction D; and a first portion, which is raised or lowered by the lift driver moved in a lateral direction by a lateral extender, of an overhead transport vehicle stopped at a first position P1 on a first track for transferring an article W to a first transfer location S1 is offset in the extending direction D from a second portion, which is moved in a lateral direction by means of the drive of a lateral extender, of an overhead transport vehicle stopped at a second position P2 on the second track for transferring an article W to a second transfer location S2.

A transport apparatus includes a transport rail extending along a predetermined path, a transport vehicle configured to be movable along the transport rail to transport a material, and a brake unit mounted on the transport vehicle to be adjacent to the transport rail and configured to apply an eddy current braking force to the transport vehicle.

A stocker includes a transporter that travels through a traveling space within a stocker and transports an article, a pair of rails that flank the traveling space extend in parallel or substantially in parallel in a horizontal direction, platforms movable along the pair of rails, and a housing provided on a stocker outer side of a door that separates an inside and an outside of the stocker, and that houses the platforms. The pair of rails extend from the inside of the stocker to the housing through an opening directly under the door. At least one of the platforms includes a fence in an upright standing manner and an upper end of the fence is higher than an upper end of the opening. The platform that includes the fence extends across the inside of the stocker and the outside of the stocker via the opening while the fence is arranged on a stocker inner side.

A transport system includes a transport vehicle that transports an article, and a transport controller that controls the transport vehicle based on a host transport instruction received from a host controller. The transport controller includes a transport instructor which, in accordance with a host transport instruction, provides the transport vehicle with a transport instruction to transport an article at a pickup point to an unloading point, an overwriting processor which, in accordance with a host cancellation instruction to cancel the host transport instruction received from the host controller, overwrites the transport instruction provided to the transport vehicle with a move instruction which instructs to travel to a predetermined position and not to unload at the predetermined position, and provides the overwritten instruction to the transport vehicle, and a completion reporter which, upon the overwriting processor completing the overwriting, transmits to the host controller a cancellation completion report indicating the completion of the host cancellation instruction.

A transfer device includes a controller configured or programmed to perform at least one of a first control to make a maximum acceleration when moving a FOUP to a front end side smaller than a maximum acceleration when moving to a back end side, a second control to make a maximum deceleration when moving the FOUP to the front end side greater than a maximum deceleration when moving to the back end side, a third control to make the absolute value of the maximum deceleration when moving the FOUP to the front end side greater than the absolute value of the maximum acceleration, and a fourth control to make the absolute value of the maximum acceleration when moving the FOUP to the back end side greater than the absolute value of the maximum deceleration.