A storage system includes an overhead stocker including an overhead crane track shelving in which tiers of storages to accommodate articles therein are arranged vertically, and a crane to travel along the overhead crane track and transfer an article between the tiers of storages, an overhead transport vehicle system to perform receiving or delivering of an article from or to a predetermined transfer destination, and a transporter to vertically transport an article between the overhead stocker and the overhead transport vehicle system, the overhead transport vehicle system being provided below a lower end of the overhead stocker.

A control device that performs control to manage the passage of article transport vehicles in a management zone can execute: basic processing for permitting a first article transport vehicle to enter the management zone if no article transport vehicle is present in the management zone, and prohibiting a second article transport vehicle from entering the management zone if the first article transport vehicle is present in the management zone; and first exception processing for permitting the second article transport vehicle to enter the management zone in a case where, even if the first article transport vehicle is present in the management zone, the first article transport vehicle is an article transport vehicle that stops at a station provided in the first path, and the second article transport vehicle passes through a second path and a third path but does not pass through the first path.

A transport vehicle control system restricts a travel speed of an article transport vehicle to less than or equal to a restrictive speed prescribed in advance, in a case where a temperature sensor detects that the temperature of a regenerative resistor is greater than or equal to a first temperature set to a higher temperature than a steady temperature range which is a temperature range of a steady state prescribed in advance, and disconnects the connection between a power supply unit and a travel motor with a switch, in a case where the temperature sensor detects that the temperature of the regenerative resistor is greater than or equal to a second temperature set to a higher temperature than the first temperature.

A cleaning system includes: a cleaning vehicle 1 that travels along a predetermined travel path R to clean the travel path; and a maintenance facility 2 provided at a maintenance stop position A set on the travel path R, wherein the cleaning vehicle 1 includes a suction portion 14 that sucks up dust on the travel path R, a storage portion that stores the sucked up dust, and a discharge portion 16 that discharges the dust stored in the storage portion to the outside, and the maintenance facility 2 includes a dust collection portion 214 that collects the dust discharged to the outside from the storage portion via the discharge portion 16 of the cleaning vehicle 1 stopped at the maintenance stop position A.

The present disclosure provides an article transport vehicle and an article transport facility capable of allowing the article transport vehicles to share power. In addition, the present disclosure provides the article transport vehicle and the article transport facility capable of normally managing the article transport vehicle even though a non-power supply section, in which no electric supply line is installed along a rail, is lengthened. According to the present disclosure, it is possible to normally manage the article transport vehicle and relatively easily ensure power stored in the battery even though a supply of power from the electric supply line is cut off or no electric supply line is installed along the traveling rail.

The disclosure describes devices, systems, and methods for integrating load locks into a factory interface footprint space. A factory interface for an electronic device manufacturing system can include an interior volume defined by a bottom, a top and a plurality of sides, a first load lock disposed within the interior volume of the factory interface, and a first factory interface robot disposed within the interior volume of the factory interface, wherein the first factory interface robot is configured to transfer substrates between a first set of substrate carriers and the first load lock.

A semiconductor processing system includes a first semiconductor processing site and a second semiconductor processing site. The system includes an unmanned electric vehicle configured to carry a portable cleanroom stocker between the first and second semiconductor processing sites. The portable cleanroom stocker is configured to maintain cleanroom conditions within the portable cleanroom stocker during transportation.

An automatic cleaning unit for AMHS includes a plurality of sensors disposed on OHT rails. The sensors are configured to define a cleaning zone and to detect a location of an OHT vehicle. The automatic cleaning unit further includes a vacuum generator and a top cleaning part installed over the OHT rails in the cleaning zone. The top cleaning part is coupled to the vacuum generator. The vacuum generator is turned on to perform a vacuum cleaning operation when the sensors detect the OHT vehicle entering the cleaning zone.

In an embodiment, a system, includes: a first pressurized load port interfaced with a workstation body; a second pressurized load port interfaced with the workstation body; the workstation body maintained at a set pressure level, wherein the workstation body comprises an internal material handling system configured to move a semiconductor workpiece within the workstation body between the first and second pressurized load ports at the set pressure level; a first modular tool interfaced with the first pressurized load port, wherein the first modular tool is configured to process the semiconductor workpiece; and a second modular tool interfaced with the second pressurized load port, wherein the second modular tool is configured to inspect the semiconductor workpiece processed by the first modular tool.

A vehicle includes one or more travel portions each configured to travel along a rail track, a travel controller configured to perform an image recognition to determine a shape of a portion of the rail track based on an image captured by an imaging device supported by the vehicle and to control the one or more travel portions based on a result of the image recognition, an information obtaining portion configured to obtain position information of each of a plurality of locations that the vehicle travels past as a result of traveling along the rail track, and to obtain the order in which the vehicle travels past such plurality of locations, and memory configured to store information obtained by the information obtaining portion.