A substrate processing method is provided. The substrate processing method includes placing a substrate storage container storing a substrate on a load port; automatically determining a type of the substrate stored in the placed substrate storage container; by referring to a storage unit that stores a parameter data set related to a transport condition for each substrate type, controlling transport of the substrate stored in the substrate storage container based on the parameter data set corresponding to the automatically determined type of the substrate to process the substrate, and, after automatically determining the type of the substrate, and before transporting the substrate stored in the substrate storage container, performing mapping based on conditions set in the parameter data set to detect an abnormality of the substrate stored in the substrate storage container.

A transport system includes a stocker including a crane overhead track and a suspension crane that transports an article between storages and a delivery port, an overhead-transport-vehicle overhead track outside of a stocker area and alongside the delivery port and a load port of a processing tool and extending to a stocker area, an overhead transport vehicle to transport the article between the delivery port and the load port, and a joint track. A crane runner can enter the overhead-transport-vehicle overhead track from the crane overhead track via the joint track to the stocker area.

The article transport device includes a transport vehicle configured to move back and forth between a receiving location and a delivery location, and a load receiving base that is provided at at least the receiving location. The transport vehicle includes a transport placing base on which an article is to be placed, and a lift device configured to raise and lower the transport placing base to a first height and to a second height that is lower than the first height. The load receiving base is a base on which an article is to be placed, and is fixed at a third height that is between the first height and the second height. When the transport vehicle performs restoration movement to move from the delivery location to the receiving location, the lift device performs a restoration operation that differs in accordance with whether or not an article is present on the load receiving base at the receiving location.

A transport vehicle system includes a track, transport vehicles, placement units to deliver or receive articles, and area controllers that each receive a conveyance instruction from a host controller and control a transport vehicle in a jurisdiction area to execute various instructions. The area controller, in response to receiving from the host controller a conveyance instruction destined for one special placement unit belonging to a jurisdiction area, transmits to another area controller a movement instruction to control an empty transport vehicle to move toward the jurisdiction area, and also controls an empty transport vehicle that has become available in the jurisdiction area after transmission of the movement instruction to execute the conveyance instruction.

A method includes providing a rail, a first conveying unit movably mounted on the rail, and a central controller configured to control the first conveying unit; displacing the first conveying unit along the rail at a first speed; obtaining a first vibration measurement upon the displacement of the first conveying unit along the rail at the first speed; analyzing the first vibration measurement; transmitting a first signal based on the analysis of the first vibration measurement to the central controller; providing a second conveying unit movably mounted on the rail; transmitting a first feedback signal based on the first signal from the central controller to the second conveying unit; and displacing the second conveying unit along the rail at a second speed based on the first feedback signal.

A linear electrical machine comprising a frame with a level reference plane and an array of electromagnets, connected to the frame to form a drive plane at a predetermined height relative to the reference plane. The array of electromagnets being arranged so that a series of electromagnets of the array of electromagnets define at least one drive line within the drive plane, and each of the electromagnets being coupled to an alternating current power source energizing each electromagnet. At least one reaction platen of paramagnetic, diamagnetic, or non-magnetic conductive material disposed to cooperate with the electromagnets of the array of electromagnets so that excitation of the electromagnets with alternating current generates levitation and propulsion forces against the reaction platen that controllably levitate and propel the reaction platen along at least one drive line, in a controlled attitude relative to the drive plane.

The present invention provides various aspects for processing multiple types of substrates within cleanspace fabricators or for processing multiple or single types of substrates in multiple types of cleanspace environments particularly to form hardware based encryption devices and hardware based encryption equipped communication devices. In some embodiments, a collocated composite cleanspace fabricator may be capable of processing semiconductor devices into integrated circuits and then performing assembly operations to result in product in packaged form. Customized smart devices, smart phones and touchscreen devices may be fabricated in examples of a cleanspace fabricator. The assembly processing may include steps to form hardware based encryption.

A method comprises transporting semiconductor devices between a global system and a local system, wherein an input terminal of the local system is connected to the global system, and wherein the global system comprises a plurality of stockers and a global transportation system connected to the stockers and the local system comprises a first service area, an internal buffer, a second service area and a plurality of lithography apparatuses and transporting a semiconductor device from the first service area to a lithography apparatus in the second service area.

A transport vehicle system includes transport vehicles to travel on a track, and a controller to perform an assignment process such where, upon receiving a plurality of pickup requests, a transport vehicle expected to arrive sooner at a pickup point is selected from the transport vehicles in a descending order of priorities of the pickup requests, and a pickup instruction which instructs to travel to the pickup point along the track and pick up an article at the pickup point is assigned to each one of the transport vehicles. The controller cancels the pickup instruction previously assigned to each of the transport vehicles and assigns a pickup instruction thereto again by the assignment process, when a change in an expected arrival order of the transport vehicles traveling toward the pickup points in accordance with the pickup instructions is recognized.

The present disclosure provides various apparatus and methods for novel cleanspace fabricator designs. In some examples, a cleanspace fabricator may be comprised of vertically stacked tools wherein the product and the processing tools are conveyed through the cleanspace. The fabricator may comprise a processor performing cognitive computing algorithms. In some examples, the processor may be located at a remote location and communication with the cleanspace fabricator. Product may be comprised of or processed upon substrates in some examples. In other examples product may be comprised of materials contained within vessels. In some examples the product within vessels may be in liquid or powder form.