In an embodiment, a system, includes: a first pressurized load port interfaced with a workstation body; a second pressurized load port interfaced with the workstation body; the workstation body maintained at a set pressure level, wherein the workstation body comprises an internal material handling system configured to move a semiconductor workpiece within the workstation body between the first and second pressurized load ports at the set pressure level; a first modular tool interfaced with the first pressurized load port, wherein the first modular tool is configured to process the semiconductor workpiece; and a second modular tool interfaced with the second pressurized load port, wherein the second modular tool is configured to inspect the semiconductor workpiece processed by the first modular tool.

A transport vehicle control system restricts a travel speed of an article transport vehicle to less than or equal to a restrictive speed prescribed in advance, in a case where a temperature sensor detects that the temperature of a regenerative resistor is greater than or equal to a first temperature set to a higher temperature than a steady temperature range which is a temperature range of a steady state prescribed in advance, and disconnects the connection between a power supply unit and a travel motor with a switch, in a case where the temperature sensor detects that the temperature of the regenerative resistor is greater than or equal to a second temperature set to a higher temperature than the first temperature.

In order to efficiently convey a conveyance target, a conveyance system includes: a carriage configured to be capable of conveying a plurality of conveyance targets; and a carriage controller configured to perform an allocation process of allocating, to the carriage, a conveyance target to be conveyed, the carriage controller performing the allocation process such that, in a case where a region in which the carriage is movable is divided into a plurality of areas, areas of destinations of the plurality of conveyance targets that are to be simultaneously conveyed by the carriage are the same.

Embodiments herein relate to a transport system and a substrate processing and transfer (SPT) system. The SPT system includes a transport system that connects two processing tools. The transport system includes a vacuum tunnel that is configured to transport substrates between the processing tools. The vacuum tunnel includes a substrate transport carriage to move the substrate through the vacuum tunnel. The SPT system has a variety of configurations that allow the user to add or remove processing chambers, depending on the process chambers required for a desired substrate processing procedure.

The efficiency of transporting articles is improved by smoothly delivering and receiving the articles between overhead transport vehicles traveling on different tracks. A transport system includes a first overhead transport vehicle that travels on a first overhead track; a second overhead transport vehicle that travels on a second overhead track and a third overhead track; and a first placement portion and a second placement portion that allow articles to be delivered and received between the first overhead transport vehicle and the second overhead transport vehicle. At least one of the first overhead transport vehicle, the second overhead transport vehicle, the first placement portion, and the second placement portion is provided with a rotator that rotates an article around a vertical axis.

Asynchronous conveyor networks serving as inter-process transport mechanisms eliminate transport capacity constraints of vehicle-based systems in integrated circuit (IC) manufacturing environments. Demand variability may be buffered without the use of off-line-storage such as stockers. The variability in wait times for transport service is also eliminated. Overall factory cycle times are thus reduced while manufacturing capacity is simultaneously increased. An autonomous conveyor network automated materials handling system combines clean frictionless conveyor principles with a unique network layout to fulfill the logistics requirements of IC manufacturing environments. Mechanical conveyor-to-tool interfaces, also referred to as equipment delivery interfaces (EDi's), bridge the conveyor network to individual tools. An operating software module integrates the functionality of the conveyor network and EDi's. The result is a full capability factory logistics system.

A conveyance system includes a travel rail; and a plurality of vehicles each having a travel part configured to travel on the travel rail in a first direction and a second direction and a transfer part including a holder configured to hold the carrier and an elevator configured to elevate and lower the holder, in which the travel rail is disposed such that each of the vehicles is accessible to a first stop position in which the transfer part is arranged immediately above each of the transfer ports of a first processing device group performing processing of a certain process and such that the vehicle is accessible to a second stop position in which the transfer part is arranged immediately above each of the transfer ports of a second processing device group performing processing of a process different from the certain process from the first stop position.

A substrate processing method is provided. The substrate processing method includes placing a substrate storage container storing a substrate on a load port; automatically determining a type of the substrate stored in the placed substrate storage container; by referring to a storage unit that stores a parameter data set related to a transport condition for each substrate type, controlling transport of the substrate stored in the substrate storage container based on the parameter data set corresponding to the automatically determined type of the substrate to process the substrate, and, after automatically determining the type of the substrate, and before transporting the substrate stored in the substrate storage container, performing mapping based on conditions set in the parameter data set to detect an abnormality of the substrate stored in the substrate storage container.

In an embodiment, a system, includes: a first pressurized load port interfaced with a workstation body; a second pressurized load port interfaced with the workstation body; the workstation body maintained at a set pressure level, wherein the workstation body comprises an internal material handling system configured to move a semiconductor workpiece within the workstation body between the first and second pressurized load ports at the set pressure level; a first modular tool interfaced with the first pressurized load port, wherein the first modular tool is configured to process the semiconductor workpiece; and a second modular tool interfaced with the second pressurized load port, wherein the second modular tool is configured to inspect the semiconductor workpiece processed by the first modular tool.

A transport system includes transport vehicles to travel along a track and transport a load, and a controller. The track includes a first main track and branch tracks connecting to the first main track via different confluence points. The controller is configured or programmed to execute departure control that causes the transport vehicles stopped at respective stop positions of the branch tracks to depart toward the first main track for each of the branch tracks. The departure control prohibits, in accordance with whether the transport vehicle is present in a certain section on the track, departure of at least one of the transport vehicles stopped at the respective stop positions of the branch tracks.