A fireproof shutter includes a frame having an opening through which a transport rail for movement of a transport vehicle passes, the opening being divided into an upper opening and a lower opening based on the transport rail, an upper door mounted on the frame and configured to open and close the upper opening, and a lower door mounted on the frame and configured to open and close the lower opening.

Disclosed is a substrate treating apparatus for performing treatment of a plurality of substrates. The apparatus may include a load port configured to load a conveying container for receiving the plurality of substrates; a plurality of process chambers configured to perform the treatment of the substrates; a transfer chamber configured to convey the substrates between the load port and the process chamber; and a control unit configured to control the transfer chamber to convey the substrates by applying a flow recipe, wherein the control unit may control a mode of the corresponding process chamber to be changed when there is a process chamber where abnormality occurs among the plurality of process chambers included in the flow recipe while the flow recipe is applied.

A high density, controlled integrated circuits factory having process modules occupying approximately two-thirds of the factory floor space with the remaining one-third of the factory floor space being used for servicing the process modules and for loading and unloading wafers to and from the process modules. A subfloor is provided below the factory floor to allow service lifts to travel across the factory. Service lifts can be raised to the factory floor level to service process modules. Overhead lines are also provided over the process modules to transport service items as well as wafers across the factory.

Provided is a transport vehicle system SYS1 in which: an overhead transport vehicle includes a main body, a holder, a lift driver, and a lateral extender; a port pitch P is less than the overall length VL of the overhead transport vehicle in an extending direction D; and a first portion, which is raised or lowered by the lift driver moved in a lateral direction by a lateral extender, of an overhead transport vehicle stopped at a first position P1 on a first track for transferring an article W to a first transfer location S1 is offset in the extending direction D from a second portion, which is moved in a lateral direction by means of the drive of a lateral extender, of an overhead transport vehicle stopped at a second position P2 on the second track for transferring an article W to a second transfer location S2.

A stocker includes a transporter that travels through a traveling space within a stocker and transports an article, a pair of rails that flank the traveling space extend in parallel or substantially in parallel in a horizontal direction, platforms movable along the pair of rails, and a housing provided on a stocker outer side of a door that separates an inside and an outside of the stocker, and that houses the platforms. The pair of rails extend from the inside of the stocker to the housing through an opening directly under the door. At least one of the platforms includes a fence in an upright standing manner and an upper end of the fence is higher than an upper end of the opening. The platform that includes the fence extends across the inside of the stocker and the outside of the stocker via the opening while the fence is arranged on a stocker inner side.

A traveling vehicle system includes a determiner to determine, upon receiving from a traveling vehicle an entry permission request for an area under control, whether or not a remaining number of vehicles to a maximum number of vehicles allowed to enter the area is equal to or less than a threshold value, and an entry permitter to temporarily hold the entry permission request from the traveling vehicle if the determiner determines the threshold value has not been exceeded and upon arrival of the traveling vehicle at an entry region for the area, grant the traveling vehicle permission to enter the area if a sum of a number of traveling vehicles within the area and a number of traveling vehicles already permitted to enter the area is less than a maximum number of vehicles, but does not grant entry permission if the sum has reached the maximum number of vehicles.

A transfer vehicle system in which transfer vehicles travel on a track includes a measurement portion in a portion of a path continuing to the track to measure a measurement target portion included in the transfer vehicle on the path, an identifier to identify the transfer vehicle for which the measurement target portion has been measured by the measurement portion, a storage to store a measurement result measured by the measurement portion and an identification result identified by the identifier in association with each other, and a display to provide notification of information concerning a state of the measurement target portion determined based on the measurement result and a reference value.

A traveling vehicle travels along a traveling path and includes a main body, a traveler to allow a main body to travel along the traveling path, an LED array provided at the main body to switch a display manner according to a state of the traveling vehicle, an imager to capture an image of the LED array at a traveling vehicle located ahead of the traveling vehicle, and a controller configured or programmed to acquire a state of the traveling vehicle ahead based on the display manner captured by the imager, and to control the traveler of the traveling vehicle based on the acquired state.

A carriage robot includes a robot arm being configured to transport a plurality of containers, a robot hand connected to an end of the robot arm, the robot hand being configured to support a first container having a first size among the containers, and a gripper provided under the robot hand, the gripper being configured to grip a second container having a second size different from the first size. Thus, the carriage robot is capable of transport the containers, each having a size different from each other.

Provided are an interface apparatus for resolving congestion through a non-stop interface between a transporting device and a logistics automation storage device, and a container transporting system having the same. The interface apparatus includes a saddle for receiving a container from a container transporting device; and a circulating path for providing a route for transporting the container seated on the saddle to a container storage device, wherein the saddle receives the container while moving together with the container transporting device.