A coating can be provided on a substrate. Fabrication of the coating can include forming a solid layer in a specified region of the substrate while supporting the substrate in a coating system using a gas cushion. For example, a liquid coating can be printed over the specified region while the substrate is supported by the gas cushion. The substrate can be held for a specified duration after the printing the patterned liquid. The substrate can be conveyed to a treatment zone while supported using the gas cushion. The liquid coating can be treated to provide the solid layer including continuing to support the substrate using the gas cushion.

A coating can be provided on a substrate. Fabrication of the coating can include forming a solid layer in a specified region of the substrate while supporting the substrate in a coating system using a gas cushion. For example, a liquid coating can be printed over the specified region while the substrate is supported by the gas cushion. The substrate can be held for a specified duration after the printing the patterned liquid. The substrate can be conveyed to a treatment zone while supported using the gas cushion. The liquid coating can be treated to provide the solid layer including continuing to support the substrate using the gas cushion.

A conveyance apparatus according to the present embodiment is a conveyance apparatus configured to convey a substrate to irradiate the substrate with a linear laser beam and includes: a levitation unit including a loading region into which the substrate is loaded; a first holding mechanism configured to hold the substrate over the levitation unit; a first moving mechanism configured to move the first holding mechanism in a first conveyance direction; a plurality of pusher pins disposed in the loading region of the levitation unit and provided to be movable upward and downward to receive the substrate from a transfer machine transferring the substrate; and a rotary mechanism disposed among the plurality of pusher pins in the loading region of the levitation unit and configured to rotate the substrate.

A detection system, a detection method and a detection device for object placement status are provided, and the detection system includes a test object, a three-axis acceleration sensor, and a controller. The three-axis acceleration sensor is disposed on the test object and detects a three-axis acceleration of the test object. The controller calculates a current tilt angle based on the three-axis acceleration of the test object. The controller calculates an angle difference between the current tilt angle and a reference tilt angle of the test object and determines whether the angle difference exceeds an angle threshold. When the controller determines that the angle difference exceeds the angle threshold, the controller triggers an alarm signal.