A multi-zone gas distribution plate (GDP) for high uniformity in plasma-based etching is provided. A housing defines a process chamber and comprises a gas inlet configured to receive a process gas. A GDP is arranged in the process chamber and is configured to distribute the process gas within the process chamber. The GDP comprises a plurality of holes extending through the GDP, and further comprises a plurality of zones into which the holes are grouped. The zones comprise a first zone and a second zone. Holes of the first zone share a first cross-sectional profile and holes of the second zone share a second cross-sectional profile different than the first cross-sectional profile. A method for designing the multi-zone GDP is also provided.

A method for integrating complementary metal-oxide-semiconductor (CMOS) devices with a microelectromechanical systems (MEMS) device using a flat surface above a sacrificial layer is provided. In some embodiments, a back-end-of-line (BEOL) interconnect structure is formed covering a semiconductor substrate, where the BEOL interconnect structure comprises a first dielectric region. A sacrificial layer is formed over the first dielectric region, and a second dielectric region is formed covering the sacrificial layer and the first dielectric region. A planarization is performed into an upper surface of the second dielectric region to planarize the upper surface. A MEMS structure is formed on the planar upper surface of the second dielectric region. A cavity etch is performed into the sacrificial layer, through the MEMS structure, to remove the sacrificial layer and to form a cavity in place of the sacrificial layer. An integrated circuit (IC) resulting from the method is also provided.

A method for integrating complementary metal-oxide-semiconductor (CMOS) devices with a microelectromechanical systems (MEMS) device using a flat surface above a sacrificial layer is provided. In some embodiments, a back-end-of-line (BEOL) interconnect structure is formed covering a semiconductor substrate, where the BEOL interconnect structure comprises a first dielectric region. A sacrificial layer is formed over the first dielectric region, and a second dielectric region is formed covering the sacrificial layer and the first dielectric region. A planarization is performed into an upper surface of the second dielectric region to planarize the upper surface. A MEMS structure is formed on the planar upper surface of the second dielectric region. A cavity etch is performed into the sacrificial layer, through the MEMS structure, to remove the sacrificial layer and to form a cavity in place of the sacrificial layer. An integrated circuit (IC) resulting from the method is also provided.

A reconfigurable device and an analog circuit are formed on a single chip so that the analog circuit can be controlled by the reconfigurable device. A reconfigurable semiconductor device (1) includes a plurality of logic sections (20) and an analog section (10). The plurality of logic sections (20) are connected to each other by an address line or a data line. The analog section (10) includes a plurality of input/output sections and an output amplifier. Each of the logic sections (20) includes a plurality of address lines, a plurality of data lines, a memory cell unit, and an address decoder that decodes an address signal and that outputs a decoded signal to the memory cell unit. The plurality of logic sections (20) and the analog section (10) are mounted in the same chip package.

A reconfigurable device and an analog circuit are formed on a single chip so that the analog circuit can be controlled by the reconfigurable device. A reconfigurable semiconductor device (1) includes a plurality of logic sections (20) and an analog section (10). The plurality of logic sections (20) are connected to each other by an address line or a data line. The analog section (10) includes a plurality of input/output sections and an output amplifier. Each of the logic sections (20) includes a plurality of address lines, a plurality of data lines, a memory cell unit, and an address decoder that decodes an address signal and that outputs a decoded signal to the memory cell unit. The plurality of logic sections (20) and the analog section (10) are mounted in the same chip package.

Disclosed is a CMOS element. The CMOS element comprises a substrate, a first metal layer, an insulation layer and a first type metal oxide semiconductor layer; and the element further comprises a first, a second and a third metal parts which are located on the insulation layer, and the first and the second metal parts are located at two sides of the first type metal oxide semiconductor layer and both contacts therewith; a second type organic semiconductor layer, located in a gap between the second, and the third metal parts and on the second, the third metal parts where are adjacent to the gap; a passivation layer, located on the first, the second and the third metal parts, the first type metal oxide semiconductor layer and the second type organic semiconductor layer; a third metal layer located on the passivation layer corresponding to the second type organic semiconductor layer.

A semiconductor device includes a semiconductor substrate having a predetermined region in which a standard cell is disposed, and also includes: a first circuit connected to a first ground power line; a second circuit that is connected to a second ground power line and formed from the standard cells; and a protection circuit interposed and connected between the first circuit and the second circuit. The protection circuit includes: a resistor connected in series between the first circuit and the second circuit; and a protector that is interposed and connected between a node of the resistor on the second circuit side and the second ground power line and clamps a potential difference between the node and the second ground power line to a predetermined voltage or lower. The protection circuit is formed in a protection cell disposed in the predetermined region.

A method includes removing a dummy gate structure to form a gate trench over a semiconductor layer, forming a high-k gate dielectric layer over an interfacial layer exposed in the gate trench, depositing a metal-containing precursor over the high-k gate dielectric layer to form a metal-containing layer, and subsequently depositing an aluminum-containing precursor over the metal-containing layer, where depositing the aluminum-containing precursor forms an aluminum oxide layer at an interface between the high-k gate dielectric layer and the interfacial layer and where the metal-containing precursor includes a metal different from aluminum. The method further includes, subsequent to depositing the aluminum-containing precursor, removing a portion of the metal-containing layer, depositing a work-function metal layer over a remaining portion of the metal-containing layer, and forming a bulk conductive layer over the work-function metal layer, resulting in a metal gate structure.

A method includes removing a dummy gate structure to form a gate trench over a semiconductor layer, forming a high-k gate dielectric layer over an interfacial layer exposed in the gate trench, depositing a metal-containing precursor over the high-k gate dielectric layer to form a metal-containing layer, and subsequently depositing an aluminum-containing precursor over the metal-containing layer, where depositing the aluminum-containing precursor forms an aluminum oxide layer at an interface between the high-k gate dielectric layer and the interfacial layer and where the metal-containing precursor includes a metal different from aluminum. The method further includes, subsequent to depositing the aluminum-containing precursor, removing a portion of the metal-containing layer, depositing a work-function metal layer over a remaining portion of the metal-containing layer, and forming a bulk conductive layer over the work-function metal layer, resulting in a metal gate structure.

A semiconductor device including an active region defined in a substrate; at least one channel layer on the active region; a gate electrode intersecting the active region and on the active region and surrounding the at least one channel layer; and a pair of source/drain regions adjacent to both sides of the gate electrode, on the active region, and in contact with the at least one channel layer, wherein the pair of source/drain regions includes a selective epitaxial growth (SEG) layer, and a maximum width of each of the pair of source/drain regions in a first direction is 1.3 times or less a width of the active region in the first direction.