Patent classifications
H01L29/4908
Integrated circuit with embedded high-density and high-current SRAM macros
A semiconductor structure includes a substrate and first SRAM cells and second SRAM cells. Each first SRAM cell includes two first p-type FinFET and four first n-type FinFET. Each first p-type and n-type FinFET includes a channel in a single semiconductor fin. The first SRAM cells are arranged with a first X-pitch and a first Y-pitch. Each second SRAM cell includes two second p-type FinFET and four second n-type FinFET. Each second p-type FinFET includes a channel in a single semiconductor fin. Each second n-type FinFET includes a channel in multiple semiconductor fins. The second SRAM cells are arranged with a second X-pitch and a second Y-pitch. The source/drain regions of the first p-type FinFET have a higher boron dopant concentration than the source/drain regions of the second p-type FinFET. A ratio of the second X-pitch to the first X-pitch is within a range of 1.1 to 1.5.
OXIDE THIN FILM TRANSISTOR, DISPLAY PANEL AND PREPARATION METHOD THEREOF
The present application discloses an oxide thin film transistor, a display panel, and a preparation method thereof. Each thickness of the first gate insulating layer of the present application corresponding to the first source doped region, the first drain doped region, the first diffusion region, and the second diffusion region is less than a thickness corresponding to the first channel region; and thicknesses of the first gate insulating layer corresponding to the first diffusion region and the second diffusion region are both different from a thickness corresponding to the first source doped region and the first drain doped region. The the first gate insulating layer effectively shields the first channel region laterally.
SYNAPTIC DEVICE
Provided is a synaptic device including a substrate, a channel layer on the substrate, a gate dielectric layer on the channel layer; and a gate electrode on the gate dielectric layer, wherein the gate dielectric layer includes a charge supply dielectric film and a piezoelectric film, wherein the charge supply dielectric film includes a metal oxide or metal sulfide, wherein the piezoelectric film includes a piezoelectric material that converts a pressure stimulation into an electrical signal, wherein accordance to a change in a signal applied to the gate electrode, a magnitude and aspect of a current flowing through the channel layer are changed.
Methods of forming a semiconductor device comprising a channel material
A semiconductor device structure is disclosed. The semiconductor device structure includes a mesa extending above a substrate. The mesa has a channel region between a first side and second side of the mesa. A first gate is on a first side of the mesa, the first gate comprising a first gate insulator and a first gate conductor comprising graphene overlying the first gate insulator. The gate conductor may comprise graphene in one or more monolayers. Also disclosed are a method for fabricating the semiconductor device structure; an array of vertical transistor devices, including semiconductor devices having the structure disclosed; and a method for fabricating the array of vertical transistor devices.
METAL GATE FIN ELECTRODE STRUCTURE AND METHOD
Embodiments provide a replacement metal gate in a FinFET or nanoFET which utilizes a conductive metal fill. The conductive metal fill has an upper surface which has a fin shape which may be used for a self-aligned contact.
THIN-FILM TRANSISTOR, DISPLAY DEVICE INCLUDING THE SAME, AND METHOD OF MANUFACTURING THE SAME
A thin-film transistor, a display device including a thin-film transistor, and a method of manufacturing a thin-film transistor are provided. A thin-film transistor includes: a base substrate, a semiconductor layer on the base substrate, the semiconductor layer including: a first oxide semiconductor layer, and a second oxide semiconductor layer on the first oxide semiconductor layer, the second oxide semiconductor layer having a Hall mobility smaller than a Hall mobility of the first oxide semiconductor layer, and a gate electrode spaced apart from the semiconductor layer and partially overlapping the semiconductor layer, wherein a concentration of gallium (Ga) in the second oxide semiconductor layer is higher than a concentration of gallium (Ga) in the first oxide semiconductor layer.
METAL OXIDE THIN FILM TRANSISTORS (TFTS) AND THE MANUFACTURING METHOD THEREOF
The present disclosure relates to a metal oxide TFT and the manufacturing method thereof. The TFT includes a substrate, a buffering layer formed on the substrate, and an active layer formed on the buffering layer. The TFT further includes a source and a drain formed at two lateral sides of the active layer, a gate insulation layer formed on the active layer, a gate formed on the gate insulation layer, and an dielectric layer formed on the gate. The dielectric layer is made by SiOx. The dielectric layer is made by SiOx, instead of SiNx, wherein the content of the hydrogen ion may be lower. Thus, the hydrogen ion may be prevented from being diffused within the active layer so as to avoid the huge electrical leakage, which enhances the electrical performance of the metal oxide TFT.
DUAL-GATE TFT ARRAY SUBSTRATE AND MANUFACTURING METHOD THEREOF
A dual-gate TFT (thin film transistor) array substrate and a manufacturing method thereof are provided. A source electrode and a drain electrode are formed on a common electrode layer; and a common electrode of the common electrode layer, the source electrode and the drain electrode can simultaneously be formed by one mask during manufacturing. Therefore, the dual-gate TFT array substrate and the manufacturing method thereof have beneficial effects to reduce the number of masks, shorten the process, and improve the manufacturing efficiency.
SRAM WITH DIPOLE DOPANT THRESHOLD VOLTAGE MODULATION FOR GREATER READ STABILITY
Integrated circuit (IC) static random-access memory (SRAM) comprising pass-gate transistors and pull-down transistors having different threshold voltages (V.sub.t). A pass-gate transistor with a higher V.sub.t than the pull-down transistor, may reduce read instability of a bit-cell, and/or reduce overhead associated with read assist circuitry coupled to the bit-cell. In some examples, a different amount of a dipole dopant source material is deposited as part of the gate insulator for the pull-down transistor than for the pass-gate transistor, reducing the V.sub.t of the pull-down transistor accordingly. In some examples, an N-dipole dopant source material is removed from the pass-gate transistor prior to a drive/activation anneal is performed. After drive/activation, the N-dipole dopant source material may be removed from the pull-down transistor and a same gate metal deposited over both the pass-gate and pull-down transistors.
GATE STRUCTURE OF SEMICONDUCTOR DEVICE AND METHOD OF FORMING SAME
A semiconductor device a method of forming the same are provided. The method includes forming a fin extending from a substrate. A dummy gate is formed over the fin. The dummy gate extends along sidewalls and a top surface of the fin. The dummy gate is removed to form a recess. A replacement gate is formed in the recess. Forming the replacement gate includes forming an interfacial layer along sidewalls and a bottom of the recess. A dipole layer is formed over the interfacial layer. The dipole layer includes metal atoms. Fluorine atoms are incorporated in the dipole layer. The fluorine atoms and the metal atoms are driven from the dipole layer into the interfacial layer. The dipole layer is removed.