A semiconductor device includes “n” pairs of pn-junction structures, wherein the i-th pair includes two pn-junction structures of the i-th type, wherein the two pn-junction structures of the i-th type are anti-serially connected, wherein the pn-junction structure of the i-th type has an i-th junction grading coefficient m.sub.i. A first pair of the n pairs of pn-junction structures has a first junction grading coefficient m.sub.1 and a second pair of the n pairs of pn-junction structures has a second junction grading coefficient m.sub.2. The junction grading coefficients m.sub.1, m.sub.2 are adjusted to result in generation of a spurious third harmonic signal of the semiconductor device with a signal power level, which is at least 10 dB lower than a reference signal power level of the spurious third harmonic signal obtained for a reference case in which the first and second junction grading coefficients m.sub.1, m.sub.2 are 0.25.

It is an object of the present invention to provide a technique of preventing electric-field concentration in a first P-type semiconductor layer during recovery operation. A semiconductor device includes a drift layer, an N-type semiconductor layer, a first P-type semiconductor layer, a second P-type semiconductor layer, an electrode, and an insulating layer. The N-type semiconductor layer and the first P-type semiconductor layer are disposed below the drift layer while being adjacent to each other in a lateral direction. The insulating layer is disposed above the first P-type semiconductor layer while being in contact with the second P-type semiconductor layer and the electrode.

A semiconductor device includes a composite pn-junction structure in a semiconductor substrate, wherein the composite pn-junction structure has a first junction grading coefficient m.sub.1, with m.sub.10.50. The composite pn-junction structure includes a first partial pn-junction structure and a second partial pn-junction structure, wherein the first partial pn-junction structure has a first partial junction grading coefficient m.sub.11, and wherein the second partial pn-junction structure has a second partial junction grading coefficient m.sub.12. The first partial junction grading coefficient m.sub.11 is different to the second partial junction grading coefficient m.sub.12, with m.sub.11m.sub.12. At least one of the first and second partial junction grading coefficients m.sub.11, m.sub.12 is greater than 0.50, with m.sub.11 and/or m.sub.12>0.50. The first junction grading coefficient m.sub.1 of the composite pn-junction structure is based on a combination of the first and second partial junction grading coefficients m.sub.11, m.sub.12.

A semiconductor device includes n pairs of pn-junction structures, wherein the i-th pair includes two pn-junction structures of the i-th type, wherein the two pn-junction structures of the i-th type are anti-serially connected, wherein the pn-junction structure of the i-th type has an i-th junction grading coefficient m.sub.i. A first pair of the n pairs of pn-junction structures has a first junction grading coefficient m.sub.1 and a second pair of the n pairs of pn-junction structures has a second junction grading coefficient m.sub.2. The junction grading coefficients m.sub.1, m.sub.2 are adjusted to result in generation of a spurious third harmonic signal of the semiconductor device with a signal power level, which is at least 10 dB lower than a reference signal power level of the spurious third harmonic signal obtained for a reference case in which the first and second junction grading coefficients m.sub.1, m.sub.2 are 0.25.

A semiconductor device includes a composite pn-junction structure in a semiconductor substrate, wherein the composite pn-junction structure has a first junction grading coefficient m.sub.1, with m.sub.10.50. The composite pn-junction structure includes a first partial pn-junction structure and a second partial pn-junction structure, wherein the first partial pn-junction structure has a first partial junction grading coefficient m.sub.11, and wherein the second partial pn-junction structure has a second partial junction grading coefficient m.sub.12. The first partial junction grading coefficient m.sub.11 is different to the second partial junction grading coefficient m.sub.12, with m.sub.11m.sub.12. At least one of the first and second partial junction grading coefficients m.sub.11, m.sub.12 is greater than 0.50, with m.sub.11 and/or m.sub.12>0.50. The first junction grading coefficient m.sub.1 of the composite pn-junction structure is based on a combination of the first and second partial junction grading coefficients m.sub.11, m.sub.12.

[Problem] Provided is a semiconductor device that is allowed to withstand a higher voltage while having a more efficient occupancy area. [Solving means] A semiconductor device including: a first conductivity-type layer into which first conductivity-type impurities are introduced; a second conductivity-type layer into which second conductivity-type impurities are introduced, the second conductivity-type impurities being different in polarity from the first conductivity-type impurities; and an intermediate layer that is sandwiched between the first conductivity-type layer and the second conductivity-type layer, and does not include the first conductivity-type impurities or the second conductivity-type impurities, or includes the first conductivity-type impurities or the second conductivity-type impurities at a concentration lower than a concentration of the first conductivity-type impurities in the first conductivity-type layer or the second conductivity-type impurities in the second conductivity-type layer, the first conductivity-type layer, the intermediate layer, and the second conductivity-type layer being stacked in a thickness direction of a semiconductor substrate inside the semiconductor substrate.

A semiconductor device having first through third layers. The first layer has a first conductivity type. The second layer has a second conductivity type different from the first conductivity type. The third layer has a first portion having the second conductivity type and a second portion having the first conductivity type. A trench structure is located in the first portion and is completely surrounded by the first portion in an area extending from a first surface of the third layer to a second surface of the third layer.

A humidity sensor includes a first semiconductor chip having a first side and a second side opposing each other, and including a humidity sensing part and pads arranged along the first side, a second semiconductor chip mounted with the first semiconductor chip and configured to process signals input via bonding wires coupled to the pads, and an encapsulating member having an opening exposing the humidity sensing part. The opening has a center position closer to the second side than a center position of the first semiconductor chip.

A semiconductor device includes a composite pn-junction structure in a semiconductor substrate, wherein the composite pn-junction structure has a first junction grading coefficient m.sub.1, with m.sub.10.50. The composite pn-junction structure includes a first partial pn-junction structure and a second partial pn-junction structure, wherein the first partial pn-junction structure has a first partial junction grading coefficient m.sub.11, and wherein the second partial pn-junction structure has a second partial junction grading coefficient m.sub.12. The first partial junction grading coefficient m.sub.11 is different to the second partial junction grading coefficient m.sub.12, with m.sub.11m.sub.12. At least one of the first and second partial junction grading coefficients m.sub.11, m.sub.12 is greater than 0.50, with m.sub.11 and/or m.sub.12>0.50. The first junction grading coefficient m.sub.1 of the composite pn-junction structure is based on a combination of the first and second partial junction grading coefficients m.sub.11, m.sub.12.

A semiconductor device includes n pairs of pn-junction structures, wherein the i-th pair includes two pn-junction structures of the i-th type, wherein the two pn-junction structures of the i-th type are anti-serially connected, wherein the pn-junction structure of the i-th type has an i-th junction grading coefficient m.sub.i. A first pair of the n pairs of pn-junction structures has a first junction grading coefficient m.sub.1 and a second pair of the n pairs of pn-junction structures has a second junction grading coefficient m.sub.2. The junction grading coefficients m.sub.1, m.sub.2 are adjusted to result in generation of a spurious third harmonic signal of the semiconductor device with a signal power level, which is at least 10 dB lower than a reference signal power level of the spurious third harmonic signal obtained for a reference case in which the first and second junction grading coefficients m.sub.1, m.sub.2 are 0.25.