Patent classifications
H01L29/94
SEMICONDUCTOR STRUCTURE AND METHOD FOR MANUFACTURING SEMICONDUCTOR STRUCTURE
A semiconductor structure and a method for manufacturing a semiconductor structure are provided, which relate to the technical field of semiconductors. The semiconductor structure includes a substrate and a plurality of first conductive layers. The substrate includes a plurality of first trenches extending in a first direction and a plurality of second trenches extending in a second direction. A plurality of active pillars are provided between the plurality of first trenches and the plurality of second trenches. The first direction intersects with the second direction. Each of the plurality of first conductive layers is arranged on each of sidewalls, which are arrayed in the first direction, of a respective one of the plurality of active pillars.
SEMICONDUCTOR STRUCTURE AND METHOD FOR MANUFACTURING SAME
A semiconductor structure includes a substrate, a gate structure, a cover layer and a first sacrificial structure. The substrate includes discrete semiconductor channels arranged at a top of the substrate. The gate structure is disposed in a middle region of a semiconductor channel, and includes a ring structure and a bridge structure. The ring structure encircles the semiconductor channel, and the bridge structure penetrates through the semiconductor channel and extends to an inner wall of the ring structure along a penetrating direction. The cover layer is located between adjacent semiconductor channels, and includes a first communication hole. The first sacrificial structure is located on the cover layer, and includes a second communication hole. An inner sidewall of the second communication hole has an irregular shape.
SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF, AND MEMORY
A semiconductor structure includes a substrate, and a plurality of first semiconductor columns, a storage structure, a plurality of transistors and a first protective layer located above the substrate. The plurality of first semiconductor columns are arranged in array in first and second directions. Each first semiconductor column includes a first part and a second part located on same. The second part includes a bottom portion, an intermediate portion and a top portion. The first direction and the second direction intersect with each other and are both parallel to top surface of the substrate. The storage structure surrounds sidewalls of the first parts. The first protective layer surrounds sidewalls of the top portions of the second parts. A channel structure of each transistor is located in the intermediate portion of the second part, and an extending direction of the channel structure is the same as that of the second part.
SEMICONDUCTOR STRUCTURE AND METHOD FOR MANUFACTURING SEMICONDUCTOR STRUCTURE
A semiconductor structure and a method for manufacturing a semiconductor structure are provided. The method for manufacturing the semiconductor structure includes: a substrate is provided: a plurality of semiconductor channels arrayed in a first direction and a second direction are formed on the substrate: a plurality of bit lines extending in the first direction are formed, in which the bit lines is located in the substrate: and a plurality of word lines extending in the second direction are formed, in which two word lines adjacent to each other in the first direction are spaced apart from each other in a direction perpendicular to a surface of the substrate: and a sidewall conductive layer is formed, in which the sidewall conductive layer is located above one of the two word lines adjacent to each other, and is arranged in the same layer as the other of the two word lines.
SEMICONDUCTOR STRUCTURE AND METHOD FOR MANUFACTURING SAME
A semiconductor structure and a method for manufacturing the same are provided. The semiconductor structure includes: a substrate, a dielectric layer, a first gate structure and a second gate structure. The substrate includes discrete semiconductors arranged at a top of the substrate and extending in a vertical direction. The first gate structure is arranged in a first region of the semiconductor pillar and surrounds the semiconductor pillar. The second gate structure is arranged in a second region of the semiconductor pillar and includes a ring structure and at least one bridge structure. The ring structure surrounds the semiconductor pillar, and the at least one bridge structure penetrates through the semiconductor pillar and extends to an inner wall of the ring structure in a penetrating direction. The dielectric layer is located between the first gate structure and the semiconductor pillar, and between the second gate structure and the semiconductor pillar.
MEMORY DEVICE AND METHOD FOR FORMING SAME
A memory device and a method for forming the same are provided. A hard mask layer is formed on a semiconductor substrate; and then multiple parallel mask patterns extending in a third direction are formed on the semiconductor substrate by adopting self-aligned multi-patterning. Openings are arranged between the adjacent mask patterns. The surfaces of multiple drain regions and corresponding part of the isolation layer in the third direction are exposed by the openings.
SEMICONDUCTOR DEVICE
A semiconductor device includes a power supply and ground layer and a semiconductor chip disposed over the power supply and ground layer. The power supply and ground layer includes a substrate and a wiring part. The substrate has one or more grooves whose openings are directed toward the semiconductor chip, and the wiring part is disposed within the one or more grooves via an insulating layer and is formed in a predetermined pattern. The substrate is connected to ground wiring of the semiconductor chip and the wiring part is connected to power supply wiring of the semiconductor chip. The wiring part is not exposed from a back surface of the substrate.
SEMICONDUCTOR DEVICE AND FORMATION METHOD THEREOF
A semiconductor device and a formation method thereof are provided. The semiconductor device includes: a semiconductor substrate, where a plurality of columnar active areas are formed on the semiconductor substrate, the plurality of columnar active areas are spaced apart by a plurality of first trenches extending along a first direction and a plurality of second trenches extending along a second direction; a plurality of third trenches positioned in the semiconductor substrate at bottoms of the second trenches, where the third trenches are recessed to bottoms of the columnar active areas, and a bottom surface of a given one of the third trenches is higher than a bottom surface of the given first trench; and a plurality of metal silicide bit lines extending along the first direction in the semiconductor substrate positioned at the bottoms of the plurality of third trenches and the bottoms of the plurality of columnar active areas.
SEMICONDUCTOR STRUCTURE, METHOD FOR MANUFACTURING SAME AND MEMORY
A semiconductor structure, a method for manufacturing the same and a memory are provided. The semiconductor structure includes a substrate, multiple semiconductor pillars, memory structures, and multiple transistors. The multiple semiconductor pillars are arrayed along a first direction and a second direction. Each semiconductor pillar includes a first portion and a second portion on the first portion. The memory structure includes a first electrode layer, a dielectric layer and a second electrode layer. The first electrode layers cover sidewalls of the first portions and are located in first filling regions arranged at intervals. Each first filling region surrounds a sidewall of the first portion. The dielectric layers cover at least surfaces of the first electrode layers. The second electrode layers cover surfaces of the dielectric layers. Channel structures of the transistors are located in the second portions, and extend in a same direction as the second portions.
SEMICONDUCTOR STRUCTURE AND METHOD FOR MANUFACTURING SAME
A semiconductor structure includes: a substrate, a first gate structure, and a second gate structure. The substrate includes: discrete first semiconductor pillars arranged at a top of the substrate and extending in a vertical direction; and a second semiconductor pillar and a third semiconductor pillar extending in the vertical direction, the second and third semiconductor pillars are provided at a top of each first semiconductor pillar. The first gate structure is arranged in a middle region of the first semiconductor pillar and surrounds the first semiconductor pillar. The second gate structure is arranged in a middle region of the second semiconductor pillar and of the third semiconductor pillar, and includes a first ring structure and a second ring structure. The first ring structure surrounds the second semiconductor pillar, and the second ring structure surrounds the third semiconductor pillar.