H01S5/0687

Laser apparatus

A laser apparatus includes: a light source configured to generate laser light; and an optical negative feedback unit configured to narrow a spectral line of the laser light using optical negative feedback. A modulation signal is input to the light source to modulate a frequency of the laser light. A modulation amount in the frequency of the laser light is detected. A modulation sensitivity is calculated from (i) the modulation amount and (ii) an intensity of the modulation signal.

Laser apparatus, EUV light generating system, and electronic device manufacturing method
11532920 · 2022-12-20 · ·

A laser apparatus according to the present disclosure includes an excitation light source configured to output excitation light, a laser crystal disposed on an optical path of the excitation light, a first monitor device disposed on an optical path of transmitted excitation light after having transmitted through the laser crystal to monitor the transmitted excitation light, a temperature adjustment device configured to adjust a temperature of the excitation light source to a constant temperature based on a temperature command value, and a controller configured to change the temperature command value based on a result of monitoring by the first monitor device.

Light source, optical device, measuring device, robot, electronic apparatus, movable structure, and manufacturing apparatus

According to one embodiment, a light source includes a plurality of light-emitting elements each including one or more surface-emitting lasers; and a plurality of detecting elements located on a same substrate as the light-emitting elements. The detecting elements individually detect quantities of output light of the light-emitting elements.

Light source, optical device, measuring device, robot, electronic apparatus, movable structure, and manufacturing apparatus

According to one embodiment, a light source includes a plurality of light-emitting elements each including one or more surface-emitting lasers; and a plurality of detecting elements located on a same substrate as the light-emitting elements. The detecting elements individually detect quantities of output light of the light-emitting elements.

REGULATOR CIRCUIT AND REGULATOR SYSTEM FOR TUNABLE LASER
20220399698 · 2022-12-15 ·

The present disclosure discloses a regulator circuit and regulator system for a tunable laser, the regulator circuit for the tunable laser includes a control module, a digital-to-analog conversion module and a semiconductor temperature regulation module; after the regulator circuit for the tunable laser is powered on, the control module is configured to send a control signal to the digital-to-analog conversion module, the digital-to-analog conversion module is configured to convert the control signal into an analog voltage signal and send the analog voltage signal to the semiconductor temperature regulation module, the semiconductor temperature regulation module is configured to cool or heat the tunable laser according to the received analog voltage signal.

Laser wavelength center lock using photonic integrated circuit
11522340 · 2022-12-06 · ·

An apparatus includes an optical splitter configured to receive an optical signal and to split the input optical signal to provide a first and a second optical signal. The apparatus further includes an interferometer comprising a first arm and a second arm, with the first arm being configured to receive the first optical signal, and the second arm being configured to receive the second optical signal. Notably a portion of the first arm is exposed to a reference gas that attenuates light of a characteristic wavelength. The apparatus further includes an optical coupler configured to receive an output optical signal from the first arm, and an output optical signal from the second arm and to provide a third optical signal; and a photodetector configured to receive the third optical signal, and to provide a photocurrent. The photocurrent increases when the difference between the characteristic wavelength and the wavelength of the optical signals increases. The apparatus also comprises a feedback control circuit configured to change the properties of the laser to be locked until an error signal indicative of the difference between the characteristic wavelength and the wavelength of the laser is substantially zero.

Device and method for optical spectrum measurement
11513005 · 2022-11-29 · ·

A device for measuring optical spectra at high speed and with high resolution using tunable optical laser comb sources. In one embodiment there is provided a first tunable comb laser source and a second tunable comb laser source whereby the wavelength of each comb laser source is chosen such that the combination of the two sources provides a continuous spectral coverage over a band in an optical spectrum under a selected wavelength tuning condition. By overlapping the two comb sources in the manner described the deadzone issue is overcome in the most spectrally efficient way possible.

Device and method for optical spectrum measurement
11513005 · 2022-11-29 · ·

A device for measuring optical spectra at high speed and with high resolution using tunable optical laser comb sources. In one embodiment there is provided a first tunable comb laser source and a second tunable comb laser source whereby the wavelength of each comb laser source is chosen such that the combination of the two sources provides a continuous spectral coverage over a band in an optical spectrum under a selected wavelength tuning condition. By overlapping the two comb sources in the manner described the deadzone issue is overcome in the most spectrally efficient way possible.

LASER APPARATUS AND CONTROL METHOD THEREFOR
20220376473 · 2022-11-24 · ·

A laser apparatus includes: a laser unit including: a laser element unit including a phase adjusting portion configured to adjust an optical length of a laser resonator and enable frequency of laser light to be tuned; and a monitor unit configured to obtain a monitored value corresponding to the frequency of the laser light; a temperature controller configured to control temperature of the laser unit; and a control unit configured to execute: controlling the phase adjusting portion such that the monitored value is adjusted to a target monitored value corresponding to a target frequency set as the frequency of the laser light, while maintaining temperature set for the temperature controller constant; and controlling the temperature controller such that the frequency of the laser light is adjusted to the target frequency in a case where continuous fine adjustment control of the frequency of the laser light has been instructed.

LASER APPARATUS AND CONTROL METHOD THEREFOR
20220376473 · 2022-11-24 · ·

A laser apparatus includes: a laser unit including: a laser element unit including a phase adjusting portion configured to adjust an optical length of a laser resonator and enable frequency of laser light to be tuned; and a monitor unit configured to obtain a monitored value corresponding to the frequency of the laser light; a temperature controller configured to control temperature of the laser unit; and a control unit configured to execute: controlling the phase adjusting portion such that the monitored value is adjusted to a target monitored value corresponding to a target frequency set as the frequency of the laser light, while maintaining temperature set for the temperature controller constant; and controlling the temperature controller such that the frequency of the laser light is adjusted to the target frequency in a case where continuous fine adjustment control of the frequency of the laser light has been instructed.