A wafer may comprise a substrate layer and a plurality of vertical cavity surface emitting lasers (VCSELs) formed on or within the substrate layer. A respective trench-to-trench distance associated with the plurality of VCSELs may vary across the wafer based on a predicted variation of an oxidation rate of an oxidation layer across the wafer.

A device comprising: an illumination device for emitting an illumination beam, the illumination device comprising: an emitter array comprising multiple light emitters; and a meta-structure or micro-prism array comprising multiple transmission areas, the meta-structure of micro-prisms being positioned to receive light emitted from the emitter array, in which light from the meta-structure of micro-prism forms the illumination beam, in which a first one of said multiple transmission areas is arranged to emit light in a different direction than a second one of said multiple transmission areas.

In some implementations, an emitter array may include a substrate, an epitaxial structure on the substrate, a plurality of bottom-emitting emitters defined in the epitaxial structure, a first electrical contact positioned at a top side of the epitaxial structure, a second electrical contact positioned at the top side of the epitaxial structure, and a metal layer disposed on a bottom side of the substrate. The metal layer may be electrically connected to the second electrical contact. The metal layer may include one or more openings for light emission of the plurality of bottom-emitting emitters.

A surface-emitting semiconductor laser includes a substrate, a first electrode in contact with the substrate, a first light reflection layer over the substrate, a second light reflection layer over the substrate, with the first light reflection layer between the second light reflection layer and the substrate, an active layer between the second light reflection layer and the first light reflection layer, a current confining layer between the active layer and the second light reflection layer and includes a current injection region, a second electrode over the substrate, with the second light reflection layer between the second electrode and the substrate, at least a portion of the second electrode is at a position overlapping the current injection region, and a contact layer between the second electrode and the second light reflection layer and includes a contact region in contact with the second electrode.

Disclosed herein are electronic devices having touch input surfaces. A user's touch input or press on the touch input surface is detected using a set of lasers, such as vertical-cavity surface-emitting lasers (VCSELs) that emit beams of light toward the touch input surface. The user's touch causes changes in the self-mixing interference within the VCSEL of the emitted light with reflected light, such as from the touch input surface. Deflection and movement (e.g., drag motion) of the user's touch is determined from detected changes in the VCSELs' operation due to the self-mixing interference.

One example provides an optical device, comprising a light source configured to output unpolarized light, a polarizing beam splitter configured to split the unpolarized light into light of a first polarization state and light of a second polarization state and a polarization volume grating configured to receive the light of the first polarization state and the light of the second polarization state, and transmit the light of the first polarization state without changing the light of the first polarization state to a different polarization state, and convert the light of the second polarization state to the first polarization state, thereby forming polarized output light.

A vertical-external-cavity surface-emitting laser (VECSEL) and a method of forming the VECSEL is disclosed. The VECSEL includes a heat sink; a heat spreader or heat spreader formed on a top surface of the heat sink, where the heat spreader comprises a first material having a first refractive index; and a high contrast grating formed on a top surface of the heat spreader or active region, wherein the high contrast grating comprises an active region and the high contrast grating comprising a second material having a second refractive index, the second refractive index is greater than the first refractive index.

A vertical cavity surface emitting device includes a substrate, a first multilayer film reflecting mirror formed on the substrate, a light-emitting structure layer formed on the first multilayer film reflecting mirror and including a light-emitting layer, and a second multilayer film reflecting mirror formed on the light-emitting structure layer. A resonator is constituted between the second multilayer film reflecting mirror and the first multilayer film reflecting mirror. The light-emitting structure layer includes a low resistance region and a high resistance region. The low resistance region is disposed in a ring shape between the first multilayer film reflecting mirror and the second multilayer film reflecting mirror. The high resistance region is formed inside the low resistance region and has an electrical resistance higher than an electrical resistance of the low resistance region.

Disclosed herein are electronic devices having touch input surfaces. A user's touch input or press on the touch input surface is detected using a set of lasers, such as vertical-cavity surface-emitting lasers (VCSELs) that emit beams of light toward the touch input surface. The user's touch causes changes in the self-mixing interference within the VCSEL of the emitted light with reflected light, such as from the touch input surface. Deflection and movement (e.g., drag motion) of the user's touch is determined from detected changes in the VCSELs' operation due to the self-mixing interference.

The present disclosure provides new and innovative VCSEL devices and systems. In an example, a VCSEL device comprises a cavity mirror with a curved mirror surface of a VCSEL and a radius of curvature (ROC) of the curved mirror surface that is anisotropic, wherein the ROC comprises four directions, the four directions being +x, +y, −x, −y, the ROC in at least one direction is in a range greater than a cavity length of the VCSEL and less than a predefined ROC value for a standard beam width (ROCUL), and the ROC in at least one of the other directions is outside the range.