H01S5/2214

III-V LASER PLATFORMS ON SILICON WITH THROUGH SILICON VIAS BY WAFER SCALE BONDING

A laser integrated photonic platform to allow for independent fabrication and development of laser systems in silicon photonics. The photonic platform includes a silicon substrate with an upper surface, one or more through silicon vias (TSVs) defined through the silicon substrate, and passive alignment features in the substrate. The photonic platform includes a silicon substrate wafer with through silicon vias (TSVs) defined through the silicon substrate, and passive alignment features in the substrate for mating the photonic platform to a photonics integrated circuit. The photonic platform also includes a III-V semiconductor material structure wafer, where the III-V wafer is bonded to the upper surface of the silicon substrate and includes at least one active layer forming a light source for the photonic platform.

NITRIDE SEMICONDUCTOR LASER DEVICE AND METHOD FOR PRODUCING NITRIDE SEMICONDUCTOR LASER DEVICE
20200185883 · 2020-06-11 ·

A nitride semiconductor laser device includes an n-type semiconductor layer, an active layer, and a p-type semiconductor layer which are formed in this order on a nitride semiconductor substrate, and by using crystal stress in the n-type semiconductor layer, the laser device is allowed to have two or more light-emitting points emitting light with different peak wavelengths in the active layer. A method for producing a nitride semiconductor laser device includes a step of forming an n-type semiconductor layer on a nitride semiconductor substrate, a step of forming an active layer on the n-type semiconductor layer, and a step of forming a p-type semiconductor layer on the active layer. In the step of forming the n-type semiconductor layer, the n-type semiconductor layer is formed so as to produce a stress difference in a portion of the n-type semiconductor layer.

Method for high-concentration doping of germanium with phosphorous

In a method for electrically doping a semiconducting material, a layer of germanium is formed having a germanium layer thickness, while in situ incorporating phosphorus dopant atoms at a concentration of at least about 510.sup.18 cm.sup.3 through the thickness of the germanium layer during formation of the germanium layer. Additional phosphorus dopant atoms are ex situ incorporated through the thickness of the germanium layer, after formation of the germanium layer, to produce through the germanium layer thickness a total phosphorus dopant concentration of at least about 210.sup.19 cm.sup.3.

ALGAINPAS-BASED SEMICONDUCTOR LASER DEVICE AND METHOD FOR PRODUCING SAME
20200161837 · 2020-05-21 ·

An AlGaInPAs-based semiconductor laser device includes a substrate, an n-type clad layer, an n-type guide layer, an active layer, a p-type guide layer composed of AlGaInP containing Mg as a dopant, a p-type clad layer composed of AlInP containing Mg as a dopant, and a p-type cap layer composed of GaAs. Further, the semiconductor laser device has, between the p-type guide layer and the p-type clad layer, a Mg-atomic concentration peak which suppresses inflow of electrons, moving from the n-type clad layer to the active layer, into the p-type guide layer or the p-type clad layer.

Superlattice heterostructures formed with single crystalline semiconductor nanomembranes and amorphous tunneling barrier layers

Superlattice structures composed of single-crystal semiconductor wells and amorphous barriers are provided. Also provided are methods for fabricating the superlattice structures and electronic, optoelectronic, and photonic devices that include the superlattice structures. The superlattice structures include alternating quantum barrier layers and quantum well layers, the quantum barrier layers comprising an amorphous inorganic material and the quantum well layers comprising a single-crystalline semiconductor.

SEMICONDUCTOR LASERS AND PROCESSES FOR THE PLANARIZATION OF SEMICONDUCTOR LASERS

A laser structure may include a substrate, an active region arranged on the substrate, and a waveguide arranged on the active region. The waveguide may include a first surface and a second surface that join to form a first angle relative to the active region. A material may be deposited on the first surface and the second surface of the waveguide.

Surface light emitting semiconductor laser element

A surface light emitting semiconductor laser element, comprises a substrate, a lower reflector including a semiconductor multi-layer disposed on the substrate, an active layer disposed on the lower reflector, an upper reflector including a semiconductor multi-layer disposed on the active layer, a compound semiconductor layer having a first opening for exposing the upper reflector and extending over the upper reflector, and a metal film having a second opening for exposing the upper reflector disposed inside of the first opening and extending over the compound semiconductor layer, wherein the metal film and the compound semiconductor layer constitute a complex refractive index distribution structure where a complex refractive index is changed from the center of the second opening towards the outside. A method of emitting laser light in a single-peak transverse mode is also provided.

Hybrid vertical current injection electro-optical device with refractive-index-matched current blocking layer

The invention is directed to a hybrid, vertical current injection electro-optical device, comprising an active region and one or more current blocking layers. The active region includes a stack of III-V semiconductor gain materials designed for optical amplification. The gain materials of the stack are stacked along a stacking direction z, which is perpendicular to a main plane of the stack. The one or more current blocking layers extend perpendicularly to the stacking direction z and laterally on opposite sides of the active region. The one or more current blocking layers each have an effective refractive index n.sub.1 that is matched to the effective refractive index n of the active region, i.e., n.sub.1=fn, with f[0.95; 1.05]. The invention is further directed to a silicon photonics chip comprising such an electro-optical device.

Semiconductor light-emitting element, manufacturing method of semiconductor light-emitting element, and semiconductor device
10541511 · 2020-01-21 · ·

A semiconductor light-emitting element includes a laminated structure which has an active layer between a first conductivity-type semiconductor layer and a second conductivity-type semiconductor layer, a first semiconductor layer which includes at least the first conductivity-type semiconductor layer of the laminated structure, an insulation film which is formed on the first semiconductor layer and has an opening, and a second semiconductor layer which is formed on the insulation film and includes at least the second conductivity-type semiconductor layer of the laminated structure. The second semiconductor layer includes a first region facing the opening of the insulation film and a second region not facing the opening, and the second region has a portion with a higher impurity concentration than the first region.

Laser devices using a semipolar plane

An optical device includes a gallium and nitrogen containing substrate comprising a surface region configured in a (20-2-1) orientation, a (30-3-1) orientation, or a (30-31) orientation, within +/10 degrees toward c-plane and/or a-plane from the orientation. Optical devices having quantum well regions overly the surface region are also disclosed.