An apparatus including a first device configured to support a substrate thereon; a first transport having the first device connected thereto, where the first transport includes: rails or maglev guides; a magnetic system configured to vertically space the first device over the rails or maglev guides with a gap between the first device and the rails or maglev guides, where the magnetic system comprises a first electromagnetic actuator at a first corner of a first side of the first device, a second electromagnetic actuator at a second corner of the first side of the first device, and a third electromagnetic actuator at a second opposite side of the first device, where the third electromagnetic actuator is not located proximate a corner of three sides of the first device; and a linear actuator configured to move the first device along the rails or maglev guides.

A reticle transport system having a magnetically levitated transportation stage is disclosed. Such a system may be suitable for use in vacuum environments, for example, ultra-clean vacuum environments. A magnetic levitated linear motor functions to propel the transportation stage in a linear direction along a defined axis of travel and to magnetically levitate the transportation stage.

A linear motor includes a stator including a plurality of salient poles arranged at regular intervals in the Y-axis direction, and a mover movable in the Y-axis direction and facing the stator in the X-axis direction, in which the mover includes a plurality of teeth arranged in the Y-axis direction, three-phase alternate current windings wound around the teeth, a mover magnetic yoke that connects the plurality of teeth, permanent magnets each disposed in a gap between the teeth of identical phase, and magnetic flux barriers each embedded near the base of each tooth of the plurality of teeth, disposed completely within a width of each tooth in the X-axis direction, and spaced apart from the permanent magnet in the X-axis direction.

The present invention relates to a device for processing a component, comprising: a travel carriage having a frame which defines an axis of translation along which the travel carriage is translationally movable, a bogie which is relatively rotatably connected to the frame and to which the component is attachable, a first translation-permanent magnet device which is mounted on the frame and having permanent magnets, a rotation-permanent magnet device attached to the bogie and having permanent magnets, and a carriage-side longitudinal guide means mounted on the frame, a stationary travel carriage guide device having a guide-side longitudinal guide means, a first electromagnet translation device with electromagnets which magnetically interact with the permanent magnets of the first translation-permanent magnet device, a first rotation-electromagnet device having electromagnets which magnetically interact with the permanent magnets of the rotation-permanent magnet device, and a controller connected to the first translating electromagnet device and to the first rotation-electromagnet device to control its electromagnets to control the translational movement of the travel carriage and the rotational movement of the bogie.

A rotating electrical machine of a brushless wound field type disposed between a stationary case and rotating member that rotates inside the case includes a stator held by the case, including an AC coil that generates a rotating magnetic field with an alternating current, a field core held by the case, the field core including a field coil that generates a magnetic flux with a direct current, a rotor fixed in contact with an outer circumferential surface of the rotating member and held rotatably relative to the stator and field coil, a rotor side core portion that is a part of the rotating member. The magnetic flux of the field coil passes from the field core through the rotor via the second air gap, the stator and rotor via the first air gap, the rotor side core portion, and the field core via the third air gap.

The invention relates to a drive system (1) with electromagnetic energy transfer. The system (1) comprises a track (3) comprising a plurality of stators (4), each stator (4) having at least one winding adapted to generate a magnetic field having a fundamental harmonic (8) and at least one further harmonic (9) when fed with an varying current, and a movable element (2) comprising a primary magnetic element (5) adapted to receive said fundamental harmonic (8) to drive said movable element (2) along said track. The system (1) is characterized in that said movable element (2) further comprises a secondary magnetic element (6a-6c) adapted to receive said at least one further harmonic (9) to generate power onboard of said movable element (2). The invention also relates to a linear fractional slot synchronous machine and a rotational synchronous machine.

In a transition of a transport unit of a long stator linear motor from a first control zone to a following second control zone in a movement direction, a first segment control unit is responsible for controlling the movement of the transport unit and the first control zone is extended, in the movement direction, by a number of virtual drive coils. The first segment control unit, which is assigned to the first control zone, calculates manipulated variables for the virtual drive coils, and transmits the manipulated variables for the virtual drive coils to the second segment control unit, which is assigned to the second control zone. The second segment control unit uses the transmitted manipulated variables for the virtual drive coils in order to energize the drive coils of the second control zone for moving the transport unit.

The invention refers to an electric linear motor, control apparatus, transport system and a method. The electric linear motor comprises a longitudinal stator beam; at least one mover at least partially surrounding the stator beam and adapted to move along the stator beam; which stator beam comprises at least two side faces located at opposite sides of the stator beam, each of the side faces carrying ferromagnetic poles spaced apart by a pitch, and which mover comprises at least two counter-faces facing the respective side faces of the stator beam. The mover has in at least one of said counter-faces rotor units having at least one winding and at least one permanent magnet arranged to co-act with the ferromagnetic poles of the respective side faces of the stator beam. The ferromagnetic stator poles of the stator beam and the rotor units of the mover are used for generating propulsion forces for driving the mover along the stator beam as well as for generating attraction forces to levitate the mover around the stator beam while driving.

A linear propulsion machine and system (10) is disclosed that includes a stator (30) having a plurality of teeth (34) and a mover (32) moveable in a linear direction along the stator (30). The mover may include a plurality of spaced apart ferromagnetic strata (40), a plurality of slots (42), a plurality of wire coils (44), and a plurality of magnet layers (46). Each of the slots (42) may be adjacent to at least one of the strata (40). Each coil (44) may be disposed in a slot (42). Each magnet layer (46) may be sandwiched between strata (40) and disposed inside one of the plurality of coils (44). Each coil (44) is disposed perpendicularly to the direction of magnetic flux of the magnet layer (46) around which the coil (44) is wound. In an embodiment, the teeth (34) or the magnet layer (46) may be disposed at an angle.

A moving body includes: a plurality of linear motors including a first linear motor driven by magnetic interaction with magnetic flux of a magnetic pole path; a position detection sensor configured to detect a position of the moving body; a first electrical angle detection sensor disposed at a position different from the position detection sensor in a path direction of the magnetic pole path and configured to detect an electrical angle of the first linear motor; and a control unit configured to, when one of the position detection sensor and the first electrical angle detection sensor is positioned at a magnetic pole absent section, use the other of the position detection sensor and the first electrical angle detection sensor both to detect a position of the moving body and to detect an electrical angle of the first linear motor.