A method for moving a stage relative to a base includes coupling a magnet assembly to the stage; coupling an array of coils to the base; and directing current to at least one of the coils with a control system that includes a processor to generate a force that levitates the stage relative to the base and moves the stage relative to the base. In one embodiment, the control system generates at least one current command that levitates and moves the stage while inhibiting the excitation of a first targeted flexible mode.

A linear motor system may include a plurality of track sections that may enable a mover to traverse a track formed by the plurality of track sections. The system may also include a plurality of connection modules, such that each connection module of the plurality of connection modules may physically couple two respective adjacent track sections of the plurality of track sections and communicatively couple the two respective adjacent track sections of the plurality of track section. Each connection module may also electrically couple the two respective adjacent track sections of the plurality of track section.

An armature for linear motor having excellent precision in attachment to a machine and capable of reducing the likelihood of trouble in a resin layer, entry of a foreign material, and the like is provided. An armature comprises: a block attachment part provided to a machine attachment side of a core; a protection sheet having ability to be impregnated with resin and covering a surface of the core and a surface of the block attachment part; a block attached to the block attachment part and having a machine attachment surface arranged at the block attachment side of the core; and a resin layer covering the protection sheet covering the core. The machine attachment surface of the block is exposed from the resin layer.

A permanent magnet linear motor. The permanent magnet linear motor including a primary comprising a magnetically permeable core having a first face surface on a first side of the core a plurality of teeth forming a plurality of slots on the first side, and a plurality of multi-phase windings wound to have segments thereof in the slots forming a plurality of magnetic poles at each of the first face surfaces; a permanent magnet pair of opposing polarity configured to produce magnetic flux and cause the primary to exert a force on the secondary when the plurality of multiphase windings are excited by a multiphase source; and a passive ferromagnetic secondary adjacent to but spaced from the first face surface, the passive ferromagnetic secondary being moveable with respect to the primary.

A multi-degree-of-freedom electromagnetic machine includes a first structure, a second structure, and a control. The first structure is configured to rotate about a spin axis and about a tilt axis that is perpendicular to the spin axis, and includes a first spin conductor, a second spin conductor, and a tilt conductor, which together form a general shape of a surface. The second structure is disposed adjacent to the first structure and includes a plurality of magnets. The control is configured to controllably supply alternating current (AC) to the first and second spin conductors and direct current (DC) to the tilt conductor, wherein the first structure continuously rotates about the spin axis in response to the AC being supplied to the first and second spin conductors, and rotates about the tilt axis to a tilt position in response to the DC being supplied to the tilt conductor.

Disclosed is a double-stator linear vernier permanent magnet (DS-LVPM) motor and method to increase the magnetic field modulation effect. The motor contains a primary, and first and second secondaries on both sides of the primary, spaced by an air gap. The motor secondary includes modulation teeth. The primary is bilaterally symmetrical, and permanent magnets (PM) are embedded in the yoke of the primary core elements. The design solves the inherent problem of flux leakage at the end of PMs for conventional VPM motors, so as to improve utilization of PMs, thereby increasing thrust density of the motors. Additionally, the motor secondaries are laminated by silicon steel sheet, which saves PM material and significantly reduces cost for linear long stroke applications. By adjusting PM structure parameters, the design can use finite element method (FFM) to calculate repeatedly to get PM structure parameters corresponding to maximum electromotive force (EMF).

A linear flux switching permanent magnet (FSPM) motor includes a longitudinal, linear stator with stator teeth facing an air gap and a mover including at least one armature including armature teeth embedding at least one permanent magnet, which armature teeth are spaced apart by slots for receiving an armature winding, and which armature teeth have an extended width portion towards the air gap. The extended width portion of the armature teeth begins in the longitudinal direction of the armature teeth already at the level of the armature windings.

A linear flux switching permanent magnet (FSPM) motor includes a longitudinal linear stator with stator teeth facing an air gap and a mover including at least one armature including armature teeth, which are spaced apart by slots for receiving an armature winding. At least some, preferably all of the armature teeth embed at least two permanent magnets, respectively, which are positioned successively in longitudinal direction of the tooth, whereby the two permanent magnets have different magnetic properties.

A linear flux switching permanent magnet (FSPM) motor includes a longitudinal linear stator with stator teeth facing an air gap and a mover including at least one armature with armature teeth, whereby at least some of said, preferably all of said armature teeth embed at least one permanent magnet, respectively, which armature teeth are spaced apart by slots for receiving an armature winding. The permanent magnets embedded in the corresponding armature teeth protrude by an overhang over the back of the armature in a direction facing away from the air gap.

A method for moving a stage includes coupling a stage mover to the stage, and directing current to the stage mover with a control system. The stage mover includes a magnet array and a conductor array positioned adjacent to the magnet array. The conductor array includes a first layer of coils and a second layer of coils, with the first layer of coils being closer to the magnet array than the second layer of coils. The control system directs current to the first layer of coils and the second layer of coils independently. Further, the control system directs more current to the first layer of coils than the second layer of coils during a movement step to reduce the power consumption.