Provided is a linear motor control apparatus capable of improving estimation accuracy of a resonance frequency immediately after start, and a compressor equipped with the linear motor control apparatus. A linear motor control apparatus includes a winding to which an AC voltage is applied and a mover which is connected to an elastic body, in which the linear motor control apparatus includes an operation mode (1) which monotonously increases amplitude of the AC voltage while keeping a frequency of the AC voltage substantially constant, and an operation mode (2) which changes the frequency of the AC voltage while keeping the amplitude of the AC voltage substantially constant, and executes the operation mode (1) and the operation mode (2) in this order.

An actuation assembly includes a drive mechanism that has an array of magnetic members moveable along an axis, and a gear train that has an input and an output. The drive mechanism causes the input to move in response to generating an electromagnetic field that interacts with at least one of the array of magnetic members.

A linear motor system may include a plurality of track sections that may enable a mover to traverse a track formed by the plurality of track sections. The system may also include a plurality of connection modules, such that each connection module of the plurality of connection modules may physically couple two respective adjacent track sections of the plurality of track sections and communicatively couple the two respective adjacent track sections of the plurality of track section. Each connection module may also electrically couple the two respective adjacent track sections of the plurality of track section.

A linear actuator includes an electromagnetic coil and a stator cover extending over the electromagnetic coil. A set of magnets are disposed end-to-end to form a ring. The magnets are adjacent the electromagnetic coil but offset from the center of the coil. A ferromagnetic central ring disposed within the coil at the inner diameter thereof and next to the magnets. A non-ferromagnetic ring disposed within the coil at the inner diameter thereof extending between the central ring and the other side of the stator cover. A translator is disposed between the magnets and the central axis. The translator is latchable between two positions within the linear actuator depending on the magnetic flux and the direction in which the electric current is flowing.

A method for moving a stage relative to a base includes coupling a magnet assembly to the stage; coupling an array of coils to the base; and directing current to at least one of the coils with a control system that includes a processor to generate a force that levitates the stage relative to the base and moves the stage relative to the base. In one embodiment, the control system generates at least one current command that levitates and moves the stage while inhibiting the excitation of a first targeted flexible mode.

A reticle transport system having a magnetically levitated transportation stage is disclosed. Such a system may be suitable for use in vacuum environments, for example, ultra-clean vacuum environments. A magnetic levitated linear motor functions to propel the transportation stage in a linear direction along a defined axis of travel and to magnetically levitate the transportation stage

A permanent field magnet is disposed between two armatures parallel to each other, and includes a first field magnet section facing a first armature of the two armatures, and a second field magnet section facing a second armature of the two armatures that is different from the first armature. The first field magnet section includes a first main magnet that generates a magnetic field for the first armature and a first auxiliary magnet that increases magnetic flux of a magnetic pole of the first main magnet. The second field magnet section includes a second main magnet that generates a magnetic field for the second armature and a second auxiliary magnet that increases magnetic flux of a magnetic pole of the second main magnet. The first main magnet and the second main magnet, or the first auxiliary magnet and the second auxiliary magnet, are permanent magnets magnetized in the same direction.

A motor assembly comprising a mover assembly and a stator. The mover assembly comprising a plurality of mover assembly units, each unit comprising: a non-ferromagnetic core with a profile of an outer surface having at least two flat sections lying on intersecting planes; at least two ferromagnetic laminated structures arranged on the at least two flat sections of the non-ferromagnetic core, each ferromagnetic laminated structure includes a stack of ferromagnetic plates, each plate is covered with a non-conductive coating. Each ferromagnetic laminated structure is arranged on a corresponding flat section of the at least two flat sections of the non-ferromagnetic core such that side of each ferromagnetic plate is adjacent to the non-ferromagnetic core thereby making the ferromagnetic plates of the at least two ferromagnetic laminated structures lie on intersecting planes. The mover assembly unit further comprises windings of wire wrapped around the ferromagnetic laminated structures and the non-ferromagnetic core.

An optical element exchange unit, has a rotatable wheel e.g. with different filters. The wheel has first soft magnetic teeth protruding from a soft magnetic part of the wheel at even angular offset along at least part of a ring around a rotation axis of the wheel. The optical element exchange unit has a stator comprising a first soft magnetic yoke, the first soft magnetic yoke having poles with a first group and second group of at least one second soft magnetic tooth respectively, the second soft magnetic teeth of the first and second group protruding from the poles of the first soft magnetic yoke towards the first soft magnetic teeth and a second soft magnetic yoke, the second soft magnetic yoke having poles with a third group and fourth group of at least one second soft magnetic tooth respectively, the second soft magnetic teeth of the third and fourth group protruding from the poles of the second soft magnetic yoke towards the first soft magnetic teeth. A permanent magnet is magnetically coupled between parts of the first and second soft magnetic yoke. The teeth of the first, second, third and fourth groups are positioned so that, when each tooth of the first group is aligned with its nearest first soft magnetic tooth, each second soft magnetic tooth of the second group is halfway the angular offset between its nearest first soft magnetic teeth, and the second soft magnetic teeth in the third and fourth group are less than half the angular offset in opposite directions from their nearest first soft magnetic teeth.

A conveyor table transfer apparatus includes a link mechanism connects the drive member driven by a motor (drive source) and a movable member supporting the movable linear conveyor. The link mechanism has one or more degrees of freedom. The degree of freedom of the link mechanism causes the link mechanism to bend in response to a degree of parallelization between the linear-motion guide rail and the linear-motion guide rail, making it possible to suppress load to be applied to the drive member or the movable member. As a result, it becomes possible to move the movable linear conveyor smoothly without requiring precise adjustment in mounting of the drive member and the movable member on the linear-motion guide rail and the linear-motion guide rail respectively.