Patent classifications
H
H03
H03H
9/00
H03H9/02
H03H9/02535
H03H9/02818
H03H9/02889
H03H9/02889
ACOUSTIC WAVE DEVICE WITH MULTI-LAYER INTERDIGITAL TRANSDUCER ELECTRODE HAVING LAYER OF MORE DENSE MATERIAL OVER LAYER OF LESS DENSE MATERIAL
An acoustic wave device includes a piezoelectric layer and an interdigital transducer electrode disposed over the piezoelectric layer. The interdigital transducer electrode is thicker in a center region of the interdigital transducer electrode than in a gap region of the interdigital transducer electrode to thereby reduce a mass loading of the interdigital transducer electrode in the gap region. The interdigital transducer electrode has a layer of more dense material disposed of a layer of less dense material.