Patent classifications
H03K4/26
Method and system for generating a ramping signal
A system is provided for generating a ramping signal. The system includes a plurality of storage circuits each including an input and an output. The output of a previous storage circuit is connected to the input of a next storage circuit. The storage circuits are configured to propagate a first enable signal based on a first control signal. The system also includes a plurality of first current generating circuits. Each first current generating circuit is coupled to the output of a corresponding storage circuit to receive the propagated first enable signal. The first current generating circuits are configured to generate a first current signal based on the propagated first enable signal.
METHOD AND SYSTEM FOR GENERATING A RAMPING SIGNAL
A system is provided for generating a ramping signal. The system includes a plurality of storage circuits each including an input and an output. The output of a previous storage circuit is connected to the input of a next storage circuit. The storage circuits are configured to propagate a first enable signal based on a first control signal. The system also includes a plurality of first current generating circuits. Each first current generating circuit is coupled to the output of a corresponding storage circuit to receive the propagated first enable signal. The first current generating circuits are configured to generate a first current signal based on the propagated first enable signal.
METHOD AND SYSTEM FOR GENERATING A RAMPING SIGNAL
A system is provided for generating a ramping signal. The system includes a plurality of storage circuits each including an input and an output. The output of a previous storage circuit is connected to the input of a next storage circuit. The storage circuits are configured to propagate a first enable signal based on a first control signal. The system also includes a plurality of first current generating circuits. Each first current generating circuit is coupled to the output of a corresponding storage circuit to receive the propagated first enable signal. The first current generating circuits are configured to generate a first current signal based on the propagated first enable signal.
Method and system for generating a ramping signal
A system is provided for generating a ramping signal. The system includes a plurality of storage circuits each including an input and an output. The output of a previous storage circuit is connected to the input of a next storage circuit. The storage circuits are configured to propagate a first enable signal based on a first control signal. The system also includes a plurality of first current generating circuits. Each first current generating circuit is coupled to the output of a corresponding storage circuit to receive the propagated first enable signal. The first current generating circuits are configured to generate a first current signal based on the propagated first enable signal.
Method and system for generating a ramping signal
A system is provided for generating a ramping signal. The system includes a plurality of storage circuits each including an input and an output. The output of a previous storage circuit is connected to the input of a next storage circuit. The storage circuits are configured to propagate a first enable signal based on a first control signal. The system also includes a plurality of first current generating circuits. Each first current generating circuit is coupled to the output of a corresponding storage circuit to receive the propagated first enable signal. The first current generating circuits are configured to generate a first current signal based on the propagated first enable signal.
METHOD AND SYSTEM FOR GENERATING A RAMPING SIGNAL
A system is provided for generating a ramping signal. The system includes a plurality of storage circuits each including an input and an output. The output of a previous storage circuit is connected to the input of a next storage circuit. The storage circuits are configured to propagate a first enable signal based on a first control signal. The system also includes a plurality of first current generating circuits. Each first current generating circuit is coupled to the output of a corresponding storage circuit to receive the propagated first enable signal. The first current generating circuits are configured to generate a first current signal based on the propagated first enable signal.
Method and system for generating a ramping signal
A system is provided for generating a ramping signal. The system includes a plurality of storage circuits each including an input and an output. The output of a previous storage circuit is connected to the input of a next storage circuit. The storage circuits are configured to propagate a first enable signal based on a first control signal. The system also includes a plurality of first current generating circuits. Each first current generating circuit is coupled to the output of a corresponding storage circuit to receive the propagated first enable signal. The first current generating circuits are configured to generate a first current signal based on the propagated first enable signal.
Method and system for generating a ramping signal
A system is provided for generating a ramping signal. The system includes a plurality of storage circuits each including an input and an output. The output of a previous storage circuit is connected to the input of a next storage circuit. The storage circuits are configured to propagate a first enable signal based on a first control signal. The system also includes a plurality of first current generating circuits. Each first current generating circuit is coupled to the output of a corresponding storage circuit to receive the propagated first enable signal. The first current generating circuits are configured to generate a first current signal based on the propagated first enable signal.
APPARATUS AND METHOD FOR GENERATING MULTI-LEVEL HIGH VOLTAGE NON-SINUSOIDAL SIGNAL IN SEMICONDUCTOR MANUFACTURING EQUIPMENT USING PLASMA
According to the present embodiment, provided is a non-sinusoidal signal generation apparatus comprising: a first rectangular wave circuit, which can apply, to an output terminal, two positive voltages having different magnitudes; a second rectangular wave circuit, which can apply, to the output terminal, two negative voltages having different magnitudes; and a sawtooth wave circuit, which can apply, to the output terminal, two sawtooth wave voltages having different magnitudes, wherein the sawtooth wave circuit comprises an inductor for drawing current from a capacitive load connected to the output terminal.
APPARATUS AND METHOD FOR GENERATING MULTI-LEVEL HIGH VOLTAGE NON-SINUSOIDAL SIGNAL IN SEMICONDUCTOR MANUFACTURING EQUIPMENT USING PLASMA
According to the present embodiment, provided is a non-sinusoidal signal generation apparatus comprising: a first rectangular wave circuit, which can apply, to an output terminal, two positive voltages having different magnitudes; a second rectangular wave circuit, which can apply, to the output terminal, two negative voltages having different magnitudes; and a sawtooth wave circuit, which can apply, to the output terminal, two sawtooth wave voltages having different magnitudes, wherein the sawtooth wave circuit comprises an inductor for drawing current from a capacitive load connected to the output terminal.