Embodiments disclosed herein may include a heater pedestal. In an embodiment, the heater pedestal may comprise a heater pedestal body and a conductive mesh embedded in the heater pedestal. In an embodiment, the conductive mesh is electrically coupled to a voltage source In an embodiment, the heater pedestal may further comprise a support surface on the heater pedestal body. In an embodiment, the support surface comprises a plurality of pillars extending out from the heater pedestal body and arranged in concentric rings. In an embodiment pillars in an outermost concentric ring have a height that is greater than a height of pillars in an innermost concentric ring.

The present invention relates to a ceramic heater with improved reliability, the ceramic heater including: a heater body having a mesh type high-frequency electrode, and an electrode rod connecting member being in contact with a lower surface of the high-frequency electrode; and a heater support mounted on a lower portion of the heater body and configured to support the heater body, in which the electrode rod connecting member is in area contact with one surface of the high-frequency electrode.

An electrostatic chuck heater includes a resistance heating element. A region of the resistance heating element from one end to another end of the resistance heating element is divided into a plurality of sections. Recessed grooves are provided in the respective sections along a longitudinal direction of the resistance heating element in a surface. In a connection portion between the recessed grooves that are provided in the adjacent sections, a projection portion that extends along the connection portion is provided.

A holding device includes: a plate-shaped member having a first surface approximately orthogonal to a first direction; heat generating resistors and temperature measuring resistors disposed in respective segments formed by virtually dividing at least part of the plate-shaped member, the segments being arranged in a direction orthogonal to the first direction; and an electricity supply section that forms electricity supply paths for the heat generating resistors and the temperature measuring resistors. The holding device holds an object on the first surface of the plate-shaped member. The position of the temperature measuring resistors in the first direction differs from the position of the heat generating resistors in the first direction. A specific temperature measuring resistor that is at least one of the temperature measuring resistors includes a plurality of resistor elements disposed at different positions in the first direction and connected to one another in series.

A substrate processing apparatus includes a rotary table configured to hold and rotate a substrate; an electronic component provided at the rotary table and configured to be rotated along with the rotary table; a first electrode unit provided at the rotary table and configured to be rotated along with the rotary table, the first electrode unit comprising multiple first electrodes electrically connected to the electronic component via multiple first conductive lines; an electric device configured to perform a power supply to the electronic component and a transmission/reception of signals; a second electrode unit comprising multiple second electrodes electrically connected to the electric device via multiple second conductive lines and arranged at positions respectively corresponding to the multiple first electrodes to be brought into contact with the multiple first electrodes; and an electrode moving device configured to connect/disconnect the first electrode unit to/from the second electrode unit.

An aerosol-generating device comprises an infrared emitter and an electric core for supplying power to the infrared emitter; the infrared emitter comprises at least one first infrared emission region and at least one second infrared emission region arranged in sequence along the circumferential direction of the chamber; the first infrared emission region and the second infrared emission region are independently activatable to independently radiate infrared rays into the chamber to heat different portions of the smokable material. In the above aerosol-generating device, the regions of the smokable material receiving chamber which are different along the circumferential direction correspond to the first infrared emission region and the second infrared emission region, respectively, and can be independently heated by the first infrared emission region and the second infrared emission region, respectively, in use, so that the smokable material can be gradually heated from part to whole in use.

The present invention relates to a ceramic heater with improved reliability, comprising: a heater body provided with a high-frequency electrode made of a mesh type metal material, and an electrode rod connecting member that contacts the bottom surface of the high-frequency electrode; and a heater support that is mounted below the heater body and supports the heater body, wherein the high-frequency electrode comprises a first electrode member having a wire type mesh structure and a second electrode member having a sheet type mesh structure.

A multi-zone heater with a plurality of thermocouples such that different heater zones can be monitored for temperature independently. The independent thermocouples may have their leads routed out from the shaft of the heater in a channel that is closed with a joining process that results in hermetic seal adapted to withstand both the interior atmosphere of the shaft and the process chemicals in the process chamber. The thermocouple and its leads may be enclosed with a joining process in which a channel cover is brazed to the heater plate with aluminum.

A method of manufacturing a ceramic heater, the method includes the steps of: (a) forming, on a surface of a first ceramic fired layer or an unfired layer, a resistance heating element or its precursor in a predetermined pattern; (b) forming a recessed groove along a longitudinal direction by radiating laser light to the resistance heating element or its precursor; (c) obtaining a layered body by disposing a second ceramic unfired layer on the surface of the first ceramic fired layer or the unfired layer; and (d) obtaining the ceramic heater in which the resistance heating element is embedded in a ceramic substrate by performing hot press firing on the layered body, wherein, in the step (b), the recessed groove is formed such that a side wall surface of the recessed groove is inclined relative to the surface of the first ceramic fired layer or the unfired layer.

An AlN joined body includes a first AlN member and a second AlN member that are joined together. The content of yttria in the first AlN member is equal to or below the detection limit. The second AlN member contains yttria.