H10B12/036

Memory arrays comprising memory cells

Some embodiments include a memory array having vertically-stacked memory cells. Each of the memory cells includes a transistor coupled with a charge-storage device, and each of the transistors has channel material with a bandgap greater than 2 electron-volts. Some embodiments include a memory array having digit lines extending along a vertical direction and wordlines extending along a horizontal direction. The memory array includes memory cells, with each of the memory cells being uniquely addressed by combination of one of the digit lines and one of the wordlines. Each of the memory cells includes a transistor which has GaP channel material. Each of the transistors has first and second source/drain regions spaced from one another by the GaP channel material. The first source/drain regions are coupled with the digit lines, and each of the memory cells includes a capacitor coupled with the second source/drain region of the associated transistor. Other embodiments are disclosed.

SEMICONDUCTOR STORAGE DEVICE
20210202485 · 2021-07-01 · ·

A semiconductor storage device according to the present embodiment includes a plurality of first wires provided above a surface of a semiconductor substrate to extend in a first direction, and a plurality of second wires provided above the first wires to extend in a second direction crossing the first direction. A plurality of capacitor elements are arranged every other intersection region among intersection regions between the first wires and the second wires as viewed from above the surface of the semiconductor substrate. A plurality of transistors are provided above the capacitor elements to correspond thereto, respectively. A first distance between two of the capacitor elements, which are adjacent to each other in the first direction, is narrower than a second distance between two of the capacitor elements, which are adjacent to each other in the second direction.

Array Of Capacitors, An Array Of Memory Cells, A Method Of Forming An Array Of Capacitors, And A Method Of Forming An Array Of Memory Cells

A method of forming an array of capacitors comprises forming a vertical stack above a substrate. The stack comprises a horizontally-elongated conductive structure and an insulator material directly above the conductive structure. Horizontally-spaced openings are formed in the insulator material to the conductive structure. An upwardly-open container-shaped bottom capacitor electrode is formed in individual of the openings. The bottom capacitor electrode is directly against conductive material of the conductive structure. The conductive structure directly electrically couples the bottom capacitor electrodes together. A capacitor insulator is formed in the openings laterally-inward of the bottom capacitor electrodes. A top capacitor electrode is formed in individual of the openings laterally-inward of the capacitor insulator. The top capacitor electrodes are not directly electrically coupled together. Structure independent of method is disclosed.

SEMICONDUCTOR STRUCTURE AND METHOD OF FORMING THE SAME
20210134805 · 2021-05-06 ·

A semiconductor structure includes a substrate, a drain region, a word line, a gate structure, and a first bit line. The drain region is disposed on the substrate. The gate structure is disposed on the drain region and has a portion in the word line. The first bit line is disposed on the gate structure to serve as a source region.

SEMICONDUCTOR STRUCTURE, METHOD FOR MANUFACTURING SEMICONDUCTOR STRUCTURE, AND MEMORY

A semiconductor structure, a method for manufacturing a semiconductor structure, and a memory are provided. The semiconductor structure includes a substrate, a plurality of active pillars arranged above the substrate, a storage structure, and a plurality of transistors. The active pillars are arranged in an array in a first direction and in a second direction. Each active pillar includes a first sub active pillar and a second sub active pillar arranged on the first sub active pillar. The first direction and the second direction intersect with each other and are both parallel to a top surface of the substrate. A material of the first sub active pillar includes a first element, and resistivity of the first sub active pillar including the first element is less than resistivity of the first sub active pillar absence of the first element. The storage structure covers a sidewall of the first sub active pillar.

MEMORY DEVICES AND METHODS FOR FORMING THE SAME
20230413531 · 2023-12-21 ·

A memory device includes a memory array and a peripheral circuit coupled to the memory array. The memory array includes a vertical transistor having a first terminal and a second terminal, a storage unit having a first end coupled to the first terminal of the vertical transistor, and a bit line coupled to the second terminal of the vertical transistor. The vertical transistor includes a semiconductor body extending in a first direction, and a gate structure coupled to at least one side of the semiconductor body. The vertical transistor is disposed between the bit line and the storage unit along the first direction.

Memory arrays

A memory array comprises vertically-alternating tiers of insulative material and memory cells. The memory cells individually comprise a transistor comprising first and second source/drain regions having a channel region there-between and a gate operatively proximate the channel region. The individual memory cells comprise a capacitor comprising first and second electrodes having a capacitor insulator there-between. The first electrode electrically couples to the first source/drain region. Wordline structures extend elevationally through the insulative material and the memory cells of the vertically-alternating tiers. Individual of the gates that are in different of the memory cell tiers directly electrically couple to individual of the wordline structures. Sense-lines electrically couple to multiple of the second source/drain regions of individual of the transistors. Other embodiments are disclosed.

SEMICONDUCTOR STORAGE DEVICE
20210082921 · 2021-03-18 ·

According to one embodiment, a semiconductor storage device includes a plurality of first wires extending in a first direction, a plurality of second wires extending in a second direction intersecting the first direction, and a plurality of first semiconductor transistors. Each first semiconductor transistor is respectively connected between one of the plurality of first wires and one of the plurality of second wires. Each first semiconductor transistor includes a gate electrode connected to the respective first wire and a channel layer on a first surface of the second wire and also a side surface of the respective second wire.

ARRAY OF CAPACITORS, AN ARRAY OF MEMORY CELLS, A METHOD OF FORMING AN ARRAY OF CAPACITORS, AND A METHOD OF FORMING AN ARRAY OF MEMORY CELLS

A method of forming an array of capacitors comprises forming a vertical stack above a substrate. The stack comprises a horizontally-elongated conductive structure and an insulator material directly above the conductive structure. Horizontally-spaced openings are formed in the insulator material to the conductive structure. An upwardly-open container-shaped bottom capacitor electrode is formed in individual of the openings. The bottom capacitor electrode is directly against conductive material of the conductive structure. The conductive structure directly electrically couples the bottom capacitor electrodes together. A capacitor insulator is formed in the openings laterally-inward of the bottom capacitor electrodes. A top capacitor electrode is formed in individual of the openings laterally-inward of the capacitor insulator. The top capacitor electrodes are not directly electrically coupled together. Structure independent of method is disclosed.

Memory Arrays

A memory array comprises vertically-alternating tiers of insulative material and memory cells. The memory cells individually comprise a transistor comprising first and second source/drain regions having a channel region there-between and a gate operatively proximate the channel region. The individual memory cells comprise a capacitor comprising first and second electrodes having a capacitor insulator there-between. The first electrode electrically couples to the first source/drain region. Wordline structures extend elevationally through the insulative material and the memory cells of the vertically-alternating tiers. Individual of the gates that are in different of the memory cell tiers directly electrically couple to individual of the wordline structures. Sense-lines electrically couple to multiple of the second source/drain regions of individual of the transistors. Other embodiments are disclosed.