There is presented a transparent optical device element (700) comprising an optical lens (744), comprising one or more piezoelectric actuators (206, 208, 210), wherein said optical lens (744) comprises an optical aperture (632), and wherein the optical device element furthermore comprises a passivation layer (312, 314, 742, 628) placed on said optical lens, said passivation layer comprising a barrier layer (312)forming a humidity barrier, and being located on at least a portion of said cover member, where said portion of said cover member is intersected by the optical axis, and on said piezoelectric actuators, and wherein the passivation layer furthermore comprises one or more further layers (628) located on at least said portion of said cover member being intersected by the optical axis, wherein said passivation layer forms an anti-reflection coating for said optical lens (744) at least along the optical axis (634).

There is provided a vibration generating device including: a piezoelectric element which is deformed when power is applied thereto; an installation member below which the piezoelectric element is installed; a weight fixedly installed below the installation member to be disposed below the piezoelectric element; a plurality of elastic members connected to the installation member to change a displacement direction by deformation of the installation member and disposed to face each other; and a damper member fixedly installed on a lower surface of the weight, wherein a thickness of the damper member is determined to allow the damper member to be disposed in a space formed by the plurality of elastic members when the elastic members are driven normally.

Curved piezoelectric transducers are provided. The curved piezoelectric transducer includes a substrate, a curved support layer having a peripheral portion in contact with the substrate, and a curved piezoelectric element disposed on the curved support layer. Methods of making the curved piezoelectric transducers are also provided. The curved piezoelectric transducers, devices and methods find use in a variety of applications, including devices, such as electronics devices, having one or more (e.g., an array) of the curved piezoelectric transducers on a substrate.

The present invention relates to a transparent optical device element comprising a microlens and a method of providing stress and thermal compensation and tuning mechanical strength and curvature of a tunable microlens.

Piezoelectric micromachined ultrasonic transducer (pMUT) arrays and techniques for frequency shaping in pMUT arrays are described, for example to achieve both high frequency and low frequency operation in a same device. The ability to operate at both high and low frequencies may be tuned during use of the device to adaptively adjust for optimal resolution at a particular penetration depth of interest. In embodiments, various sizes of piezoelectric membranes are fabricated for tuning resonance frequency across the membranes. The variously sized piezoelectric membranes are lumped together by two or more separate electrode rails, enabling independent addressing between the two or more subgroups of sized transducer elements. Signal processing of the drive and/or response signals generated and/or received from each of the two or more electrode rails may achieve a variety of operative modes for the device, such as a near field mode, a far field mode, and an ultra wide bandwidth mode.

An optical device with a deformable membrane (2) including an anchor area (2.3) on a support (1) entrapping a liquid or gas fluid, a central area (2.1) reversibly deformable from a rest position, actuating means for moving the fluid (4) biasing the membrane (2) into an intermediate area between the anchor area (2.3) and the central area (2.1), the actuating means include a piezoelectric continuous crown accommodating several actuators (5.1), this crown surrounding the central area (2.1), the actuating means (5) being anchored to the membrane (2) in at least the intermediate area (2.2), the actuating means (5) and the membrane (2) to which they are anchored, forming at least one piezoelectric bimorph (B), the actuating means (5) radially contracting or extending upon actuation so as to generate a movement of said fluid (4) from the intermediate area (2.2) to the central area (2.1) of the membrane (2) or vice versa, aiming at deforming the central area (2.1) with respect to its rest position.

Techniques and mechanisms to provide mechanical support for a micromachined piezoelectric transducer array. In an embodiment, a transducer array includes transducer elements each comprising a respective membrane portion and a respective supporting structure disposed on or around a periphery of that membrane portion. The transducer elements are initially formed on a sacrificial wafer, wherein supporting structures of the transducer elements facilitate subsequent removal of the sacrificial wafer and/or subsequent handling of the transducer elements. In another embodiment, a polymer layer is disposed on the transducer elements to provide for flexible support during such subsequent handling.

Techniques and structures for providing flexibility of a micromachined transducer array. In an embodiment, a transducer array includes a plurality of transducer elements each comprising a piezoelectric element and one or more electrodes disposed in or on a support layer. The support layer is bonded to a flexible layer including a polymer material, wherein flexibility of the transducer array results in part from a total thickness of a flexible layer. In another embodiment, flexibility of the transducer array results in part from one or more flexural structures formed therein.

A piezoelectric device includes a diaphragm provided on a side of one surface of a substrate and a piezoelectric actuator having a first electrode, a piezoelectric body layer, and a second electrode which are stacked on a side of a surface opposite to the substrate of the diaphragm, in which the piezoelectric actuator includes an active portion in which the piezoelectric body layer is pinched between the first electrode and the second electrode, and has an uneven portion constituted with a plurality of projection portions and a recess portion formed between the projection portions on a surface of the first electrode on a side of the piezoelectric body layer at an end portion of the active portion.

An optical device with a deformable membrane including an anchor area on a support entrapping a liquid or gas fluid, a central area reversibly deformable from a rest position, actuating means for moving the fluid biasing the membrane into an intermediate area between the anchor area and the central area, the actuating means include a piezoelectric continuous crown accommodating several actuators, this crown surrounding the central area, the actuating means being anchored to the membrane in the intermediate area, the actuating means and the membrane to which they are anchored, forming at least one piezoelectric bimorph, the actuating means radially contracting or extending upon actuation to generate a movement of said fluid from the intermediate area to the central area of the membrane or vice versa, aiming at deforming the central area with respect to its rest position.