An integrated circuit which enables lower cost yet provides superior performance compared to standard silicon integrated circuits by utilizing thin film transistors (TFTs) fabricated in BEOL. Improved memory circuits are enabled by utilizing TFTs to improve density and access in a three dimensional circuit design which minimizes die area. Improved I/O is enabled by eliminating the area on the surface of the semiconductor dedicated to I/O and allowing many times the number of I/O available. Improved speed and lower power are also enabled by the shortened metal routing lines and reducing leakage.

A phase change memory (PCM) cell comprising a substrate a first electrode located on the substrate. A phase change material layer located adjacent to the first electrode, wherein a first side of the phase change material layer is in direct contact with the first electrode. A second electrode located adjacent to phase change material layer, wherein the second electrode is in direct contact with a second side of the phase change material layer, wherein the first side and the second side are different sides of the phase change material layer. An airgap is located directly above the phase change material layer, wherein the airgap provides space for the phase change material to expand or restrict.

A method for fabricating an electronic device including a semiconductor memory includes: forming a memory layer over a substrate; forming a memory element by selectively etching the memory layer, wherein forming the memory element includes forming an etching residue on a sidewall of the memory element, the etching residue including a first metal; and forming a spacer by implanting oxygen and a second metal into the etching residue, the spacer including a compound of the first metal-oxygen-the second metal, the second metal being different from the first metal.

A resistive random access memory device is provided. The resistive random access memory device includes a first electrode, a second electrode, and an electrolyte layer disposed between the first electrode and the second electrode. One of the first electrode and the second electrode includes an ion supply layer providing two or more kinds of metal ions to the electrolyte layer. The two or more kinds of metal ions have different mobilities in the electrolyte layer. Two or more conductive bridges are generated by the two or more kinds of metal ions, respectively.

A nonvolatile memory device group includes: (A) a first insulating layer; (B) a second insulating layer that has a first concavity and a second concavity communicating with the first concavity and having a width larger than that of the first concavity and that is disposed on the first insulating layer; (C) a plurality of electrodes that are disposed in the first insulating layer and the top surface of which is exposed from the bottom surface of the first concavity; (D) an information storage layer that is formed on the side walls and the bottom surfaces of the first concavity and the second concavity; and (E) a conductive material layer that is filled in a space surrounded with the information storage layer in the second concavity.

A semiconductor structure comprises a conductive bridge random access memory device and an access device connected in series with the conductive bridge random access memory device. The conductive bridge random access memory device and the access device are arranged in a vertical stack. The vertical stack has a sidewall profile that increases in width from a bottom surface of the vertical stack to a top surface of the vertical stack.

A semiconductor memory includes first to third lines, the second line crossing the first and third lines between the first line and the third line, a first memory element overlapping an intersection region of the first and second lines between the first line and the second line, the first memory element including a first memory layer, a first electrode under the first memory layer, and a second electrode over the first memory layer, and a second memory element overlapping an intersection region of the second and third lines between the second line and the third line, the second memory element including a second memory layer, a third electrode under the second memory layer, and a fourth electrode over the second memory layer. An electrical resistance relation of the third and fourth electrodes is controlled according to an electrical resistance relation of electrical resistances of the first and second electrodes.

A memory device including a first conductive layer; a second conductive layer; a resistance change region provided between the first conductive layer and the second conductive layer; a first region provided between the resistance change region and the first conductive layer, the first region including a first element selected from the group consisting of niobium, vanadium, tantalum, and titanium, and a second element selected from the group consisting of oxygen, sulfur, selenium, and tellurium, the first region having a first atomic ratio of the first element to the second element; and a second region provided between the first region and the resistance change region, the second region including the first element and the second element, the second region having a second atomic ratio of the first element to the second element, the second atomic ratio being smaller than the first atomic ratio.

An integrated circuit memory device includes a plurality of row selection transistors and a dummy row selection transistor, on a substrate. A plurality of word lines and a plurality of dummy word lines are also provided on the substrate. A plurality of memory cells are provided, which are electrically connected to corresponding ones of the plurality of word lines. A plurality of dummy memory cells are provided, which are electrically connected to corresponding ones of the plurality of dummy word lines. A first wiring structure is provided, which electrically connects a first one of the plurality of word lines to a first one of the plurality of row selection transistors, and a second wiring structure is provided, which electrically connects the plurality of dummy word lines together and to the dummy row selection transistor.

A method of manufacturing a switching element includes forming a first electrode layer over a substrate, forming a switching structure on the first electrode layer, and forming a second electrode layer on the switching structure. The switching structure includes a plurality of unit switching layers that includes a first unit switching layer and a second unit switching layer. Forming the first unit switching layer includes forming a first unit insulation layer, and injecting first dopants into the first unit insulation layer by performing a first ion implantation process. Forming the second unit switching layer includes forming a second unit insulation layer, and injecting second dopants into the second unit insulation layer by performing a second implantation process.