H01L21/28008

Semiconductor device including embedded crystalline back-gate bias planes, related design structure and method of fabrication

A semiconductor device is disclosed. The semiconductor device can include a first dielectric layer disposed on a substrate; a set of bias lines disposed on the first dielectric layer; a second dielectric layer disposed on the first dielectric layer and between the set of bias lines, wherein a thickness of the second dielectric layer is less than a thickness of the first dielectric layer; a patterned semiconductor layer disposed on portions of the second dielectric layer; and a set of devices disposed on the patterned semiconductor layer above the set of bias lines.

Sense amplifier layout for FinFET technology

A sense amplifier (SA) includes a semiconductor substrate having a source/drain (S/D) diffusion region; a pair of SA sensing devices both disposed in the S/D diffusion region; an SA enabling device disposed in the same S/D diffusion region as where the pair of SA sensing devices are disposed in; and a sense amplifier enabling signal (SAE) line for carrying an SAE signal, for turning on the SA enabling device to discharge one of the pair of SA sensing devices during a data read from the sense amplifier, wherein the SA enabling device is arranged to provide buffer protection for source/drain terminals of the pair of SA sensing devices.

Self-Aligned Metal Gate Etch Back Process And Device
20170222005 · 2017-08-03 ·

A method of forming a semiconductor device includes receiving a device having a substrate and a first dielectric layer surrounding a gate trench. The method further includes depositing a gate dielectric layer and a gate work function (WF) layer in the gate trench, and forming a hard mask (HM) layer in a space surrounded by the gate WF layer. The method further includes recessing the gate WF layer such that a top surface of the gate WF layer in the gate trench is below a top surface of the first dielectric layer. After the recessing of the gate WF layer, the method further includes removing the HM layer in the gate trench. After the removing of the HM layer, the method further includes depositing a metal layer in the gate trench.

High-k / metal gate CMOS transistors with TiN gates

An integrated circuit with a thick TiN metal gate with a work function greater than 4.85 eV and with a thin TiN metal gate with a work function less than 4.25 eV. An integrated circuit with a replacement gate PMOS TiN metal gate transistor with a workfunction greater than 4.85 eV and with a replacement gate NMOS TiN metal gate transistor with a workfunction less than 4.25 eV. An integrated circuit with a gate first PMOS TiN metal gate transistor with a workfunction greater than 4.85 eV and with a gate first NMOS TiN metal gate transistor with a workfunction less than 4.25 eV.

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
20170330891 · 2017-11-16 · ·

A method of manufacturing a semiconductor device having a memory cell for a split-gate MONOS memory with a halo region, which prevents miswriting in the memory cell and worsening of short channel characteristics. In the method, a first diffusion layer of a drain region and a second diffusion layer of a source region in the memory cell for the MONOS memory are formed in different ion implantation steps. The steps are carried out so that the first diffusion layer has a smaller formation depth than the second diffusion layer. After the formation of the layers, the impurities inside the first and second diffusion layers are diffused by heat treatment to form a first diffusion region and a second diffusion region.

Semiconductor structure containing low-resistance source and drain contacts

Semiconductor structures having a source contact and a drain contact that exhibit reduced contact resistance and methods of forming the same are disclosed. In one embodiment of the present application, the reduced contact resistance is provided by forming a layer of a dipole metal or metal-insulator-semiconductor (MIS) oxide between an epitaxial semiconductor material (providing the source region and the drain region of the device) and an overlying metal semiconductor alloy. In yet other embodiment, the reduced contact resistance is provided by increasing the area of the source region and drain region by patterning the epitaxial semiconductor material that constitutes at least an upper portion of the source region and drain region of the device.

Trench-gate MOS transistor and method for manufacturing

A semiconductor device includes a semiconductor part; first and second electrodes respectively on back and front surfaces of the semiconductor part; and a control electrode between the semiconductor part and the second electrode. The control electrode is provided inside a trench of the semiconductor part. The control electrode is electrically insulated from the semiconductor part by a first insulating film and electrically insulated from the second electrode by a second insulating film. The control electrode includes an insulator at a position apart from the first insulating film and the second insulating film. The semiconductor part includes a first layer of a first conductivity type provided between the first and second electrodes, the second layer of a second conductivity type provided between the first layer and the second electrode and the third layer of the first conductivity type selectively provided between the second layer and the second electrode.

SEMICONDUCTOR DEVICE CAPABLE OF HIGH-VOLTAGE OPERATION
20170263761 · 2017-09-14 ·

A semiconductor device capable of high-voltage operation includes a semiconductor substrate having a first conductivity type. A first well doped region is formed in the semiconductor substrate, having a second conductivity type that is the opposite of the first conductivity type. A first doped region and a second doped region are formed on the first well doped region, having the second conductivity type. A first gate structure is formed over the first well doped region and adjacent to the first doped region. A second gate structure overlaps the first gate structure and the first well doped region. A third gate structure is formed beside the second gate structure and close to the second doped region. The top surface of the first well doped region between the second gate structure and the third gate structure avoids having any gate structure and silicide formed thereon.

INTEGRATED CIRCUITS WITH RECESSED GATE ELECTRODES

Integrated circuits including MOSFETs with selectively recessed gate electrodes. Transistors having recessed gate electrodes with reduced capacitive coupling area to adjacent source and drain contact metallization are provided alongside transistors with gate electrodes that are non-recessed and have greater z-height. In embodiments, analog circuits employ transistors with gate electrodes of a given z-height while logic gates employ transistors with recessed gate electrodes of lesser z-height. In embodiments, subsets of substantially planar gate electrodes are selectively etched back to differentiate a height of the gate electrode based on a given transistor's application within a circuit.

Manufacturing method of array substrate with reduced number of patterning processes array substrate and display device

An array substrate, a manufacturing method thereof and a display device are disclosed. Patterns comprising a gate, a gate insulating layer and a polysilicon active layer are formed on a base substrate by single patterning process. A passivation layer is formed on the substrate surface formed with the patterns, and patterns of a first via and a second via are formed on a surface of the passivation layer by single patterning process. Patterns of a source, a drain and a pixel electrode are formed on the substrate surface formed with the patterns by single patterning process. The source is electrically connected with the polysilicon active layer through the first via, and the drain is electrically connected with the polysilicon active layer through the second via. A pattern of pixel defining layer is formed on the substrate surface formed with the patterns by single patterning process.