The present description relates to a gallium nitride transistor which includes at least one source/drain structure having low contact resistance between a 2D electron gas of the gallium nitride transistor and the source/drain structure. The low contact resistance may be a result of at least a portion of the source/drain structure being a single-crystal structure abutting the 2D electron gas. In one embodiment, the single-crystal structure is grown with a portion of a charge inducing layer of the gallium nitride transistor acting as a nucleation site.

An electronic device includes a semiconductor body and a dielectric layer extending over the semiconductor body. A galvanic isolation module includes a first metal region extending in the dielectric layer at a first height and a second metal region extending in the dielectric layer at a second height greater than the first height. The first and second metal regions are capacitively or magnetically coupleable together. The second metal region includes a side wall and a bottom wall coupled to one another through rounded surface portions.

An electronic device includes a semiconductor body and a dielectric layer extending over the semiconductor body. A galvanic isolation module includes a first metal region extending in the dielectric layer at a first height and a second metal region extending in the dielectric layer at a second height greater than the first height. The first and second metal regions are capacitively or magnetically coupleable together. The second metal region includes a side wall and a bottom wall coupled to one another through rounded surface portions.

A memory device comprises a patterned multi-layers stacking structure, a semiconductor capping layer, a memory layer and a channel layer. The patterned multi-layers stacking structure is formed on a substrate and has at least one trench used to define a plurality of ridge-shaped stacks comprising at least one conductive strip in the patterned multi-layers stacking structure. The semiconductor capping layer covers on the ridge-shaped stacks. The memory layer covers on sidewalls of the trench. The channel layer covers on the memory layer, the semiconductor capping layer and a bottom of the trench, wherein the channel layer is directly in contact with the semiconductor capping layer.

A memory device comprises a patterned multi-layers stacking structure, a semiconductor capping layer, a memory layer and a channel layer. The patterned multi-layers stacking structure is formed on a substrate and has at least one trench used to define a plurality of ridge-shaped stacks comprising at least one conductive strip in the patterned multi-layers stacking structure. The semiconductor capping layer covers on the ridge-shaped stacks. The memory layer covers on sidewalls of the trench. The channel layer covers on the memory layer, the semiconductor capping layer and a bottom of the trench, wherein the channel layer is directly in contact with the semiconductor capping layer.

A FinFET includes a semiconductor substrate, a plurality of insulators, a gate stack, and a strained material. The semiconductor substrate includes at least one semiconductor fin thereon. The semiconductor fin includes source/drain regions and a channel region, and a width of the source/drain regions is larger than a width of the channel region. The insulators are disposed on the semiconductor substrate and the semiconductor fin is sandwiched by the insulators. The gate stack is located over the channel region of the semiconductor fin and over portions of the insulators. The strained material covers the source/drain regions of the semiconductor fin. In addition, a method for fabricating the FinFET is provided.

A FinFET includes a semiconductor substrate, a plurality of insulators, a gate stack, and a strained material. The semiconductor substrate includes at least one semiconductor fin thereon. The semiconductor fin includes source/drain regions and a channel region, and a width of the source/drain regions is larger than a width of the channel region. The insulators are disposed on the semiconductor substrate and the semiconductor fin is sandwiched by the insulators. The gate stack is located over the channel region of the semiconductor fin and over portions of the insulators. The strained material covers the source/drain regions of the semiconductor fin. In addition, a method for fabricating the FinFET is provided.

The present disclosure relates to a tunnel FET device with a steep sub-threshold slope, and a corresponding method of formation. In some embodiments, the tunnel FET device has a dielectric layer arranged over a substrate. A conductive gate electrode and a conductive drain electrode are arranged over the dielectric layer. A conductive source electrode contacts the substrate at a first position located along a first side of the conductive gate electrode. The conductive drain electrode is arranged at a second position located along the first side of the conductive gate electrode. By arranging the conductive gate electrode over the dielectric layer at a position laterally offset from the conductive drain electrode, the conductive gate electrode is able to generate an electric field that controls tunneling of minority carriers, which can change the effective barrier height of the tunnel barrier, and thereby improving a sub-threshold slope of the tunnel FET device.

The present disclosure relates to a tunnel FET device with a steep sub-threshold slope, and a corresponding method of formation. In some embodiments, the tunnel FET device has a dielectric layer arranged over a substrate. A conductive gate electrode and a conductive drain electrode are arranged over the dielectric layer. A conductive source electrode contacts the substrate at a first position located along a first side of the conductive gate electrode. The conductive drain electrode is arranged at a second position located along the first side of the conductive gate electrode. By arranging the conductive gate electrode over the dielectric layer at a position laterally offset from the conductive drain electrode, the conductive gate electrode is able to generate an electric field that controls tunneling of minority carriers, which can change the effective barrier height of the tunnel barrier, and thereby improving a sub-threshold slope of the tunnel FET device.

An angled gas cluster ion beam is used for each sidewall and top of a fin (two applications) to form work-function metal layer(s) only on the sidewalls and top of each fin.