A semiconductor device includes a conductive substrate, a conductive first joint portion arranged on the substrate, a SiC diode chip arranged on the first joint portion, a conductive second joint portion arranged on the SiC diode chip, and a transistor chip arranged on the second joint portion. The SiC diode chip includes a cathode pad arranged on one end and an anode pad arranged on the other end in the thickness direction. The cathode pad is joined to the substrate by the first joint portion. The transistor chip includes a drain electrode arranged on one end in the thickness direction. The anode pad is joined with the drain electrode by the second joint portion. The anode pad is arranged in a region enclosed by an outer edge of the SiC diode chip as viewed in a thickness direction of the substrate. The anode pad has an area larger than that of the transistor chip as viewed in the thickness direction of the substrate.

A semiconductor device includes a conductive substrate, a conductive first joint portion arranged on the substrate, a SiC diode chip arranged on the first joint portion, a conductive second joint portion arranged on the SiC diode chip, and a transistor chip arranged on the second joint portion. The SiC diode chip includes a cathode pad arranged on one end and an anode pad arranged on the other end in the thickness direction. The cathode pad is joined to the substrate by the first joint portion. The transistor chip includes a drain electrode arranged on one end in the thickness direction. The anode pad is joined with the drain electrode by the second joint portion. The anode pad is arranged in a region enclosed by an outer edge of the SiC diode chip as viewed in a thickness direction of the substrate. The anode pad has an area larger than that of the transistor chip as viewed in the thickness direction of the substrate.

A method of passivating a MOTFT including providing a metal oxide thin film transistor having a surface defined by spaced apart source/drain terminals positioned on a layer of semiconductor metal oxide and material in a space between the source/drain terminals, the space between the source/drain terminals defining a conduction channel in the layer of semiconductor metal oxide. Forming a layer of passivation material on the surface defined by the spaced apart source/drain terminals and the material in the space between the source/drain terminals. Establishing oxygen vacancy equilibrium in the conduction channel of the layer of semiconductor metal oxide by annealing in an oxygen containing ambient the MOTFT and layer of passivation material and depositing a layer including a noble metal, a refractory metal, and/or a transparent conducting metal oxide on the layer of passivation material overlying the space between the source/drain terminals.

A method of passivating a MOTFT including providing a metal oxide thin film transistor having a surface defined by spaced apart source/drain terminals positioned on a layer of semiconductor metal oxide and material in a space between the source/drain terminals, the space between the source/drain terminals defining a conduction channel in the layer of semiconductor metal oxide. Forming a layer of passivation material on the surface defined by the spaced apart source/drain terminals and the material in the space between the source/drain terminals. Establishing oxygen vacancy equilibrium in the conduction channel of the layer of semiconductor metal oxide by annealing in an oxygen containing ambient the MOTFT and layer of passivation material and depositing a layer including a noble metal, a refractory metal, and/or a transparent conducting metal oxide on the layer of passivation material overlying the space between the source/drain terminals.

A thin-film transistor comprises an annealed layer comprising crystalline zinc oxide. A passivation layer is adjacent to the thin-film transistor. The passivation layer has a thickness and material composition such that when a dose of radiation from a radiation source irradiates the thin-film transistor, a portion of the dose that includes an approximate maximum concentration of the dose is located within the annealed layer. The annealed layer has a thickness and threshold displacement energies after it has been annealed such that: a) a difference between a transfer characteristic value of the thin-film transistor before and after the dose is less than a first threshold; and b) a difference between a transistor output characteristic value of the thin-film before and after the dose is less than a second threshold. The thresholds are based on a desired performance of the thin-film transistor.

A thin-film transistor comprises an annealed layer comprising crystalline zinc oxide. A passivation layer is adjacent to the thin-film transistor. The passivation layer has a thickness and material composition such that when a dose of radiation from a radiation source irradiates the thin-film transistor, a portion of the dose that includes an approximate maximum concentration of the dose is located within the annealed layer. The annealed layer has a thickness and threshold displacement energies after it has been annealed such that: a) a difference between a transfer characteristic value of the thin-film transistor before and after the dose is less than a first threshold; and b) a difference between a transistor output characteristic value of the thin-film before and after the dose is less than a second threshold. The thresholds are based on a desired performance of the thin-film transistor.

An organic light-emitting display device comprises a first thin-film transistor disposed on a substrate; and a second thin-film transistor disposed on the substrate and spaced apart from the first thin-film transistor. The first thin-film transistor comprises a first semiconductor layer, a first conductive layer disposed on the first semiconductor layer and that overlaps the first semiconductor layer, and a first insulating layer disposed between the first semiconductor layer and the first conductive layer. The second thin-film transistor comprises a second semiconductor layer, and a second conductive layer disposed on the second semiconductor layer and that overlaps the second semiconductor layer. The first semiconductor layer is disposed on a layer higher than the second semiconductor layer, the first semiconductor layer comprises an oxide semiconductor, the second semiconductor layer comprises low temperature polycrystalline silicon (LTPS), and the first insulating layer covers the entire first semiconductor layer.

An organic light-emitting display device comprises a first thin-film transistor disposed on a substrate; and a second thin-film transistor disposed on the substrate and spaced apart from the first thin-film transistor. The first thin-film transistor comprises a first semiconductor layer, a first conductive layer disposed on the first semiconductor layer and that overlaps the first semiconductor layer, and a first insulating layer disposed between the first semiconductor layer and the first conductive layer. The second thin-film transistor comprises a second semiconductor layer, and a second conductive layer disposed on the second semiconductor layer and that overlaps the second semiconductor layer. The first semiconductor layer is disposed on a layer higher than the second semiconductor layer, the first semiconductor layer comprises an oxide semiconductor, the second semiconductor layer comprises low temperature polycrystalline silicon (LTPS), and the first insulating layer covers the entire first semiconductor layer.

The reliability of a transistor including an oxide semiconductor can be improved by suppressing a change in electrical characteristics. A transistor included in a semiconductor device includes a first oxide semiconductor film over a first insulating film, a gate insulating film over the first oxide semiconductor film, a second oxide semiconductor film over the gate insulating film, and a second insulating film over the first oxide semiconductor film and the second oxide semiconductor film. The first oxide semiconductor film includes a channel region in contact with the gate insulating film, a source region in contact with the second insulating film, and a drain region in contact with the second insulating film. The second oxide semiconductor film has a higher carrier density than the first oxide semiconductor film.

The reliability of a transistor including an oxide semiconductor can be improved by suppressing a change in electrical characteristics. A transistor included in a semiconductor device includes a first oxide semiconductor film over a first insulating film, a gate insulating film over the first oxide semiconductor film, a second oxide semiconductor film over the gate insulating film, and a second insulating film over the first oxide semiconductor film and the second oxide semiconductor film. The first oxide semiconductor film includes a channel region in contact with the gate insulating film, a source region in contact with the second insulating film, and a drain region in contact with the second insulating film. The second oxide semiconductor film has a higher carrier density than the first oxide semiconductor film.