A semiconductor device includes a semiconductor part, first to third electrodes, and first and second control electrodes. The semiconductor part is provided between the first and second electrodes. On the second electrode side of the semiconductor part, the first control electrode and the third electrode are provided in a first trench, and the second control electrode is provided in a second trench. The first control electrode is provided between the second and third electrode. In a first direction from the first control electrode toward the second control electrode, the first trench has first and second widths. The first width is a combined width of the third electrode and insulating portions provided on both sides of the third electrode. The second width is a combined width of the first control electrode and the gate insulating films on both sides thereof. The first width is greater than the second width.

The present disclosure provides a semiconductor structure that includes a substrate having a frontside and a backside; an active region extruded from the substrate and surrounded by an isolation feature; a gate stack formed on the front side of the substrate and disposed on the active region; a first and a second source/drain (S/D) feature formed on the active region and interposed by the gate stack; a frontside contact feature disposed on a top surface of the first S/D feature; a backside contact feature disposed on and electrically connected to a bottom surface of the second S/D feature; and a semiconductor layer disposed on a bottom surface of the first S/D feature with a first thickness and a bottom surface of the gate stack with a second thickness being greater than the first thickness.

In an embodiment, a device includes: a first fin; a gate structure over the first fin; a first source/drain region adjacent the gate structure; an etch stop layer over the first source/drain region; a conductive line over the etch stop layer, the conductive line isolated from the first source/drain region by the etch stop layer, a top surface of the conductive line being coplanar with a top surface of the gate structure; and a power rail contact extending through the first fin, the power rail contact connected to the first source/drain region.

The disclosure concerns an electronic device comprising, stacked from a first surface to a second surface, a first stack and a second stack of two high electron mobility transistors, referred to as first and second transistor, the first and the second stack each comprising, from an insulating layer, interposed between the first and the second stack, a barrier layer and a channel layer, the first and the second transistor respectively comprising a first and a second set of electrodes, the first and the second set of electrodes being each provided with a source electrode, with a drain electrode, and with a gate electrode which are arranged so that the first and the second transistor form a half-arm of a bridge.

Methods of forming decoupling capacitors in interconnect structures formed on backsides of semiconductor devices and semiconductor devices including the same are disclosed. In an embodiment, a device includes a device layer including a first transistor; a first interconnect structure on a front-side of the device layer; a second interconnect structure on a backside of the device layer, the second interconnect structure including a first dielectric layer on the backside of the device layer; a contact extending through the first dielectric layer to a source/drain region of the first transistor; a first conductive layer including a first conductive line electrically connected to the source/drain region of the first transistor through the contact; and a second dielectric layer adjacent the first conductive line, the second dielectric layer including a material having a k-value greater than 7.0, a first decoupling capacitor including the first conductive line and the second dielectric layer.

A semiconductor device, includes a device layer comprising: a channel region; a gate stack over and along sidewalls of the channel region and a first insulating fin; and an epitaxial source/drain region adjacent the channel region, wherein the epitaxial source/drain region extends through the first insulating fin. The semiconductor device further includes a front-side interconnect structure on a first side of the device layer; and a backside interconnect structure on a second side of the device layer opposite the first side of the device layer. The backside interconnect structure comprises a backside source/drain contact that is electrically connected to the epitaxial source/drain region.

According to one example, a method includes performing a first etching process on a fin stack to form a first recess and a second recess at a first depth, the first recess and the second recess on opposite sides of a gate structure that is on the fin stack. The method further includes depositing inner spacers within the first recess and the second recess. The method further includes, after depositing the inner spacers, performing a second etching process to extend a depth of the first recess to a second depth. The method further includes forming a dummy contact region within the first recess, forming a source structure within the first recess on the dummy contact region, and forming a drain structure within the second recess.

An LDMOS device and a fabrication method for fabricating the same are provided. The LDMOS device includes: a substrate, which is of a first dopant type; an epitaxial layer, which is of the first dopant type and formed on the substrate; a gate structure disposed on an upper surface of the epitaxial layer; a well region of the first dopant type and a drift region of a second dopant type, both disposed in the epitaxial layer; a source region of the second dopant type, disposed within the well region; a drain region of the first dopant type, disposed within the drift region; a first insulating layer covering an upper surface and two sidewalls of the gate structure and the upper surface of the epitaxial layer; and a first conducting channel extending through the first insulating layer, source region and epitaxial layer, in contact the source region.

A semiconductor device includes a substrate having a front surface including a first long side and a second long side extending in a first direction and opposed to each other, and a first short side and a second short side extending in a second direction intersecting the first direction and opposed to each other, a source finger provided on the front surface, a drain finger provided on the front surface, and a gate finger provided on the front surface and sandwiched between the source finger and the drain finger, wherein a via hole penetrating the substrate is provided in the substrate, a region where the via hole is connected to the source finger in the front surface is contained within the source finger, and the via hole has a maximum width in the first direction larger than a maximum width in the second direction.

Transistor cell architectures including both front-side and back-side structures. A transistor may include one or more semiconductor fins with a gate stack disposed along a sidewall of a channel portion of the fin. One or more source/drain regions of the fin are etched to form recesses with a depth below the channel region. The recesses may extend through the entire fin height. Source/drain semiconductor is then deposited within the recess, coupling the channel region to a deep source/drain. A back-side of the transistor is processed to reveal the deep source/drain semiconductor material. One or more back-side interconnect metallization levels may couple to the deep source/drain of the transistor.